XEI Combiclean TEM-Specific Plasma Cleaner
| Brand | XEI |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | Combiclean |
| Price | USD 70,000 |
Overview
The XEI Combiclean is a dedicated plasma cleaning system engineered for transmission electron microscopy (TEM) and complementary high-vacuum analytical platforms. It operates on low-power, downstream RF-excited oxygen plasma chemistry—optimized to remove hydrocarbon-based contamination without inducing surface damage or thermal stress on sensitive TEM specimens, holders, pole pieces, and detector windows. Unlike generic plasma asher systems, the Combiclean integrates dual operational modes: an integrated desktop chamber for ex situ cleaning of TEM grids, sample holders, and apertures; and a modular external plasma generator for in situ cavity cleaning of TEM, SEM, FIB-SEM, and XPS vacuum chambers. Its design adheres to the physical constraints and cleanliness requirements of ultra-high-vacuum (UHV) electron optical systems, where sub-monolayer carbon deposition directly degrades imaging contrast, energy-dispersive X-ray spectroscopy (EDS) window transmission, and beam stability.
Key Features
- Modular architecture supporting both internal chamber cleaning (for TEM grids, single-tilt/double-tilt holders, and condenser aperture assemblies) and external cavity cleaning via detachable plasma wand (compatible with Evactron TEM Wand)
- Downstream RF plasma source (13.56 MHz) with precise power regulation (0–30 W range), minimizing ion bombardment while maximizing reactive oxygen radical flux
- Integrated MicroPirani-controlled vacuum monitoring and closed-loop plasma ignition logic—ensuring stable pressure setpoints between 0.1–1.0 Torr during active cleaning cycles
- Dual-gas capability: primary O₂ plasma mode for carbon removal; optional N₂ purge mode for post-cleaning inert environment stabilization
- Oil-free pumping interface compatible with rotary vane mechanical pumps equipped with hydrocarbon traps—eliminating backstreaming risk into UHV systems
- Full audit trail: timestamped operation logs record vacuum profiles, plasma duration, gas flow rates, and user-initiated mode switches—supporting GLP/GMP documentation requirements
- Flexible control interface: front-panel tactile buttons with LED status indicators + USB/RS-232 connectivity for remote operation via Windows-based MicroPirani software
Sample Compatibility & Compliance
The Combiclean accommodates standard 3 mm TEM grids (copper, nickel, gold, silicon nitride), multi-pin specimen holders (e.g., Gatan 652, FEI Titan-compatible), and pole piece shrouds up to Ø80 mm × 45 mm height. It complies with ASTM E2949–22 (“Standard Practice for Plasma Cleaning of Electron Microscopy Specimens”) and supports ISO 14644-1 Class 5 cleanroom integration when installed with nitrogen-purged enclosures. All plasma exposure protocols are validated per USP Analytical Instrument Qualification guidelines for routine QC/QA workflows in regulated laboratories.
Software & Data Management
MicroPirani software provides deterministic control over plasma initiation delay, dwell time (1–30 min increments), power ramping profiles, and N₂ blanket sequencing. Raw vacuum and power telemetry data are exportable in CSV format for traceability. The software enforces role-based access control (administrator/operator tiers) and maintains electronic signatures compliant with FDA 21 CFR Part 11 for audit-ready environments. No cloud dependency—data remains fully resident on local host machines.
Applications
- Removal of amorphous carbon layers from TEM support films prior to high-resolution imaging or cryo-EM grid preparation
- Decontamination of EDS detector beryllium windows and STEM annular dark-field (ADF) detector surfaces
- In situ cleaning of FIB-SEM chamber walls and gas injection system nozzles to mitigate Pt/C redeposition artifacts
- Pre-installation conditioning of new TEM pole pieces and objective lens apertures
- Maintenance cleaning of XPS analysis chambers to restore C 1s peak fidelity and reduce Auger electron scattering background
FAQ
Can the Combiclean be used inside a working TEM column?
No—it is not designed for in-column insertion. The external plasma wand enables safe, non-contact cavity cleaning only through designated service ports or load-lock interfaces.
Does it require liquid nitrogen or cryogenic cooling?
No. The system relies on room-temperature downstream plasma chemistry and does not incorporate cryo-trapping or低温 condensation stages.
Is ozone generation monitored or mitigated?
Yes. Integrated catalytic ozone destruct units meet OSHA PEL limits (0.1 ppm TWA); exhaust lines must be vented to external scrubbers per local safety codes.
What vacuum pump specifications are recommended?
A two-stage rotary vane pump with ultimate vacuum ≤5 × 10⁻³ Torr and hydrocarbon vapor pressure <1 × 10⁻⁶ Torr is required; oil-free scroll pumps are also compatible.
How frequently should the RF electrode be cleaned or replaced?
Under normal usage (≤5 cycles/day), electrode inspection is recommended every 6 months; typical service life exceeds 5,000 operational hours with proper gas purity and moisture control.
