Kojin (Hefei)
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| Brand | Kojin (Hefei) |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Region of Manufacture | Domestic (China) |
| Model | VTC-3RF |
| Price Range | USD 7,000 – 14,000 |
| Input Power | 220 VAC, 50/60 Hz, Single-Phase, 800 W (including vacuum pump) |
| RF Power Supply | 13.56 MHz, 100 W (manual impedance matching) or optional 300 W (auto-matching) |
| Target Diameter | 25.4 mm (1 inch), Max Thickness: 3 mm |
| Cooling Water Flow Rate | 10 L/min (integrated 16 L/min recirculating chiller) |
| Chamber Dimensions | Ø256 mm × 250 mm ID × 276 mm H (high-purity quartz) |
| Chamber Seal | Aluminum flange (Ø274 mm) with silicone O-ring |
| Plasma Shielding | Stainless steel mesh enclosure |
| Base Pressure | <1.0×10⁻² Torr (dual-stage rotary vane pump) or <5×10⁻⁵ Torr (turbo-molecular pump option) |
| Substrate Stage | Rotatable (0–20 rpm), heated (max 700 °C short-term, 500 °C continuous), Ø50 mm (accommodates up to 2-inch wafers), temperature stability ±10 °C |
| Optional Quartz Crystal Microbalance (QCM) | Real-time thickness monitoring, 0.10 Å resolution, LED display with material parameter input |
| Certification | CE compliant |
| Warranty | 12 months, lifetime technical support |