Pfeiffer Vacuum HiScroll 12 Dry Scroll Vacuum Pump

Overview

The Pfeiffer Vacuum HiScroll 12 is a compact, oil-free dry scroll vacuum pump engineered for reliable primary vacuum generation in analytical instrumentation, laboratory systems, and light industrial applications. Utilizing dual-stage asymmetric scroll technology, the HiScroll 12 achieves continuous, pulsation-free suction through non-contacting orbital motion—eliminating the need for lubricating oil, sealing fluids, or maintenance-intensive valves. Its robust aluminum alloy housing and precision-machined stainless steel scrolls ensure long-term dimensional stability and resistance to chemical condensables common in mass spectrometry sample introduction, vacuum drying, freeze-drying, and electron microscopy specimen preparation. With an ultimate pressure of 6 × 10⁻³ hPa and a nominal pumping speed of 12.1 m³/h at the inlet, the HiScroll 12 delivers stable base pressures suitable for backing turbomolecular pumps or operating standalone in low-to-medium vacuum regimes (10⁰ to 10⁻³ hPa). Its variable-speed drive (624–1,870 rpm) enables adaptive operation under fluctuating load conditions while maintaining thermal equilibrium and minimizing mechanical stress.

Key Features

• Oil-free dry scroll design ensures zero hydrocarbon backstreaming—critical for contamination-sensitive applications such as surface analysis (XPS, AES), residual gas analysis (RGA), and high-purity process chambers.
• Integrated variable-frequency drive provides smooth ramp-up/down and real-time speed modulation to match system demand—reducing energy consumption and extending scroll lifetime.
• IP20-rated enclosure meets standard laboratory environmental requirements; optional ATEX-certified explosion-proof variant (Ex II 3G Ex h IIC T4 Gc X) complies with IEC 60079-0 and EN 60079-15 for use in Zone 2/22 hazardous areas.
• Low acoustic emission (47 dB(A) at 1 m) and minimal vibration (<0.5 mm/s RMS) enable integration into noise-sensitive environments including cleanrooms, teaching labs, and shared instrument suites.
• DN 25 ISO-KF inlet flange ensures rapid, standardized connection to vacuum manifolds, gauges, and foreline traps; compatible with standard Pfeiffer vacuum accessories including active damping modules and digital pressure controllers.

Sample Compatibility & Compliance

The HiScroll 12 is chemically compatible with dry air, inert gases (N₂, Ar), and moderately aggressive vapors encountered in solvent-free vacuum processes. It is not intended for continuous pumping of condensable solvents (e.g., water, alcohols, acetone) without upstream cold traps or gas ballast activation. When equipped with the optional gas ballast valve, the pump maintains operational integrity during brief exposure to water vapor loads—achieving a stabilized base pressure of ≤5 × 10⁻² hPa in first-stage ballast mode and ≤4 × 10⁻¹ hPa in second-stage mode. The pump conforms to EU Machinery Directive 2006/42/EC, Electromagnetic Compatibility Directive 2014/30/EU, and Low Voltage Directive 2014/35/EU. Documentation includes Declaration of Conformity, RoHS compliance statement, and CE marking per applicable harmonized standards (EN 61000-6-2, EN 61000-6-4).

Software & Data Management

While the HiScroll 12 operates as a stand-alone unit, its analog/digital I/O interface (0–10 V input, relay output) supports integration into centralized vacuum control architectures. When paired with Pfeiffer’s TPG300 series vacuum gauges or HiPace turbopumps, it participates in closed-loop pressure regulation via RS485 Modbus RTU communication. All operational parameters—including motor current, temperature, rotational speed, and fault status—are accessible for logging and audit trail generation. For GLP/GMP-regulated environments, integration with validated SCADA or LIMS platforms enables full traceability of pump runtime, start/stop events, and alarm history—supporting FDA 21 CFR Part 11 compliance when deployed with appropriate electronic signature and audit trail configurations.

Applications

• Backing pump for turbomolecular and sputter-ion pumps in UHV systems (e.g., surface science chambers, thin-film deposition tools)
• Primary vacuum source for benchtop SEMs, TEM sample prep stations, and plasma etch load locks
• Vacuum supply for lyophilizers, desiccators, and vacuum ovens in pharmaceutical QC laboratories
• Gas evacuation in helium leak detection systems and vacuum insulation panel manufacturing
• Process vacuum for small-scale CVD/PVD reactors and analytical sample introduction lines

FAQ

What is the recommended maintenance interval for the HiScroll 12?

The HiScroll 12 requires no routine oil changes or seal replacements. Annual visual inspection of inlet filter, cooling fins, and electrical connections is advised. Scroll lifetime exceeds 20,000 operating hours under typical laboratory duty cycles.
Can the HiScroll 12 be used with corrosive gases?

Standard configuration is rated for dry, non-corrosive gases. For intermittent exposure to mildly corrosive media (e.g., HCl, Cl₂ below 10 ppm), consult Pfeiffer Vacuum’s chemical compatibility guide and consider optional nickel-plated scroll variants.
Does the pump include integrated pressure monitoring?

Base models do not include built-in pressure sensing; however, the HiScroll 12 with “Pressure Sensor” option integrates a calibrated Pirani gauge (0.1–1000 hPa range) with analog output and status LED indication.
Is remote start/stop capability supported?

Yes—via dry-contact closure on the auxiliary terminal block or 0–10 V analog command signal, enabling seamless integration with PLC-controlled vacuum sequences.
What certifications apply to the explosion-proof version?

The Ex II 3G variant carries ATEX certification (Notified Body 0082) and IECEx approval for use in gas atmospheres (Group IIC, Temperature Class T4, Equipment Protection Level Gc) within ambient temperature limits of +5 °C to +40 °C.