Tongzhou Weipu SCs Single-Channel Semiconductor Process Chiller

Overview

The Tongzhou Weipu SCs Single-Channel Semiconductor Process Chiller is an engineered thermal management solution specifically developed to meet the stringent temperature stability, reliability, and safety requirements of front-end and back-end semiconductor manufacturing equipment. Designed as a dedicated coolant source for high-precision spindle systems—particularly dicing saws (wafer saws) and grinding/thinning machines—the SCs chiller operates on a closed-loop recirculating principle, delivering deionized or low-conductivity coolant at tightly regulated temperatures. Its core function is to mitigate thermal drift in rotating spindles, thereby preserving cutting accuracy, blade life, and wafer integrity during high-speed, fine-pitch dicing operations. The unit employs a PID-based digital temperature control algorithm that continuously monitors and adjusts refrigerant flow, pump speed, and heat exchange duty to maintain setpoint stability within ±0.1 °C under dynamic load conditions—a critical specification for sub-micron dimensional control in advanced packaging and compound semiconductor processing.

Key Features

• Precision temperature regulation with ±0.1 °C stability over 24-hour continuous operation, validated across ambient temperature ranges from 15 °C to 35 °C
• Single-channel architecture optimized for integration with one primary process tool; modular design supports future scalability to dual- or multi-channel configurations
• Low-noise compressor and vibration-damped mounting system compliant with ISO 14694 cleanroom-adjacent acoustic requirements (≤62 dB(A) at 1 m)
• Energy-efficient scroll compressor paired with intelligent load-matching fan control, achieving IEER >12.5 per AHRI 1250 standards
• Stainless steel coolant reservoir and wetted parts constructed from ASTM A240 316L stainless steel, compatible with DI water and low-conductivity glycol blends (up to 30% v/v)
• Integrated safety interlocks including flow monitoring, high-temperature cutoff, low-level alarm, and dry-run protection—all logged with timestamped event history
• Compact footprint (W × D × H: 450 × 550 × 900 mm) with front-access service panel and tool-less filter housing for rapid maintenance

Sample Compatibility & Compliance

The SCs chiller is validated for use with standard semiconductor dicing saw platforms—including models from Disco, K&S, and ASM Pacific Technology—as well as precision grinding and thinning systems requiring stable spindle cooling between 15 °C and 25 °C. It meets SEMI S2-0218 (Safety Guidelines) and SEMI S8-0718 (Ergonomics and Human Factors) requirements, with full documentation available for internal EHS audits. All electrical components conform to IEC 61000-6-2/6-4 EMC immunity and emissions standards. The unit is designed for installation in Class 10,000 (ISO 7) tool support areas and includes grounding continuity verification per UL 61010-1. While not classified as a medical device, its data logging architecture supports GLP/GMP-aligned traceability when integrated into validated process environments.

Software & Data Management

The SCs features an embedded ARM Cortex-M7 controller running a real-time OS with local HMI (4.3″ capacitive touchscreen). All operational parameters—including actual vs. setpoint temperature, flow rate (L/min), inlet/outlet ΔT, compressor run time, and alarm history—are stored locally for ≥30 days with microSD backup capability. Optional RS-485 Modbus RTU or Ethernet TCP/IP interfaces enable integration into factory MES or SCADA systems for centralized monitoring. Audit trail functionality records user logins, parameter changes, and alarm acknowledgments with ISO/IEC 17025-compliant timestamps. No cloud connectivity is enabled by default; remote access requires explicit customer-configured firewall rules and TLS 1.2–encrypted tunnels.

Applications

• Spindle thermal stabilization in diamond-blade dicing saws for Si, SiC, GaN, and sapphire wafers
• Cooling of high-RPM grinding spindles in wafer backgrinding systems (e.g., BG-830, BG-840)
• Support for laser dicing and stealth dicing tools requiring consistent coolant temperature to minimize thermal lensing effects
• Integration with automated material handling systems where chiller uptime directly impacts tool OEE metrics
• Use in advanced packaging lines (fan-out, 2.5D/3D IC) where thermal-induced die shift must remain below ±0.5 µm per hour

FAQ

What coolant types are compatible with the SCs chiller?
Deionized water (resistivity ≥1 MΩ·cm) and low-conductivity ethylene glycol/water mixtures (max. 30% v/v) are approved. Propylene glycol and non-aqueous coolants are not supported.
Is the SCs chiller suitable for Class 100 (ISO 5) cleanroom environments?
It is rated for Class 10,000 (ISO 7) support areas only. Installation inside ISO 5 zones requires additional particle filtration and HEPA-shrouded airflow—consult engineering services for custom enclosure options.
Does the unit support 21 CFR Part 11 compliance?
While the SCs provides electronic audit trails and user authentication, full 21 CFR Part 11 compliance requires site-specific validation protocols, including electronic signature implementation and system access controls managed externally via your IT infrastructure.
Can the SCs be operated unattended for extended periods?
Yes. It is certified for 24/7 operation with predictive maintenance alerts and self-diagnostic routines. Mean time between failures (MTBF) exceeds 25,000 hours under typical semiconductor fab duty cycles.
What is the maximum allowable coolant outlet pressure?
The standard configuration delivers up to 4.5 bar (65 psi) at the outlet port, adjustable via integrated pressure-regulating valve. Custom high-pressure variants (up to 10 bar) are available upon request.