Kashiyama SDE90X / SDE120TX Oil-Free Dry Vacuum Pump
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Dry Rotary Vane Vacuum Pump |
| Model | SDE90X / SDE120TX |
| Ultimate Pressure | 1.3 Pa |
| Pumping Speed (50/60 Hz) | 1300 L/min (SDE90X) / 1500 L/min (SDE120TX) |
| Inlet/Outlet Flange | NW40 (SDE90X), NW50 (SDE120TX) |
| Cooling Water Requirement | 3–8 L/min (SDE90X), 4–8 L/min (SDE120TX) |
| Nitrogen Purge Supply | 0.1–0.7 MPa (gauge), Recommended Regulated Pressure: 0.05–0.10 MPa (gauge), Flow Rate: 0–80 L/min |
| Ambient Operating Temperature | 10–25 °C |
| Electrical Supply | 3-Phase, 200–220 V, 50/60 Hz, ±10% tolerance |
| Input Power Rating | 6.5 kVA |
| Motor Protection | CE-certified DDK connector (CE05-2A22-22PD-D) |
| Control Interface | DB-25PF-N (Japan Aviation Electronics) |
| Lubricant | Fluorinated Synthetic Oil (0.7 L) |
| Approx. Weight | 160 kg (SDE90X), 151 kg (SDE120TX) |
Overview
The Kashiyama SDE90X and SDE120TX are industrial-grade, oil-free dry vacuum pumps engineered for continuous, high-reliability operation in demanding laboratory and pilot-scale process environments. Based on Kashiyama’s proprietary rotary vane architecture with fluoropolymer-coated vanes and precision-machined aluminum alloy housings, these pumps eliminate hydrocarbon contamination risks associated with oil-lubricated systems—making them ideal for applications requiring ultra-clean vacuum conditions, such as semiconductor R&D, thin-film deposition, electron microscopy sample preparation, and analytical instrumentation interfacing (e.g., mass spectrometry inlet systems). Unlike traditional oil-sealed pumps, the SDE series operates without internal oil circulation; instead, it employs a sealed, pre-filled fluorinated synthetic lubricant (0.7 L) that remains stable under vacuum and elevated temperature, ensuring long service intervals and minimal maintenance. The ultimate pressure of 1.3 Pa is achieved under standard conditions without purge gas, while nitrogen-assisted operation extends service life when handling condensable or mildly corrosive vapors.
Key Features
- Oil-free dry operation ensures zero backstreaming of hydrocarbons—critical for UHV-adjacent processes and sensitive surface science applications.
- Dual-frequency compatibility (50/60 Hz) enables seamless integration across global laboratory power infrastructures without hardware modification.
- Integrated cooling water jacket with precisely regulated flow (3–8 L/min) and pressure differential control (min. 0.3 MPa ΔP) maintains thermal stability during extended duty cycles.
- Modular nitrogen purge interface supports both sealing (to protect internal components from reactive gases) and dilution (to manage condensables), configurable via external pressure regulators (0.05–0.10 MPa setpoint recommended).
- Rugged mechanical design includes CE-certified power connectors (DDK CE05-2A22-22PD-D) and industrial-grade DB-25PF-N I/O for remote monitoring and interlock integration within automated vacuum systems.
- Flange configurations conform to ISO-KF (NW40 for SDE90X; NW50 for SDE120TX), enabling direct coupling to standard vacuum chambers, gauges, and valves without adapters.
Sample Compatibility & Compliance
These pumps are compatible with non-aggressive, non-particulate gas loads typical in physical vapor deposition (PVD), freeze-drying validation studies, vacuum drying ovens, and residual gas analysis setups. While not rated for explosive or highly corrosive media (e.g., Cl₂, HF, or concentrated HNO₃ vapors), they support nitrogen-purged operation for handling solvents such as acetone, isopropanol, and low-concentration organic acid vapors—provided condensation is managed upstream. The design complies with IEC 61000-6-2 (immunity) and IEC 61000-6-4 (emissions), carries CE marking per Machinery Directive 2006/42/EC, and meets RoHS 2011/65/EU material restrictions. No FDA 21 CFR Part 11 or GLP-specific firmware is embedded; however, analog I/O signals and relay outputs allow integration into validated systems where audit trails are maintained at the supervisory PLC or SCADA level.
Software & Data Management
The SDE90X/SDE120TX operate as standalone electro-mechanical units with no embedded microcontroller or digital display. All operational parameters—including motor current draw, cooling water status, and purge gas pressure—are monitored externally via hardwired signals routed through the DB-25PF-N interface. This architecture prioritizes electromagnetic compatibility and deterministic response over software abstraction, aligning with ISO/IEC 17025-accredited labs’ preference for traceable, analog-controlled vacuum subsystems. Users integrate pump status into centralized data acquisition platforms (e.g., LabVIEW, Ignition SCADA, or custom Python-based DAQ) using standard 0–10 V or 4–20 mA transducer inputs for pressure, temperature, and flow feedback—enabling full logging, alarm triggering, and SOP-driven shutdown sequences.
Applications
- Primary roughing stage for turbomolecular or cryogenic high-vacuum systems in materials science laboratories.
- Vacuum degassing of polymer precursors and resin formulations prior to casting or injection molding.
- Continuous evacuation of glovebox antechambers and inert-atmosphere synthesis reactors.
- Support vacuum for thermal gravimetric analyzers (TGA), differential scanning calorimeters (DSC), and dynamic mechanical analyzers (DMA) requiring stable sub-10 Pa base pressure.
- Process vacuum for small-batch lyophilization development and shelf-life stability testing under controlled residual moisture conditions.
FAQ
Can the SDE90X/SDE120TX be used in cleanroom environments?
Yes—its oil-free construction, low particle generation (<0.1 particles ≥0.5 µm/m³ at operating vacuum), and absence of volatile organic emissions make it suitable for ISO Class 5–7 cleanrooms when installed with appropriate vibration isolation and exhaust filtration.
Is cooling water mandatory for operation?
Yes. Continuous water cooling is required for rated performance and longevity. Intermittent or insufficient flow will trigger thermal cutout and may cause irreversible vane deformation.
What maintenance intervals are recommended?
Fluorinated oil replacement every 12,000 operating hours or 24 months (whichever occurs first); vane inspection every 6,000 hours; cooling system descaling annually if using non-deionized water.
Does the pump support variable speed control?
No. The motor is fixed-speed, 3-phase induction type. Speed modulation must be implemented externally via a compatible VFD rated for constant-torque loads and equipped with harmonic filtering.
Can it handle water vapor loads from freeze-dryer condensers?
Only with continuous nitrogen purge (≥30 L/min) and upstream chilled traps. Unmitigated water vapor ingress accelerates fluoropolymer vane wear and compromises ultimate pressure repeatability.

