KANOMAX 3950-00 Ultra-Compact 0.1 μm Optical Particle Counter

Overview

The KANOMAX 3950-00 is an ultra-compact, high-sensitivity optical particle counter engineered for real-time airborne particulate monitoring in critical semiconductor manufacturing environments. Utilizing calibrated laser light scattering detection, it delivers quantitative measurement of particles ≥0.1 μm in diameter—meeting the stringent sensitivity requirements of ISO Class 1–3 cleanrooms and EU GMP Grade A zones. Its core design objective is embedded integration: unlike conventional benchtop or portable counters, the 3950-00 is purpose-built for OEM installation within lithography tools, wafer handling modules, FOUP load ports, and mini-environments where spatial constraints prohibit traditional instrumentation. The device operates at a nominal volumetric flow rate of 2.83 L/min (0.1 CFM), compliant with JIS B9921 and ISO 21501-4 for calibration traceability and counting efficiency validation. With a footprint under 150 × 163 × 228 mm and mass of only 3.4 kg, it enables distributed, multi-point particle surveillance without compromising mechanical stability or thermal integrity of host equipment.

Key Features

• Sub-0.1 μm detection capability with dual-channel sizing (0.1 μm and 0.3 μm), optimized for early detection of process-induced nanoscale contamination in advanced node fabrication (≤5 nm logic, <10 nm DRAM).
• Integrated diaphragm pump and thermally stabilized optical path ensure consistent flow delivery and signal reproducibility across temperature gradients typical in tool-integrated applications.
• 4.3-inch full-color resistive touchscreen interface supports on-device configuration, real-time histogram visualization (cumulative ∑ and differential Δ modes), and local data review—no external PC required for basic operation.
• Triple-mode communication architecture: isolated RS-485 for industrial PLC integration, Ethernet (10/100BASE-T) supporting Modbus TCP and HTTP-based API access, and dual-role USB (Host for direct printing or USB flash logging; Device for firmware updates and raw data export).
• Configurable sampling protocols including single-shot, continuous, repetitive, ISO-compliant sequential mode, GB/T 16292 alignment, and concentration averaging—all programmable via onboard menu or remote command set.
• Onboard memory stores up to 10,000 timestamped records in industry-standard CSV format, preserving acquisition time, location ID (up to 99 preset zones), channel counts, and environmental metadata (temperature/humidity if externally fed).

Sample Compatibility & Compliance

The 3950-00 is validated for use with compressed dry air (CDA), nitrogen, and inert process gases commonly employed in semiconductor fabs. It is not intended for corrosive, condensing, or oil-laden streams without pre-filtration. Calibration verification follows ISO 21501-4 Annex B using NIST-traceable PSL standards; counting efficiency is certified at 50±20% for 0.1 μm particles and 100±10% for particles ≥0.15 μm. False count performance (<1 count per 35 minutes) satisfies SEMI S2 and S8 safety and reliability requirements. The instrument’s electromagnetic compatibility (EMC) conforms to IEC 61326-1 (industrial environment), and its enclosure meets IP20 ingress protection for indoor panel-mount deployment. While not FDA 21 CFR Part 11–certified out-of-the-box, audit-ready data logs—including operator ID, parameter changes, and system events—can be exported for GLP/GMP-aligned review workflows when paired with validated third-party software.

Software & Data Management

KANOMAX provides the optional KAN-View PC application for comprehensive data analysis, trend mapping, and report generation (PDF/Excel). Raw CSV files are fully interoperable with MATLAB, Python (pandas), and LabVIEW for custom statistical process control (SPC) implementation. Ethernet connectivity enables seamless integration into factory-wide MES/SCADA systems via standard protocols (Modbus TCP, RESTful JSON endpoints). All stored measurements include UTC timestamps synchronized via NTP (when Ethernet-connected), ensuring temporal coherence across distributed sensor nodes. Firmware updates are delivered as signed binary packages to prevent unauthorized modification—a requirement for controlled environments subject to ISO 9001 or IATF 16949 audits.

Applications

• Real-time particle feed-forward monitoring inside photolithography steppers and scanners to trigger automatic purge cycles upon threshold exceedance.
• In-line verification of filter integrity for point-of-use ULPA installations in track-in/out stations and wet benches.
• Validation of mini-environment cleanliness during mask aligner and e-beam writer chamber purging sequences.
• Qualification of glovebox and transfer tunnel atmospheres prior to wafer ingress in compound semiconductor (GaAs, SiC) processing lines.
• Supporting ISO 14644-1 classification surveys and dynamic monitoring per ISO 14644-2 Annex D for Grade A/B cleanroom certification.

FAQ

Can the 3950-00 be used for ISO Class 5 (Class 100) cleanroom certification?
Yes—when deployed in fixed-location, multi-point configurations per ISO 14644-1:2015 Annex B, its 0.1 μm sensitivity and traceable calibration support compliance verification down to ISO Class 3.
Is external power conditioning required for stable operation in fab electrical environments?
No—the internal AC/DC converter accepts 100–240 VAC, 50/60 Hz with built-in surge suppression and EMI filtering meeting IEC 61000-4-5 Level 3.
Does the unit support alarm outputs for automated interlock signaling?
Yes—via configurable digital I/O (optional module) or Ethernet-triggered Modbus register writes to initiate tool shutdown or HVAC override commands.
How is calibration traceability maintained over time?
Annual recalibration is recommended using KANOMAX-certified service centers; certificates include uncertainty budgets per ISO/IEC 17025 and reference to JIS Z 8015-1.
Can particle data be streamed to cloud-based analytics platforms?
Yes—via Ethernet with MQTT or HTTP POST integration using customer-developed edge agents or KANOMAX’s open API documentation.