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| Brand | DRETOP |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Direct Manufacturer |
| Region Category | Domestic (China) |
| Model | VAC-Flux90 |
| Price Range | USD 1,400 – 8,500 |
| Power Supply | AC 220 V, 50 Hz |
| Control System | PLC-based Intelligent Touchscreen Interface |
| Temperature Range | RT +10 °C to 200 °C |
| Temperature Resolution | 0.1 °C |
| Temperature Uniformity | ±0.1 °C |
| Ultimate Vacuum | ≤133 Pa |
| Chamber Dimensions (W×D×H) | 450 × 450 × 450 mm |
| Internal Volume | 90 L |
| Sample Capacity | Up to 4 standard wafer cassettes (e.g., 25–50 × 100 mm or 4 × 150 mm wafers) |
| Shelf Configuration | 2-tier stainless steel adjustable trays |
| Construction | 304 stainless steel interior and exterior |
| Viewing Window | Tempered glass with silicone gasket seal |
| HMDS Delivery | Closed-loop, nitrogen-carrier vaporized dosing system |
| Exhaust Handling | Integrated vacuum-pump–coupled exhaust line for HMDS-laden vapor to dedicated abatement or scrubber system |
| Brand | DRETOP |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | ZDM-215V |
| Price Range | USD 5,600 – 16,800 |
| Power Supply | AC 220 V, 50 Hz |
| Control System | PLC-based intelligent touchscreen interface |
| Temperature Range | RT +10 °C to 200 °C |
| Temperature Resolution | 0.1 °C |
| Temperature Uniformity | ±0.1 °C |
| Ultimate Vacuum | ≤133 Pa |
| Chamber Dimensions (W×D×H) | 550 × 550 × 650 mm |
| Internal Volume | 210 L |
| Sample Capacity | Up to 4 standard wafer cassettes (e.g., 4 × 25-wafer FOUPs or equivalent) |
| Chamber Material | 304 stainless steel interior |
| Viewing Window | Tempered glass with O-ring sealed viewport |
| Sealing | Integrated silicone rubber gasket |
| Process Compatibility | Thermal evaporation, magnetron sputtering, pulsed laser deposition (PLD), molecular beam epitaxy (MBE), and plasma-enhanced chemical vapor deposition (PECVD) modules (modular integration supported) |
| Exhaust Treatment | Integrated HMDS/organic solvent recovery system compliant with RoHS & REACH |
| Brand | DRETOP |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | ZDM-125V |
| Vacuum Level | ≤133 Pa |
| Chamber Dimensions | 500 × 500 × 500 mm |
| Internal Volume | 125 L |
| Temperature Range | RT+10°C to 200°C |
| Temperature Resolution | 0.1°C |
| Temperature Uniformity | ±0.1°C |
| Control System | PLC-based HMI with Color Touchscreen |
| Sample Capacity | Up to 4 wafer cassettes (standard 4-inch or 6-inch compatibility) |
| Chamber Material | Stainless Steel (304/316L grade) |
| Viewing Window | Tempered Glass with O-ring Sealed Access Door |
| Sealing | Integrated Silicone Rubber Gasket |
| Structural Design | Cuboidal Rigid Frame with Right-Angle Reinforcement |
| Compliance | RoHS, REACH, ISO 14644-1 Class 8 Cleanroom-Compatible Construction |
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