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| Brand | TMC |
|---|---|
| Origin | USA |
| Model | STACIS Floor Platform 65 |
| Compliance | ASTM E1492, ISO 20486, SEMI S2 |
| Load Capacity | Up to 2,500 kg (configurable) |
| Active Isolation Bandwidth | 0.6–150 Hz |
| Residual Vibration | < 10 nm RMS (1–100 Hz) |
| Platform Material | 304 Stainless Steel |
| Footprint Customization | Yes, full dimensional and cutout flexibility |
| Controller | STACIS II Digital Feedback System with Ethernet/RS-232 Interface |
| Power Requirement | 100–240 VAC, 50/60 Hz |
| Environmental Operating Range | 15–30 °C, < 70% RH non-condensing |
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