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| Brand | Edwards Vacuum |
|---|---|
| Origin | Germany |
| Model | ELD 500 |
| Instrument Type | Portable |
| Detection Method | Vacuum Mode & Pressure Mode |
| Minimum Detectable Leak Rate | 1×10⁻¹² mbar·L/s (vacuum mode) |
| Startup Time | ≤120 s |
| Response Time | <1 s |
| Maximum Inlet Pressure | 1500 Pa |
| Helium Purge Speed | 2.5 L/s |
| Leak Rate Display Range | 1×10⁻³ to 1×10⁻¹³ Pa·m³/s |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | OmniStar / ThermoStar |
| Principle | Quadrupole Mass Filter |
| Response Time | ≤2 s |
| Mass Range Options | 1–100 amu, 1–200 amu, 1–300 amu |
| Inlet Capillary Temperature | Up to 350 °C |
| Inlet Material | Stainless Steel (OmniStar) or Fused Silica (ThermoStar) |
| Pumping System | MVP dry diaphragm pump + HiPace turbomolecular pump |
| Software | PV MassSpec (qualitative & quantitative analysis) |
| Brand | SRS/Stanford Research Systems |
|---|---|
| Origin | USA |
| Model | RGA1-100amu, RGA1-200amu, RGA1-300amu |
| Mass Range | 1–100 amu / 1–200 amu / 1–300 amu |
| Resolution | <0.5 amu (FWHM) |
| Detection Limit | 5 × 10⁻¹⁴ Torr (with EM detector) |
| Sensitivity | 2 × 10⁻⁴ A/Torr (Faraday cup) |
| Dynamic Range | 6 decades |
| Response Time | 1–2 s |
| Detector Options | Faraday Cup (standard), Electron Multiplier (optional) |
| Operating Pressure Range | 10⁻⁴ Torr to UHV (FC) |
| Max. Probe Temperature | 70 °C |
| Max. Bakeout Temperature | 300 °C (probe only, ECU excluded) |
| Interface | RS-232 |
| Brand | Leybold |
|---|---|
| Origin | Germany |
| Model | PHOENIX Quadro |
| Instrument Type | Portable |
| Detection Method | Vacuum Mode |
| Minimum Detectable Leak Rate | 5 × 10⁻¹² mbar·L/s |
| Startup Time | ≤ 2 min |
| Response Time | < 1 s |
| Maximum Inlet Pressure | 1500 Pa |
| Helium Purge Speed | 3.1 L/s |
| Leak Rate Display Range | 1 × 10⁻³ to 1 × 10⁻¹³ Pa·m³/s |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | ASM 340 |
| Instrument Type | Portable |
| Detection Method | Vacuum Mode |
| Minimum Detectable Leak Rate | 5 × 10⁻¹³ Pa·m³/s |
| Startup Time | 3 min |
| Response Time | < 1 s |
| Maximum Inlet Pressure | 2500 Pa |
| Helium Purge Speed | 2.5 L/s |
| Leak Rate Display Range | 1 × 10⁻³ to 1 × 10⁻¹³ Pa·m³/s |
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