Kanomax 3950-00 Laser Particle Counter
| Brand | Kanomax |
|---|---|
| Origin | Japan |
| Model | 3950-00 |
| Flow Rate | 2.83 L/min (0.1 CFM) |
| Flow Accuracy | ±5% |
| Timing Accuracy | ±1 s per 6 min |
| Repeatability | ±5% |
| Size Distribution Error | ±15% |
| Indication Error | ±30% |
| Particle Channels | 0.1 µm, 0.3 µm |
| Maximum Concentration | 10⁷ particles/m³ |
| Counting Efficiency | 50±20% at 0.1 µm (PSL), 100±10% at 0.15–0.2 µm (PSL) |
| False Count Rate | <1 count/35 min |
| Size Resolution | ≤15% (relative to 0.3 µm PSL) |
| Display | 4.3" color TFT touchscreen |
| Communication | RS-485, Ethernet (10/100BASE-TX), USB Host/Device |
| Data Storage | up to 10,000 records (CSV) |
| Operating Environment | 15–35 °C, 0–85% RH (non-condensing) |
| Dimensions | 150 × 163 × 228 mm |
| Weight | 3.4 kg |
| Compliance | JIS B9921, ISO 21501-4 |
Overview
The Kanomax 3950-00 Laser Particle Counter is an ultra-compact, high-sensitivity optical particle counter engineered for integration into cleanroom monitoring systems, semiconductor process tools, and critical environmental control infrastructure. Utilizing the principle of light scattering—where airborne particles passing through a focused laser beam generate scattered photons detected by a photodiode—the instrument delivers real-time, quantitative measurement of particulate concentration in air or process gases. Its dual-channel detection capability (0.1 µm and 0.3 µm) enables early-stage contamination assessment in ultra-clean environments where sub-0.2 µm particles significantly impact yield and reliability. Designed specifically to meet the stringent dimensional and interface requirements of OEM equipment integration, the 3950-00 operates at a nominal flow rate of 2.83 L/min (0.1 CFM), conforming to ISO 21501-4 and JIS B9921 standards for calibration traceability, counting efficiency, and sizing accuracy. Unlike benchtop laboratory counters, this model prioritizes embedded functionality over manual operation—making it suitable for continuous, unattended deployment in Class 1–Class 10 cleanrooms, mini-environments, and tool-integrated purge gas lines.
Key Features
- Ultra-compact form factor (150 × 163 × 228 mm) and lightweight design (3.4 kg) enable seamless integration into semiconductor fabrication tools, HVAC ducts, and modular cleanroom panels.
- High-resolution 4.3-inch color TFT touchscreen with intuitive icon-based navigation supports on-device configuration, real-time histogram visualization, and dual-mode display (cumulative ∑ and differential Δ counts).
- Dual optical detection channels optimized for 0.1 µm and 0.3 µm particles—critical for monitoring nucleation-mode aerosols and early-stage filter breakthrough in ultrapure gas delivery systems.
- Internal sampling pump ensures stable volumetric flow control (±5% accuracy), eliminating dependency on external vacuum sources and reducing system-level calibration drift.
- Multi-protocol digital interface: isolated RS-485 (Modbus RTU compatible), 10/100BASE-TX Ethernet with DHCP/Static IP support, and dual-role USB (Host for direct printing or USB storage; Device for PC synchronization).
- Configurable measurement modes including single-shot, repetitive, continuous, ISO-compliant sequential sampling, GB/T 16292-based batch logging, and statistical averaging—all programmable via onboard menu or remote command set.
Sample Compatibility & Compliance
The 3950-00 is validated for use with ambient air, compressed dry air (CDA), nitrogen, and other non-corrosive process gases commonly employed in microelectronics manufacturing and pharmaceutical aseptic processing. It does not require dilution for concentrations up to 10⁷ particles/m³ at 0.1 µm—supporting direct sampling in pre-filtered zones without flow splitting. Calibration is traceable to NIST-traceable PSL (polystyrene latex) reference standards, and performance complies with ISO 21501-4:2018 (Determination of particle size distribution—Single particle light interaction methods) and JIS B9921:2010 (Cleanroom-related control equipment—Particle counters). The device meets electromagnetic compatibility (EMC) requirements per IEC 61326-1 for industrial environments and carries CE marking under the EU Machinery Directive. While not FDA 21 CFR Part 11–certified out-of-the-box, its audit-ready data export (CSV with timestamps, location IDs, and operator tags) supports GLP/GMP-aligned validation when deployed with controlled software workflows.
Software & Data Management
Data acquisition and archival are managed through a combination of local storage and external system integration. Up to 10,000 measurement records—including date/time stamps, location identifiers (up to 99 predefined zones), channel-specific counts, and mode parameters—are retained internally in comma-separated value (CSV) format. Files are accessible via USB mass-storage mode or Ethernet file transfer (FTP/SFTP). Optional Kanomax KAN-PC software (Windows-based) provides time-series trend analysis, ISO classification reporting (per ISO 14644-1), and automated PDF report generation with configurable headers and pass/fail thresholds. For enterprise-level deployment, the device supports Modbus TCP register mapping, enabling direct ingestion into SCADA platforms (e.g., Ignition, Siemens Desigo, Rockwell FactoryTalk) without middleware. All timestamps are synchronized via NTP when Ethernet-connected, ensuring temporal coherence across distributed sensor networks.
Applications
- Semiconductor front-end process tools: real-time monitoring of FOUP purge lines, load-lock chambers, and track system transfer zones.
- OEM integration into wafer inspection equipment, mask writers, and EUV lithography tool environmental enclosures.
- Pharmaceutical isolator and RABS validation—supporting periodic requalification per EU GMP Annex 1 and USP .
- Aerosol research laboratories studying nanoparticle generation, coagulation kinetics, and filtration efficiency below 100 nm.
- HEPA/ULPA filter integrity testing via upstream challenge and downstream scanning—leveraging the 0.1 µm sensitivity to detect early-stage fiber shedding.
- Environmental qualification of microelectronic packaging cleanrooms, MEMS assembly areas, and hard disk drive manufacturing suites.
FAQ
What particle size standards does the 3950-00 use for calibration?
The instrument is calibrated using NIST-traceable polystyrene latex (PSL) spheres per ISO 21501-4, with counting efficiency verified at 0.1 µm (50±20%) and 0.15–0.2 µm (100±10%).
Can the 3950-00 operate continuously for 24/7 monitoring?
Yes—designed for unattended operation, it features thermal management optimized for 15–35 °C ambient conditions and includes watchdog timers to recover from communication faults.
Is firmware update supported remotely?
Firmware upgrades are performed via USB flash drive or Ethernet (TFTP), with version rollback capability and checksum verification.
Does it support ISO 14644-1 classification calculations?
Raw data export (CSV) contains all fields required for post-processing in third-party classification software; no onboard ISO class calculation is implemented.
What is the recommended maintenance interval?
Annual verification against reference aerosol is advised; optical chamber cleaning is user-performed using isopropyl alcohol and lint-free swabs—no factory recalibration required between verifications.
