Kainova
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| Brand | Kainova |
|---|---|
| Origin | Taiwan |
| Manufacturer Type | Authorized Distributor |
| Product Category | Domestic (Taiwan-made) |
| Model | KAM-201 |
| Pricing | Upon Request |
| Reticle Handling Compatibility | EUV & Optical Reticles |
| Bonding Precision | ±0.1 mm |
| Post-Bonding Optical Distortion | <2 nm |
| Bonding Force Range | 0.035–0.4 kN |
| Cleanroom Particle Control | 0 EA for particles >100 nm |
| AMHS Integration | SEMI E84/E87 compliant |
| Vision-Based Alignment | Real-time image registration with dynamic parallelism compensation |
| AOI Inspection | Dedicated structured-light illumination for pellicle defect detection |
| Automated End-Effector Exchange | Yes |
| KAX-311 Reticle Transfer Module | Integrated rotational, flipping, and cassette exchange functions |
| Brand | Kainova |
|---|---|
| Origin | Taiwan |
| Manufacturer Type | Authorized Distributor |
| Product Category | Domestic (Taiwan-made) |
| Model | KAR-211 |
| Pricing | Upon Request |
| Load Ports | 2–8 configurable |
| Motion Control | 5-axis dual-end-effector robot |
| Wafer Compatibility | 200 mm (8″), 300 mm (12″), and thinned wafers (≤725 µm) |
| Dual-Side Wafer ID Reading | OCR + barcode (SEMI P17 compliant) |
| Interface Standards | SECS/GEM v2.0, SEMI E84 OHT Handshake Protocol |
| Cleanroom Certification | ISO Class 3 (FS-209E Class 1) |
| Throughput | ≥700 WPH |
| Positioning Accuracy | ±0.05 mm |
| Airflow Design | FFU-controlled laminar downflow with CFD-validated uniform velocity profile (0.45 ±0.05 m/s) |
| Safety & Compliance | SEMI S2-0215 Certified |
| Brand | Kainova |
|---|---|
| Origin | Taiwan |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Taiwan |
| Model | Kainova Tech KAS-381 / KAS-382 / KAP-541 |
| Pricing | Upon Request |
| Maximum Cassette Capacity (KAS-381) | 87 FOUPs (2175 wafers) |
| Throughput | ≥180 WPH |
| Cleanroom Classification | ISO Class 4 (FS-209E Class 10) |
| Compatible Wafer Sizes | 200 mm and 300 mm |
| Substrate Compatibility | Standard and thinned wafers |
| Operating Environment | Nitrogen-purged (KAS-381/KAS-382) |
| Cassette Handling | Fully automated lid actuation, dual-lane unpacking/packing, recipe-driven sorting, batch merging/splitting, and Wafer ID–based routing |
| Brand | KAINOVA |
|---|---|
| Origin | Taiwan |
| Manufacturer Type | Authorized Distributor |
| Regional Classification | Asia-Pacific Sourced |
| Model | Kainova Tech – Microcontamination Control Solution |
| Pricing | Available Upon Request |