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| Brand | SUNJUNE |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VS-Q2 |
| Crystal Growth Capability | Single Crystal |
| Typical Growth Cycle per Run | 12 h |
| Diameter Control Precision (for Si single crystal) | ±0.05 mm over 6 mm isometric section |
| Usable Crystal Diameter Range | 2–5 mm |
| Quartz Tube Compatibility | OD 5–50 mm, Length 80–1500 mm |
| Base Vacuum (Mechanical Pump Only) | <5 Pa |
| Ultimate Vacuum (MPU-90i Molecular Pump Unit) | ≤1×10⁻⁶ Pa |
| Rotational Speed Control | Adjustable (0–30 rpm) |
| Vacuum Pumping Rate | Adjustable |
| Backfill Gas Flow Control | Programmable |
| Control Interface | Touchscreen with IL Intelligent Logic (IL) software |
| Operating Modes | Manual (independent pump control) & Auto (interlocked mechanical + molecular pump sequencing) |
| Compliance | Designed for GLP-compliant lab environments |
| Brand | SUNJUNE |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | VP-RS6 |
| Price Range | USD 7,000 – 14,000 |
| RF Power | 500 W |
| RF Frequency | 13.56 MHz |
| Chamber Material | 304 Stainless Steel |
| Max Operating Temperature (Chamber Wall) | ≤45 °C at Full Power (3 min) |
| Vacuum Display | Digital Pressure Readout |
| Gas Inlets | Dual Mass-Flow Controlled Ports |
| Control Interface | 7-inch Capacitive Touchscreen |
| Software Certification | China Copyright Registration No. 2021SR1026389 |
| Warranty | 24 Months Limited Hardware Warranty |
| Brand | SUNJUNE |
|---|---|
| Model | VS-Q Series |
| Origin | Guangdong, China |
| Manufacturer | SUNJUNE Technology Co., Ltd. |
| Construction | Stainless Steel Monolithic Enclosure |
| Vacuum Performance | ≤5 Pa (Mechanical Pump Only) / ≤1×10⁻⁵ Pa (MPU-90i Molecular Pump Unit) |
| Ultimate Vacuum (MPU-90i) | ≤1×10⁻⁶ Pa |
| Quartz Tube Dimensions Supported | OD 5–50 mm, Length 80–1500 mm |
| Rotation Speed | Adjustable |
| Vacuum Pumping Rate | Adjustable |
| Protective Gas Inlet Flow | Adjustable |
| Crystal Growth Capability | Black Phosphorus Crystals |
| Single-Crystal Growth Duration per Cycle | 12 h |
| Silicon Single-Crystal Constant-Diameter Length | 6 mm |
| Grown Crystal Diameter Range | 2–5 mm |
| Compliance | ASTM E29, ISO/IEC 17025 (for lab process validation), GLP-compliant operation mode supported |
| Control Interface | Touchscreen with IL Intelligent Logic Control Software |
| Operating Modes | Manual (independent mechanical pump control) & Automatic (interlocked mechanical + molecular pump sequencing) |
| Brand | SUNJUNE |
|---|---|
| Origin | Guangdong, China |
| Manufacturer | SUNJUNE Technology Co., Ltd. |
| Model | VP-RS15 |
| Etching Principle | Capacitively Coupled Plasma (CCP) |
| RF Power | 500 W |
| RF Frequency | 13.56 MHz |
| Etch Rate | High |
| Selectivity | PR/GaAs ≥ 4:1 |
| SiO₂/InP > 10 | 1 |
| Etch Profile | Isotropic |
| Residue Byproduct | CO₂ |
| Uniformity | <5% (across 4-inch wafer) |
| Aspect Ratio | ≥5:1 |
| Chamber Material | 304 Stainless Steel |
| Max. Operating Temperature | ≤45°C after 3 min full-power operation |
| Gas Inlets | 2 independent mass-flow-controlled ports |
| Vacuum Display | Digital real-time readout |
| Control Interface | 7-inch capacitive touchscreen with embedded control software (Software Copyright No.: 2021SR1026389) |
| Safety Features | Automatic door interlock, pressure-sensing lid detection, post-process venting sequence |
| Warranty | 24 months parts and labor |
| Brand | SUNJUNE |
|---|---|
| Origin | Guangdong, China |
| Manufacturer | SUNJUNE Technology Co., Ltd. |
| Model | VS-Q1 |
| Crystal Type | Single Crystal |
| Max. Crystal Diameter | 2–5 mm |
| Isometric Growth Length (Si) | 6 mm |
| Typical Growth Cycle per Run | 10 h |
| Quartz Tube OD Range | 5–50 mm |
| Quartz Tube Length Range | 80–1500 mm |
| Base Pressure (Mechanical Pump) | < 5 Pa |
| Base Pressure (MPU-90i Molecular Pump Unit) | < 1×10⁻⁵ Pa |
| Ultimate Vacuum (MPU-90i w/ Full-Range Gauge) | ≤ 1×10⁻⁶ Pa |
| Rotational Speed | Adjustable |
| Vacuum Pumping Rate | Adjustable |
| Backfill Gas Flow | Adjustable |
| Compliance | CE-marked components, GLP-aligned operational logging capability |
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