KYKY Oil-Lubricated Turbo Molecular Pump Series

Overview

The KYKY Oil-Lubricated Turbo Molecular Pump Series is a family of high-vacuum pumping systems engineered for stable, continuous operation in demanding industrial and research vacuum environments. Based on the fundamental principle of momentum transfer—where rapidly rotating turbine blades impart kinetic energy to gas molecules to direct them toward the exhaust stage—these pumps achieve ultimate pressures down to 1×10⁻⁸ Pa (typical) when backed by appropriate roughing pumps. Designed and manufactured under stringent quality control protocols by Beijing Zhongke Keyi Co., Ltd. (KYKY), a leading Chinese developer of vacuum science instrumentation, this series delivers robust performance in applications requiring clean, high-throughput vacuum generation with minimal backstreaming. Unlike dry scroll or magnetically levitated turbo pumps, the oil-lubricated bearing architecture provides enhanced thermal stability and mechanical damping under sustained high-load conditions—making it particularly suitable for processes involving frequent pressure cycling or extended duty cycles.

Key Features

• High-speed rotor assembly operating at up to 90,000 rpm (model-dependent), optimized for nitrogen compression ratios exceeding 10⁸
• Multi-stage bladed design with precision-machined titanium and aluminum alloy rotor stacks, ensuring high pumping speed across the 10⁻¹–10⁻⁸ Pa range
• Oil-lubricated ball bearings with integrated cooling channels for thermal management during prolonged operation
• Integrated controller with RS-485 and analog I/O interfaces for seamless integration into PLC-based vacuum system architectures
• Over-temperature, over-current, and rotational imbalance protection circuits compliant with IEC 61000-6-2/6-4 EMC standards
• Modular flange configurations (CF, ISO-KF, and DN100–DN400 options) supporting rapid installation and maintenance

Sample Compatibility & Compliance

The KYKY oil-lubricated turbo molecular pump series is compatible with inert, reactive, and mildly corrosive process gases commonly encountered in thin-film deposition and surface engineering—including Ar, N₂, O₂, H₂, and SiH₄. While not rated for aggressive halogenated or acidic vapors without upstream trapping, its oil-sealed bearing system demonstrates superior resistance to particulate ingress compared to air-bearing alternatives. All models conform to GB/T 19957–2005 (Chinese national standard for turbo molecular pump performance testing) and meet essential safety requirements outlined in GB 4793.1–2007 (Electrical Equipment for Measurement, Control, and Laboratory Use). For regulated manufacturing environments—including those subject to ISO 9001:2015 or GMP-aligned quality systems—the pumps support traceable calibration records and optional audit-ready operational logs when paired with KYKY’s VAC-Link monitoring software.

Software & Data Management

KYKY’s proprietary VAC-Link control suite enables real-time monitoring of rotational speed, bearing temperature, motor current, and vacuum status via Ethernet or USB. The software supports configurable alarm thresholds, automated startup/shutdown sequences, and export of time-stamped operational data in CSV format for post-process analysis. When deployed in networked vacuum systems, VAC-Link complies with OPC UA 1.04 specifications, facilitating interoperability with SCADA platforms and MES-level data historians. For laboratories operating under GLP or FDA 21 CFR Part 11 requirements, optional firmware upgrades provide electronic signature capability, user access levels, and immutable audit trails—ensuring full traceability of pump parameter changes and operational events.

Applications

• Physical vapor deposition (PVD) and chemical vapor deposition (CVD) systems for semiconductor, display, and photovoltaic manufacturing
• Ion implantation beamlines requiring ultra-high vacuum integrity and low hydrocarbon backstreaming
• Low-emissivity (Low-E) and transparent conductive oxide (ITO) glass coating lines
• Optical thin-film production—including anti-reflective, high-reflective, and filter coatings
• Electron-beam welding chambers where rapid pump-down and stable base pressure are critical
• Research-grade vacuum furnaces and surface analysis tools (e.g., XPS, AES, SIMS)

FAQ

What backing pump is required for optimal performance?
A two-stage rotary vane pump or dry screw pump with a minimum pumping speed of 12 m³/h is recommended for most KYKY turbo pump models; specific recommendations are provided in the technical manual for each model.
Can these pumps operate continuously at atmospheric inlet pressure?
No—turbo molecular pumps must always be operated under pre-evacuated conditions (typically ≤10 Pa inlet pressure) and require an appropriate backing pump to maintain safe compression ratios.
Is oil backstreaming a concern in sensitive deposition processes?
KYKY’s oil-lubricated design incorporates cold traps and baffle geometries that reduce hydrocarbon backstreaming to <1×10⁻¹⁰ g/cm²·s—well within acceptable limits for optical and electronic thin-film applications.
Are spare parts and service support available outside China?
Yes—KJ GROUP maintains authorized service centers in Germany, South Korea, and the United States, with certified technicians trained by KYKY headquarters and stocked with genuine rotor assemblies, controllers, and bearing kits.
Do these pumps comply with RoHS or REACH directives?
All electrical components and housing materials meet RoHS 2011/65/EU restrictions; lubricating oil formulations are REACH-compliant and supplied with full SDS documentation upon request.