Pfeiffer Vacuum ATH 500 M All-Magnetic Levitation Turbo Molecular Pump

Overview

The Pfeiffer Vacuum ATH 500 M is a high-performance, all-magnetic levitation turbo molecular pump engineered for ultra-high vacuum (UHV) and extreme clean-vacuum applications in research laboratories, semiconductor process tools, surface science instrumentation, and analytical systems such as mass spectrometry and electron microscopy. Operating on the principle of momentum transfer—where high-speed rotating blades impart kinetic energy to gas molecules to direct them toward the exhaust—the ATH 500 M achieves exceptional pumping performance without any mechanical contact between rotor and stator. Its core innovation lies in the fully active 5-axis magnetic bearing system, which eliminates physical bearings, lubricants, and wear surfaces, ensuring absolute oil-free operation and intrinsic cleanliness critical for contamination-sensitive processes.

Key Features

• Active 5-axis magnetic levitation bearing system enabling frictionless, maintenance-free rotation at up to 50,000 rpm
• Oil-free, particle-free vacuum generation—ideal for UHV environments requiring < 1 × 10⁻⁸ hPa base pressure
• Compact integrated controller with digital interface, supporting standalone operation or seamless integration into automated vacuum systems
• Directionally agnostic mounting: can be installed in vertical, horizontal, or inverted orientations without performance degradation
• Robust thermal management architecture with dual cooling options—air-cooled for standard lab integration or water-cooled for high-duty-cycle or heat-constrained installations
• Compliance with CE directives and RoHS requirements; designed and manufactured in Germany to stringent DIN/ISO quality standards

Sample Compatibility & Compliance

The ATH 500 M is compatible with inert, reactive, and corrosive gases when configured with optional corrosion-resistant materials (e.g., MT-coated rotors). Its all-metal, lubricant-free construction ensures compatibility with ultra-pure process environments where hydrocarbon or silicone contamination must be avoided—such as in thin-film deposition (PVD/CVD), residual gas analysis (RGA), or accelerator beamline vacuum systems. The pump meets electromagnetic compatibility (EMC) requirements per EN 61326-1 and safety standards per EN 61000-6-2/6-4. While not inherently FDA 21 CFR Part 11 compliant as a standalone device, its digital control interface supports audit-trail-capable SCADA and PLC integration for GMP/GLP-regulated facilities when deployed within validated vacuum system architectures.

Software & Data Management

The integrated controller provides RS-485, Ethernet (TCP/IP), and optional analog I/O interfaces for real-time monitoring of rotational speed, bearing status, temperature, vibration amplitude, and power consumption. Pfeiffer’s proprietary HiPace Control software (Windows-based) enables remote configuration, parameter logging, trend analysis, and alarm management—including predictive diagnostics based on magnetic bearing current signatures. Data export is supported in CSV and XML formats, facilitating traceability in QA/QC workflows. For OEM integrators, a comprehensive API and Modbus TCP protocol support enable full interoperability with LabVIEW, MATLAB, or custom MES platforms.

Applications

• Ultra-high vacuum chambers in surface physics and atomic-scale imaging (STM/AFM)
• Ion implantation and plasma etch tools requiring stable, hydrocarbon-free vacuum
• Time-of-flight and quadrupole mass spectrometers demanding rapid pump-down and low outgassing background
• Particle accelerator beamlines and synchrotron light sources
• Space simulation chambers and cryogenic vacuum systems where thermal stability and zero-lubricant risk are mandatory
• Research-grade electron microscopes (SEM/TEM) requiring sub-10⁻⁸ hPa operating pressure

FAQ

What gases can the ATH 500 M pump effectively?
It delivers optimal performance for light gases (H₂, He, N₂, O₂); pumping speeds for heavier gases (e.g., Ar, CO₂) scale inversely with molecular mass. Optional MT coating enhances durability in chlorine- or fluorine-based process chemistries.
Is the pump suitable for vertical mounting?
Yes—its fully active magnetic suspension system maintains rotor centering regardless of orientation, eliminating gravitational bias effects common in passive-bearing turbopumps.
Does it require periodic maintenance or lubrication?
No. The 5-axis magnetic bearing operates without contact, eliminating wear, lubrication needs, or scheduled bearing replacement—only routine inspection of cooling paths and electrical connections is recommended.
Can it be integrated into a PLC-controlled vacuum system?
Yes. Standard Modbus TCP and RS-485 protocols allow direct communication with industrial PLCs; digital I/O signals support interlock sequencing, emergency stop, and status feedback per IEC 61508 functional safety guidelines.
What is the typical pump-down time from atmosphere to 1 × 10⁻⁶ hPa?
When paired with a suitable backing pump (e.g., a dry scroll or diaphragm pump), the ATH 500 M reaches 1 × 10⁻⁶ hPa in under 90 seconds in a 100 L chamber with minimal outgassing surfaces.