Probe Station
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| Origin | Germany |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | TS200-SE Probe System |
| Price Range | USD 13,500 – 40,500 (FOB) |
| Product Category | Temperature-Controlled Manual Probe Station |
| Operation Mode | Manual |
| Brand | SEMICS |
|---|---|
| Origin | South Korea |
| Model | OPUS-SH / OPUS-SD / OPUS3 / OPUS-SS |
| Wafer Compatibility | 6", 8", and 12" (SEMI-compliant) |
| Dimensions (W×D×H) | OPUS-SH: 1490 × 1680 × 960 mm |
| OPUS-SD | 1530 × 1782 × 960 mm |
| XY Travel Range | ±175 mm (SH), ±185 mm × ±175 mm (SD) |
| XY Positioning Accuracy | ±1.5 µm |
| Maximum Downforce | 500 kgf |
| Temperature Range Options | Ambient to +150 °C, -40 °C to +150 °C, -55 °C to +200 °C, and 25 °C environmental chamber control |
| Structural Architecture | Rigid Z-frame with flat-load configuration |
| Key Functionalities | Real-time configuration validation, smart pin alignment algorithm, intelligent probing path optimization, map-shift prevention, drawer-type (SH) or universal probe card interface (SD/OPUS3), full pogo-pin tester compatibility |
| Brand | SHNTI |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Authorized Distributor |
| Product Category | Surface Resistivity Probe Station |
| Operation Mode | Manual |
| Compatible Wafer Sizes | 4", 6", 8", 12" |
| Modular Expansion Support | mmWave (mmW), Failure Analysis (FA), MEMS, Wafer-Level Reliability (WLR), Optoelectronics |
| Brand | SHNTI |
|---|---|
| Origin | Shanghai, China |
| Model | M-Series |
| Operation Type | Manual |
| Maximum Wafer Size | 150 mm (6-inch) and 100 mm (4-inch) |
| Probe Compatibility | DC to 67 GHz RF, MEMS, and Surface Resistivity Measurements |
| Target Pad Size | ≥30 µm |
| Application Scope | Academic Teaching, R&D Lab Characterization, Low-Volume IC Device Evaluation |
| Brand | ULTECH |
|---|---|
| Origin | South Korea |
| Model | Micro-110 |
| Product Category | Vacuum Probe Station |
| Operation Type | Manual |
| Wafer Size Compatibility | 1–8 inch |
| Temperature Range Options | (a) –40 °C to 200 °C (Peltier), (b) –40 °C to 170 °C (Peltier), (c) RT to 450 °C (Ceramic Heater), (d) RT to 750 °C (Ceramic Heater), (e) 77 K to 300 K (Liquid Nitrogen Cryostat) |
| Vacuum Chamber | Hermetic Sealed with Optical Viewports |
| Gas Delivery | Mass Flow Controller (MFC)-Equipped Multi-Gas Inlet |
| Electrical Interface | Standard Coaxial & Triaxial Feedthroughs |
| Pricing | USD $150,000–$250,000 |
| Brand | ULTECH |
|---|---|
| Origin | South Korea |
| Model | MPS |
| Category | Vacuum Probe Station |
| Operation | Manual |
| Wafer Size Compatibility | 1″ to 8″ |
| Temperature Range Options | −40 °C to 200 °C (Peltier), −40 °C to 170 °C (Peltier), RT to 450 °C (Ceramic Heater), RT to 750 °C (Ceramic Heater), 77 K to 300 K (Liquid Nitrogen Cooling) |
| Vacuum Chamber | Yes, hermetic sealing |
| Gas Delivery | Mass Flow Controller (MFC)-equipped multi-gas inlet |
| Optical Access | Integrated viewport for microscope coupling |
| Electrical Interface | Standard coaxial and triaxial feedthroughs |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | OEM Manufacturer |
| Product Category | Domestic |
| Model | SEM Nano-Probe Station |
| Pricing | Upon Request |
| XYZ Travel Range | ±10 mm |
| Fine-Adjustment Resolution | 0.5 nm |
| Sample Stage Flatness | 10 µm |
| Total Probe Station Mass | 225 g |
| Max. Translation Speed | 3 mm/s |
| Motion Guidance | Zero-Gap Flexure Hinge System |
| Actuation | Piezoelectric Ceramic Positioning Stages |
| Optional Modules | Cryogenic Stage, High-Temperature Stage, Fiber Optic Feedthrough & Clamp, EBIC Kit |