MTI Corporation
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| Brand | MTI Corporation |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Al₂O₃/ZnO |
| Thickness | 500 Å (0.5 µm) ±5% |
| Crystal Orientation | c-plane (0001) |
| Resistivity | 10–10³ Ω·cm |
| Surface Finish | Single-side polished |
| Standard Diameter × Thickness | 50.8 mm × 0.5 mm |
| Packaging | Vacuum-sealed in Class 100 cleanroom bags inside Class 1000 cleanroom environment, or individual wafer cassette |
| Brand | MTI Corporation |
|---|---|
| Origin | Hefei, Anhui, China |
| Model | OTF-1200X-III-VT |
| Max Temperature | 1200 °C |
| Continuous Operating Temperature | 1100 °C |
| Temperature Uniformity | ±1 °C over 400 mm (isothermal zone) |
| Heating Rate | ≤20 °C/min (to max temp) |
| Temperature Control | Triple independent PID controllers, 30-segment programmable ramp/soak profiles per zone |
| Furnace Tube | High-purity quartz, OD 50 mm × ID 44 mm × L 1200 mm (also available in OD 60 mm and OD 80 mm variants) |
| Heating Zones | Top (135 mm), Center (260 mm), Bottom (135 mm) |
| Power Supply | AC 208–240 V, 1Φ, 50/60 Hz |
| Max Power Consumption | 4.8 kW (requires 30 A circuit breaker) |
| Cooling | Dual-layer air-cooled steel shell |
| Insulation | High-purity alumina fiber core with high-temperature alumina coating |
| Heating Elements | Mo-doped Fe–Cr–Al alloy wire with zirconia protective coating |
| Vacuum Compatibility | 10⁻² Torr (mechanical pump), 10⁻⁵ Torr (turbo-molecular pump) |
| Sealing System | Stainless steel flanges with integrated mechanical pressure gauge and stainless steel shut-off valve |
| Safety Features | Over-temperature cutoff, K-type Omega armored thermocouples, fail-safe thermal interlock |
| Certifications | CE-marked |
| Weight | ~115 kg |
| Dimensions (L×W×H) | 700 mm × 700 mm × 1680 mm |
| Warranty | 12 months parts and labor (excludes consumables: furnace tube, O-rings, heating elements) |