Pfeiffer Vacuum ATH 1600 MT Full-Magnetic Levitation Turbomolecular Pump

Overview

The Pfeiffer Vacuum ATH 1600 MT is a high-performance, oil-free turbomolecular pump engineered for ultra-high vacuum (UHV) and extreme-high vacuum (XHV) applications requiring exceptional cleanliness, long-term stability, and operational flexibility. Based on active magnetic levitation bearing technology, the ATH 1600 MT eliminates mechanical contact between rotating and stationary components—removing the need for lubricants, seals, or routine bearing maintenance. Its core principle relies on molecular drag and momentum transfer: high-speed rotor blades (operating at 39,000 rpm) impart directional kinetic energy to gas molecules, preferentially ejecting them toward the fore-vacuum stage. This mechanism enables robust pumping of light gases—including hydrogen and helium—while maintaining a nitrogen compression ratio exceeding 1 × 10⁸. Designed for integration into demanding research and industrial systems—including surface science chambers, electron microscopy platforms, thin-film deposition tools (PVD/CVD), and particle accelerator beamlines—the ATH 1600 MT delivers stable base pressures below 6 × 10⁻⁹ hPa under optimized conditions.

Key Features

• 5-axis active magnetic levitation bearing system ensures zero physical contact, eliminating wear, vibration, and hydrocarbon contamination—critical for UHV integrity and process repeatability.
• Oil-free operation certified per ISO 8573-1 Class 0 (contamination-free air), making it suitable for semiconductor processing, analytical instrumentation (e.g., residual gas analyzers), and synchrotron end-stations where hydrocarbon outgassing must be minimized.
• Water-cooled stator and optional heated anti-corrosion housing enable reliable operation in aggressive environments (e.g., chlorine, fluorine, or oxygen-rich processes) while preventing condensate formation on internal surfaces.
• Mounting flexibility: fully orientation-independent installation (horizontal, vertical, inverted) due to symmetrical magnetic field design and balanced rotor dynamics.
• Integrated power supply and controller housed separately (8 kg unit), simplifying thermal management and electromagnetic compatibility (EMC) integration within vacuum system racks.
• CE-marked and RoHS-compliant; conforms to IEC 61000-6-2 (immunity) and IEC 61000-6-4 (emission) standards for industrial environments.

Sample Compatibility & Compliance

The ATH 1600 MT is compatible with inert, reactive, and corrosive process gases—including O₂, N₂, Ar, H₂, He, Cl₂, and CF₄—when equipped with the optional anti-corrosion coating. Its all-metal construction (stainless steel and nickel-aluminum bronze) avoids elastomer or polymer components that could degrade or outgas under UHV conditions. The pump meets ISO 2738 (vacuum component cleanliness) and ASTM E595 (outgassing testing for space applications) requirements. For regulated environments, its controller supports audit-trail-capable operation when integrated with SCADA or PLC systems compliant with FDA 21 CFR Part 11 (electronic records/signatures) and EU Annex 11 (computerized systems). No internal consumables or scheduled replacements are required over its service life, supporting GLP/GMP-aligned preventive maintenance schedules.

Software & Data Management

The ATH 1600 MT operates via Pfeiffer’s proprietary TPG36x series controller firmware, accessible through RS-485 (Modbus RTU), Ethernet (TCP/IP), or analog I/O (0–10 V / 4–20 mA). Real-time telemetry includes rotational speed, bearing current/voltage, temperature at critical nodes (stator, bearings, electronics), inlet pressure (via optional integrated Pirani/cold cathode gauge), and fault diagnostics (e.g., imbalance detection, magnetic coil saturation). All operational logs—including startup/shutdown timestamps, error codes, and parameter deviations—are timestamped and exportable in CSV format. When deployed in networked vacuum systems, data can be ingested into LabVIEW, MATLAB, or custom MES platforms using Pfeiffer’s documented API libraries. Firmware updates are performed offline via USB, ensuring validation traceability in validated environments.

Applications

• Ultra-high vacuum surface analysis: XPS, AES, LEED, and STM systems requiring hydrocarbon-free pumping and sub-10⁻⁹ hPa base pressures.
• Electron and ion beam instrumentation: Transmission electron microscopes (TEM), focused ion beam (FIB) workstations, and time-of-flight mass spectrometers (TOF-MS).
• Thin-film manufacturing: Sputtering, evaporation, and atomic layer deposition (ALD) tools where particulate generation and backstreaming must be eliminated.
• Fusion research and plasma physics: Diagnostic port pumping in tokamak divertors and neutral beam injectors.
• Space simulation chambers: Thermal vacuum testing per ECSS-E-ST-20-01C, where low outgassing and radiation tolerance are mandatory.

FAQ

What vacuum level can the ATH 1600 MT achieve without a backing pump?
It requires a compatible fore-vacuum pump (e.g., dry scroll or diaphragm pump) to maintain inlet pressure below 2.2 hPa. Its ultimate pressure specification (< 6 × 10⁻⁹ hPa) is measured with a suitable backing pump and baked, metal-sealed chamber.
Is the magnetic bearing system field-serviceable?
No—magnetic bearing calibration and coil alignment are factory-performed and sealed. Field maintenance is limited to external cooling circuit inspection, electrical connections, and controller firmware updates.
Can the pump operate continuously at full speed?
Yes. The ATH 1600 MT is rated for continuous duty at 39,000 rpm with water cooling maintained at 15–25°C and flow ≥ 4 L/min. Thermal derating is not required under nominal conditions.
Does it support integration into automated vacuum recipes?
Yes—via programmable digital I/O and Modbus registers, enabling synchronized start/stop, speed ramping, and interlock signaling with gate valves, pressure gauges, and process controllers.
What flange options are available for chamber integration?
Standard configurations include ISO-KF DN 200 and DN 250 with ISO-F (flat) or CF-F (conflat) sealing faces. Custom flange geometries and electrical feedthroughs can be configured at order entry.