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| Brand | KEYENCE |
|---|---|
| Origin | Japan |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Import Status | Imported |
| Model | VK-X |
| Resolution | 0.01 nm |
| Laser Sources | Semiconductor lasers at 404 nm and 661 nm |
| Detector | 16-bit photomultiplier tube (PMT) |
| Scanning Module | Point-source laser scanned via X-Y galvanometric optical system |
| Scanning Modes | Laser confocal, focus variation, white-light interferometry, spectral interferometry |
| Maximum Scan Speed | 125 Hz (area), 7900 Hz (line) |
| Objective Lenses | 2.5×, 5×, 10×, 20×, 50×, 100× |
| Illumination Source | Short-wavelength laser illumination |
| XY Stage Control | Motorized and manual operation |
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