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| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer | KLA Corporation |
| Instrument Type | Nanoindentation and Scratch Tester |
| Model | iNano® |
| Force Range | 0.1 µN – 50 mN |
| Displacement Range | ±25 µm |
| Force Resolution | < 10 nN |
| Displacement Resolution | < 0.01 nm |
| Thermal Drift | < 0.05 nm/s (at 25 °C, stabilized) |
| Maximum Scratch Load | 50 mN |
| Available Indenter Types | Berkovich, Cube-Corner, Spherical (1–100 µm radius), Conical, Flat Punch |
| Integrated Microscope | 10×–100× digital zoom, 1 µm lateral resolution |
| Controller | InQuest™ high-speed electronics (100 kHz sampling, 20 µs time constant) |
| XY Stage Travel | 100 mm × 100 mm |
| Z-Stage Travel | 25 mm |
| Compliance with Standards | ASTM E2546, ISO 14577-1/2/3, JIS H 8509 |
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