PULUODY PMT-2 Online Ultra-Pure Water Particle Counter

Overview

The PULUODY PMT-2 Online Ultra-Pure Water Particle Counter is an engineered solution for real-time, continuous particulate contamination monitoring in critical fluid process streams within semiconductor fabrication, pharmaceutical water systems, and advanced microelectronics manufacturing. Built upon the 8th-generation dual-laser narrow-beam optical detection architecture licensed from PULUODY Analytical Testing Group (UK), the instrument employs Mie scattering theory with two spatially offset laser wavelengths to enhance signal-to-noise ratio and minimize refractive index dependency across diverse liquid matrices—including ultrapure water (UPW), deionized rinse solutions, photoresist solvents, and polymer-based processing fluids. Its core function is quantitative measurement of insoluble particulate concentration (particles/mL) and size distribution within the sub-micron regime—specifically optimized for the 0.1 µm(c) to 1.0 µm detection range mandated by SEMI F63, IEST-STD-CC1246E, and ISO 14644-9 for UPW qualification in Class 1–10 cleanroom environments.

Key Features

• Dual-laser narrow-beam optical sensor with independent wavelength channels for improved discrimination of low-refractive-index particles (e.g., silica, organic residues) in aqueous and organic media
• Integrated precision plunger pump and electromagnetic flow control system ensuring volumetric sampling accuracy better than ±1% and repeatable flow stability under variable backpressure conditions
• Modular hardware architecture supporting both online bypass-loop installation and offline portable deployment—enabling seamless transition between production-line integration and lab-based validation
• Separation of metrological calibration routines from routine analysis workflows, minimizing operational interference and preserving traceability per ISO/IEC 17025 requirements
• Touchscreen HMI with intuitive graphical interface, complemented by optional wireless keyboard/mouse and iPad-based remote data acquisition via encrypted Wi-Fi protocol
• Configurable analog output (4–20 mA) with programmable threshold alarms for integration into DCS/SCADA systems; relay outputs support automated shutdown or flushing triggers upon particle excursion events

Sample Compatibility & Compliance

The PMT-2 is validated for use with ultrapure water (resistivity ≥18.2 MΩ·cm), semiconductor-grade cleaning agents (e.g., SC1, SC2, DHF), photoresist developers, CMP slurries, and polymer solutions exhibiting viscosity up to 10 cP. It complies with pharmacopoeial standards including United States Pharmacopeia <788>, European Pharmacopoeia 2.9.19, Japanese Pharmacopoeia JP 6.07, and Chinese Pharmacopoeia 2020 Edition Volume IV for injectable-grade water and parenteral formulations. For industrial applications, it aligns with ISO 21501-4 (calibration using NIST-traceable latex spheres), SEMI F63-0220 (UPW particle specification), and ASTM D7282 (liquid particle counting methodology). Optional firmware modules enable full 21 CFR Part 11 compliance—including electronic signatures, audit trails, and role-based access control—when deployed in regulated GMP environments.

Software & Data Management

The instrument ships with PULUODY V8.3 Integrated Analysis Software (PC version), offering configurable report generation per ISO 4406, NAS 1638, or custom grading schemes. Raw scatter pulse data is stored in vendor-neutral CSV format with timestamp, temperature, pressure, and flow rate metadata. The software supports statistical process control (SPC) charting, trend analysis over time, and automated comparison against user-defined action/alert limits. All calibration records—including reference standard lot numbers, date stamps, and operator IDs—are retained in a tamper-evident log file structure compliant with GLP documentation requirements. Remote diagnostics and firmware updates are supported via secure HTTPS channel without interrupting live monitoring operations.

Applications

• Real-time UPW loop monitoring at point-of-use (POU) in 300 mm wafer fabs to detect filter breakthrough or ion exchange resin shedding
• In-line verification of post-CMP rinse purity prior to photolithography steps
• Validation of nano-filtration membrane integrity during pharmaceutical water-for-injection (WFI) production
• Contamination forensics in flat-panel display manufacturing involving ITO etchant recirculation systems
• Qualification of cleaning bath stability in MEMS packaging lines where sub-100 nm metallic debris poses yield risk
• Offline verification of ultrapure solvent cleanliness for EUV photoresist formulation labs

FAQ

What particle size ranges can the PMT-2 resolve in ultrapure water?
The base configuration detects particles from 0.1 µm(c) to 1.0 µm with NIST-traceable resolution; extended ranges (e.g., 4–70 µm(c) or 1–100 µm) are available via sensor module customization.
Does the system meet FDA 21 CFR Part 11 requirements for electronic records?
Yes—when equipped with the optional GxP Compliance Package, the PMT-2 provides full audit trail functionality, electronic signatures, and system validation documentation per Annex 11 guidelines.
Can the PMT-2 be integrated into existing plant automation infrastructure?
It features isolated 4–20 mA analog output, Modbus TCP/IP, and dry-contact alarm relays compatible with most DCS, PLC, and MES platforms.
How is calibration traceability maintained across operational shifts?
Calibration is performed using ISO 21501-4 compliant polystyrene latex standards (PSL), with all parameters logged in an immutable database including environmental conditions and operator credentials.
Is offline portable operation supported without permanent installation?
Yes—the unit operates autonomously on internal power management and includes a ruggedized carry case, battery-backed memory, and quick-connect fluid fittings for field-deployable measurements.