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| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer | KLA Corporation |
| Product Type | Imported Instrument |
| Model | F54 Series |
| Pricing | Upon Request |
| Thickness Range | 4 nm – 100 µm (depending on configuration) |
| Wavelength Range | 190–1700 nm (F54-UVX) |
| Spot Size | Down to 1 µm (with 50× objective) |
| Aperture Options | 500, 250, 100, and 50 µm |
| Measurement Speed | Up to 2 points per second |
| Maximum Sample Diameter | 450 mm |
| Built-in Material Library | >130 refractive index & extinction coefficient datasets |
| Compliance | ASTM F398, ISO/IEC 17025-compatible operation environment |
| Software | Filmetrics F54 Metrology Suite v6.x (Windows 10/11, USB 3.0 interface) |
| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer | Filmetrics (a KLA company) |
| Type | Benchtop Spectroscopic Reflectometry System |
| Model | F3-sX |
| Wavelength Options | 980 nm / 1310 nm / 1550 nm |
| Thickness Range | 15 nm – 3 mm (depending on configuration and film type) |
| Spot Size | 10 µm |
| Material Library | >130 preloaded optical constants |
| Software | FILMeasure 8 (local acquisition & analysis), FILMeasure Standalone (remote data processing) |
| Compliance | Designed for semiconductor fab, R&D, and QC environments supporting GLP/GMP traceability workflows |
| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer | KLA Corporation |
| Product Type | Imported Instrument |
| Model | F54-XY Series |
| Pricing | Upon Request |
| Thickness Range (F54-XY) | 20 nm – 50 µm |
| Wavelength Range (F54-XY) | 380–1050 nm |
| Thickness Range (F54-XY-UV) | 4 nm – 35 µm |
| Wavelength Range (F54-XY-UV) | 190–1100 nm |
| Thickness Range (F54-XY-NIR) | 100 nm – 120 µm |
| Wavelength Range (F54-XY-NIR) | 950–1700 nm |
| Thickness Range (F54-XY-EXR) | 20 nm – 120 µm |
| Wavelength Range (F54-XY-EXR) | 380–1700 nm |
| Thickness Range (F54-XY-UVX) | 4 nm – 120 µm |
| Wavelength Range (F54-XY-UVX) | 190–1700 nm |
| Maximum Sample Size (F54-XY-200) | 200 mm |
| Maximum Sample Size (F54-XYT-300) | 300 mm |
| Measurement Speed | Up to 2 fields of view per second |
| Stage Type | Motorized XY stage (F54-XY-200) |
| Pattern Recognition | Yes, supports both arrayed and non-arrayed wafers |
| Software | FILMapper v6.x or later |
| Compliance | NIST-traceable calibration standards included |
| Material Library | >130 built-in optical constants |
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