Pfeiffer Vacuum HiPace 300M Full-Magnetic Levitation Turbomolecular Pump

Overview

The Pfeiffer Vacuum HiPace 300M is a high-performance, full-magnetic levitation turbomolecular pump engineered for ultra-high vacuum (UHV) and extreme-high vacuum (XHV) applications in research laboratories, analytical instrumentation, and semiconductor R&D environments. Utilizing a contact-free 5-axis active magnetic bearing system, the HiPace 300M eliminates mechanical wear, lubrication requirements, and particle generation—ensuring intrinsic oil-free operation critical for contamination-sensitive processes such as surface science, electron microscopy, residual gas analysis (RGA), and thin-film deposition. Its rotor operates at up to 90,000 rpm with dynamic stability across the full speed range, delivering a nominal nitrogen pumping speed of 255 L/s and a theoretical ultimate pressure of 5 × 10⁻¹⁰ hPa. The pump’s monolithic rotor design—machined from high-strength titanium alloy—and precision-balanced impeller stages provide exceptional vibration suppression (< 0.5 µm peak-to-peak) and acoustic emission below 45 dB(A) at 1 m, making it suitable for vibration-sensitive setups including cryogenic systems and interferometric platforms.

Key Features

• 5-axis active magnetic bearing system enabling zero-contact, maintenance-free continuous operation
• Integrated TM 700 digital controller with real-time diagnostics, soft-start ramping, and automatic pressure-dependent speed regulation
• Oil-free architecture compliant with ISO 8573-1 Class 0 (zero hydrocarbon contamination)
• Water-cooling interface (G 1/4″ BSP) for stable thermal management under sustained high-load conditions
• Modular flange configuration: available with DN 100 ISO-K, CF-F, or ISO-F inlet options; compatible with standard UHV-compatible sealing (copper gaskets or metal seals)
• Low power consumption: typical operating input < 450 W at full speed, optimized via adaptive motor control
• Robust electromagnetic shielding meeting EN 61326-1 for EMC compliance in shared laboratory infrastructure

Sample Compatibility & Compliance

The HiPace 300M is designed for compatibility with inert, reactive, and condensable gases—including N₂, He, H₂, Ar, O₂, and common process gases—without performance degradation. Its compression ratios exceed 1 × 10¹¹ for N₂ and >10⁹ for H₂, ensuring effective backing-stage isolation and stable base pressure in multi-pump configurations. The pump meets stringent regulatory frameworks for scientific instrumentation: it is CE-marked per EU Machinery Directive 2006/42/EC and Electromagnetic Compatibility Directive 2014/30/EU; manufactured in accordance with ISO 9001:2015; and validated for use in GLP-compliant laboratories where traceability, calibration records, and audit-ready documentation are required. While not intrinsically rated for explosive atmospheres, optional ATEX-compliant variants (HiPace 300M Ex d) are available upon request for specialized industrial deployments.

Software & Data Management

Control and monitoring are enabled via the TM 700 controller’s embedded web server (HTTP/HTTPS), supporting remote access through standard browsers without proprietary software installation. Communication protocols include RS-485 (Modbus RTU), Ethernet/IP, Profibus DP, and DeviceNet—facilitating seamless integration into SCADA, PLC-based vacuum systems, and automated test stands. All operational parameters—including rotational speed, bearing current, temperature sensors (stator, bearing, cooling line), vibration spectra, and cumulative runtime—are logged with timestamped entries. Audit trails comply with FDA 21 CFR Part 11 requirements when deployed with validated third-party data acquisition software (e.g., LabVIEW™ with NI DIAdem or MATLAB® with Data Acquisition Toolbox), supporting electronic signatures and user-access-level permissions. Firmware updates are performed via secure HTTPS upload with SHA-256 signature verification.

Applications

• Ultra-high vacuum chambers for X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES)
• Ion beam systems requiring clean, vibration-free pumping for focused ion beam (FIB) and plasma immersion ion implantation (PIII)
• Residual gas analyzers (RGAs) and quadrupole mass spectrometers (QMS) demanding low outgassing and minimal electromagnetic interference
• Atomic layer deposition (ALD) and molecular beam epitaxy (MBE) reactors where hydrocarbon-free environment is mandatory
• Cryopumped systems using liquid nitrogen or closed-cycle coolers, where low thermal load and absence of oil backstreaming prevent cold trap contamination
• Accelerator physics test benches and synchrotron beamline front-ends requiring long-term unattended operation and pressure stability < ±0.5% over 72 hours

FAQ

What is the minimum recommended fore-vacuum pressure for safe startup?
The HiPace 300M requires a pre-vacuum of ≤ 20 hPa (measured at the pump inlet) prior to acceleration. This is typically achieved using a dry scroll or diaphragm backing pump meeting ISO 8573-1 Class 4 purity.

Can the HiPace 300M be operated continuously at full speed?
Yes—its magnetic bearing system and water-cooled stator allow indefinite operation at rated speed, provided cooling water flow ≥ 1.2 L/min and inlet temperature ≤ 25 °C.

Is the TM 700 controller field-upgradable?
Yes. Firmware updates are delivered via encrypted .bin files through the controller’s web interface or RS-485 port, with rollback capability and version checksum validation.

Does the pump require periodic calibration?
No routine calibration is required. However, annual verification of pressure readback accuracy (using a calibrated capacitance manometer) and bearing current baseline logging are recommended for ISO/IEC 17025-accredited facilities.

What safety interlocks are built into the system?
Hardware-enforced interlocks include coolant flow detection, overtemperature cutoff (> 85 °C stator), overspeed protection (> 95,000 rpm), and emergency deceleration on loss of communication or power failure.