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| Brand | TZTEK |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Origin | Domestic (China) |
| Model | Spector |
| Pricing | Available Upon Request |
| Optical Modes | Reflective & Transmissive |
| Illumination Options | Visible Light & UV (365 nm) |
| CD Measurement Range | Down to 300 nm |
| 3σ Repeatability | Sub-1 nm (typical) |
| Maximum Mask Size Supported | 14-inch (355 mm) square or custom-shaped reticles |
| Interface Standard | SECS/GEM compliant |
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