Precision Geometric Measurement Instruments
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| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | JS100C |
| Pricing | Available upon Request |
| Measurement Principle | Inductive (LVDT-based) |
| Vertical Measurement Range | 160 µm |
| Probe Tip Radius | 2 µm / 1 µm (interchangeable) |
| Probe Normal Force | 0.5–50 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | < 0.5 nm |
| Vertical Resolution | 0.05 nm (full-scale) |
| Maximum Sample Size | 150 mm × 150 mm |
| Brand | ZEPTOOLS |
|---|---|
| Model | JS10B |
| Origin | Anhui, China |
| Measurement Range | 80 µm |
| Probe Normal Force | 0.5–50 mg |
| Step Height Repeatability | ≤0.5 nm (1σ, 30 scans on 1 µm Si standard) |
| Vertical Resolution | 0.05 nm (full scale) |
| Maximum Sample Size | ≤150 mm |
| Probe Tip Radius | ≥2 µm (standard, 60° included angle) |
| Optional Probe | ≤1 µm radius, 60° |
| Scan Speed | 5–100 µm/s |
| Sampling Rate | 200 Hz |
| Max Data Points per Scan | 2×10⁶ |
| XY Stage Travel | 150 mm (manual coarse/fine adjustment) |
| Z-Stage Travel | 10 mm |
| Rotary Stage | ±360° |
| Sample Thickness Limit | ≤10 mm |
| Compatible Substrates | Si, LiTaO₃, glass (opaque or semi-transparent) |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Model | JS10C |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 160 µm |
| Probe Tip Radius | 2 µm / 1 µm (interchangeable) |
| Normal Force Range | 0.5–50 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | < 0.5 nm |
| Vertical Resolution | 0.05 nm (full-scale) |
| Maximum Sample Size | 150 mm (Ø) |
| Scan Resolution | 10 nm |
| Scan Speed | 5–1000 µm/s |
| Max Data Points per Scan | 2,000,000 |
| Software Functions | Step Height, Surface Roughness (Ra, Rq, Rz, etc.), Flatness, Warp Measurement |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | JS2000B |
| Price | Upon Request |
| Positioning Accuracy | Better than ±10 µm |
| Standard Probe Tip Radius | ≥2 µm (60° included angle) |
| Maximum Scan Length | ≤55 mm |
| Step Height Repeatability | ≤0.5 nm |
| Vertical Resolution | 0.05 nm |
| Maximum Sample Size Compatibility | 6-inch and 8-inch wafers |
| Maximum Wafer Thickness | ≤10 mm |
| Wafer Material Compatibility | Silicon, Lithium Tantalate, Glass (opaque, translucent, and transparent) |
| Probe Normal Force Range | 0.5 mg–50 mg |
| Maximum Step Height Range | ≤80 µm |
| Image Recognition System Accuracy | Better than ±10 µm |
| Mechanical Stability (Marathon Test) | >500 wafers |
| Throughput | ≥10 WPH (single-side measurement at ≥5 locations) |
| Brand | ZEPTOOLS |
|---|---|
| Model | JS2000C |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 10 nm – 80 µm |
| Probe Tip Radius | 1 µm / 2 µm |
| Normal Force Range | 0.5–50 mg |
| Scan Length | ≤50 mm |
| Step Height Repeatability | <0.5 nm |
| Vertical Resolution | 0.05 nm |
| Wafer Compatibility | 150 mm (6″) and 200 mm (8″) |
| Maximum Wafer Thickness | 50 mm |
| Positioning Accuracy (Vision System) | ±10 µm |
| Mechanical Stability | >500 consecutive wafers in marathon testing |
| Throughput | ≥10 WPH (single-side, ≥5 measurement positions) |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Model | JS3000B |
| Positioning Accuracy | < ±10 µm |
| Probe Tip Radius | ≥2 µm (60° included angle, standard) |
| Probe Normal Force Range | 0.5–50 mg |
| Scan Length | ≤55 mm |
| Step Height Repeatability | ≤0.5 nm |
| Vertical Resolution | 0.05 nm |
| Maximum Step Height Range | ≤80 µm |
| Wafer Compatibility | 200 mm & 300 mm (thickness ≤10 mm |
| materials | Si, LiTaO₃, glass, opaque/semi-transparent/transparent substrates) |
| Image Recognition Localization Accuracy | < ±10 µm |
| Mechanical Stability | >500 wafers in continuous EFEM transfer test |
| Throughput | ≥10 WPH (single-side, ≥5 measurement sites) |
| Brand | ZOLIX |
|---|---|
| Model | HawkEye-1300 |
| Origin | Beijing, China |
| Manufacturer | ZOLIX (OEM & ODM Capable) |
| Type | Portable 3D Surface Profilometer |
| Measurement Principle | Spectral Confocal Line Scanning |
| Vertical Resolution | 1 µm |
| Vertical Repeatability | ±0.3 µm |
| Scan Width | 6.5 mm (selectable) |
| Z-Axis Range | 1.3 mm |
| Maximum Line Scan Rate | 1000 lines/s |
| Weight | 5 kg |
| Dimensions | 460 × 300 × 140 mm |
| Compliance | CE-marked for industrial lab use |
| Software Interface | SDK-supported (C/C++, Python, LabVIEW) |
| Brand | ZYGO |
|---|---|
| Origin | USA |
| Model | ZeGage Pro |
| Type | Non-Contact Profilometer / Surface Roughness Analyzer |
| Measurement Principle | Coherence Scanning Interferometry (CSI) |
| Compliance | ASTM E2947, ISO 25178-2, ISO 4287, ISO 10360-5 |