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| Brand | SUNJUNE |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VP-TA1 |
| RF Frequency | 13.56 MHz |
| RF Power | 500 W |
| Maximum Chamber Temperature | ≤150 °C |
| Continuous Unattended Operation | ≥8 h |
| Vacuum Display | Digital Real-Time Readout |
| Gas Inlets | 2 Independent Mass-Flow-Controlled Ports |
| Control Interface | Touchscreen with Integrated Plasma Control Software (Registration No. 2021SR1026389) |
| Warranty | 2 Years Comprehensive |
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