Sabray Femtosecond Micromachining System by UpTek

Overview

The Sabray Femtosecond Micromachining System is an industrial-grade ultrafast laser processing platform engineered for high-precision, non-thermal material ablation and sub-micron feature fabrication. Based on chirped-pulse amplification (CPA) architecture, the system delivers sub-400 fs pulse durations at central wavelengths of 1030 nm (fundamental) or frequency-doubled 515 nm output, enabling precise energy deposition below the thermal diffusion threshold in metals, semiconductors, dielectrics, and transparent oxides. Its solid-state femtosecond oscillator-amplifier configuration ensures >10,000 hours of maintenance-free operation—critical for 24/7 production environments and long-term research deployments. The system’s core architecture integrates a monolithic granite gantry frame with active vibration isolation, minimizing mechanical drift and thermal deformation during extended multi-hour machining sequences.

Key Features

• Industrial-grade solid-state femtosecond laser source with integrated cooling, pulse energy stability ≤±1.5% RMS over 8 hours, and repetition rate tunability from 1 kHz to 2 MHz.
• High-rigidity granite龙门 gantry structure providing sub-micron geometric stability across full 600 mm × 600 mm × 150 mm motion envelope.
• Linear motor-driven XYZ stages with interferometric position feedback, delivering <10 nm closed-loop resolution and ±50 nm bidirectional repeatability.
• Modular beam delivery architecture: supports interchangeable processing heads—including galvanometric scanners (12 mm scan field, 20 µrad pointing stability), telecentric long-working-distance objectives (NA 0.4, WD 50 mm), and coaxial helical drilling modules with real-time depth monitoring.
• Vacuum-compatible sample chamber (base pressure <1×10⁻⁵ mbar) with feedthroughs for in situ diagnostics, enabling controlled ambient processing for oxidation-sensitive materials or plasma-assisted ablation.
• Interlock-certified safety enclosure compliant with IEC 60825-1:2014 Class 4 laser safety requirements and equipped with dual-channel emergency stop circuitry.

Sample Compatibility & Compliance

The Sabray system processes a broad spectrum of technologically relevant materials without inducing microcracking, recast layers, or heat-affected zones. Validated substrates include fused silica, sapphire, BK7, ITO-coated glass, copper, stainless steel 304/316, titanium alloys (Ti-6Al-4V), silicon wafers (100/111), GaN, SiC, alumina, zirconia, and polyimide. All optical and motion subsystems are calibrated traceable to NIST standards. The system supports GLP/GMP-aligned operation through configurable audit trails, user access levels, and electronic signature capability—fully compatible with FDA 21 CFR Part 11 requirements when deployed with optional validated software packages. Process documentation adheres to ISO 13485 (medical device manufacturing) and ASTM F3229–21 (laser micromachining of biomedical implants) guidelines.

Software & Data Management

Control is executed via SabrayControl v4.x—a deterministic real-time application built on NI LabVIEW Real-Time OS. The interface provides synchronized coordination of laser parameters (pulse energy, burst mode, polarization), motion trajectory (G-code or native parametric pathing), and auxiliary systems (vacuum pump status, chamber temperature, beam profiler readout). All process logs—including timestamped laser diode current, stage encoder values, and environmental sensor data—are stored in HDF5 format with SHA-256 checksum integrity verification. Export options include CSV, MATLAB .mat, and industry-standard STEP-NC for integration into MES platforms such as Siemens Opcenter or Rockwell FactoryTalk.

Applications

• Non-contact patterning of touch panel ITO layers with <2 µm edge roughness and zero bridging defects.
• Single-pulse drilling of 10–50 µm diameter vias in ceramic substrates (Al₂O₃, AlN) for hermetic packaging of MEMS devices.
• Direct-write fabrication of surface-relief diffractive optical elements (DOEs) on fused silica with λ/20 surface figure accuracy.
• Coloration of titanium surfaces via laser-induced periodic surface structures (LIPSS) with repeatable hue control across batch runs.
• Low-damage fiber Bragg grating inscription in photosensitive germanosilicate fibers using phase-mask coupling geometry.
• Micro-texturing of orthopedic implant surfaces to enhance osseointegration, validated per ISO 10993-5 cytotoxicity protocols.

FAQ

What laser wavelength options are supported?
The base system operates at 1030 nm; optional harmonic generation modules provide stable 515 nm (second harmonic) and 343 nm (third harmonic) outputs—each with independent pulse energy control and beam pointing stabilization.
Can the Sabray system be integrated into an existing cleanroom environment?
Yes. The system meets SEMI S2-0215 safety standards and features HEPA-filtered internal air circulation, low outgassing materials (per ASTM E595), and RF-shielded cabling for electromagnetic compatibility in Class 1000 cleanrooms.
Is remote diagnostics and firmware update capability available?
All units include embedded Ethernet/IP connectivity with TLS 1.2-secured remote session support. Firmware updates are delivered as signed binary packages with rollback functionality and pre-update system health verification.
Does the system support automated focus tracking during curved-surface machining?
Yes—when equipped with the optional confocal autofocus sensor (±25 µm range, 50 nm resolution), the system dynamically adjusts Z-position at up to 1 kHz sampling rate during continuous XY motion.
What level of technical documentation is provided with delivery?
Customers receive full IEC 61508-compliant functional safety manual, NIST-traceable calibration certificate, laser safety officer (LSO) training package, and complete bill-of-materials with RoHS/REACH declarations.