Empowering Scientific Discovery

Zhengzhou Chengyue Scientific Instruments Co., Ltd.

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BrandCYKY
OriginHenan, China
Manufacturer TypeDirect Manufacturer
ModelCY-CVD1200-50
Heating MethodResistive Tube Furnace (Dual Independent Zones)
Maximum Operating Temperature1100 °C
Vacuum Level≤1.0 × 10⁻³ Pa (with Molecular Pumping System)
Tube DimensionsØ50 mm × 1000 mm (quartz), optional diameters up to Ø100 mm
Heating Zone Configuration2 × 200 mm independent zones
Temperature Uniformity±5 °C over 100 mm zone length
Temperature Control50-segment programmable PID
Gas Channels3 (N₂, H₂, Ar configurable)
Mass Flow Accuracy±2.0% FS
Gas Inlet/Outlet Interface1/4″ VCR + KF16/KF25/KF40 vacuum flanges
Pressure Measurement Range10⁵ Pa to 1 × 10⁻⁵ Pa (composite gauge)
Power SupplyAC 220 V, 50/60 Hz
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BrandCYKY
OriginHenan, China
Manufacturer TypeDirect Manufacturer
Equipment TypeDC Magnetron Sputtering Coater
Application FieldMicroelectronics
Substrate Diameter100 mm
Maximum Substrate Temperature500 °C
Base Vacuum1.0 × 10⁻⁴ Pa
Chamber MaterialHigh-Purity Fused Quartz
Chamber DimensionsØ180 mm × 200 mm
Observation WindowFull-360° Transparent Quartz Viewport
Target SizeØ50 mm (2-inch), Thickness ≤ 3 mm
DC Power Supply300 W, Adjustable
Pumping SpeedTurbo Molecular Pump — 600 L/s
Vacuum GaugeComposite Gauge (10⁻⁵–10⁵ Pa)
Sample StageRotating & Heated
InterfaceIntuitive Modular Control Panel
Overall Dimensions550 mm × 350 mm × 1200 mm
Total Power Consumption2 kW
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BrandCYKY
OriginHenan, China
Manufacturer TypeDirect Manufacturer
ModelCY-PECVD100-1200
RF Power Supply13.56 MHz ±0.005%, 0–300 W output, max reflected power 100 W, reflected power <3 W at full power, stability ±0.1%
Tube MaterialHigh-purity quartz
Tube OD100 mm
Furnace Length440 mm
Heating ZoneDual-zone (2 × 200 mm)
Max Continuous Operating Temperature1100 °C
Temperature Control Accuracy±1 °C
Temperature Program30-segment programmable PID via LCD touchscreen
Vacuum Seal304 stainless steel flange
Base Pressure0.1 Pa (via dual-stage rotary vane pump, 1.1 L/s)
Working Pressure Range–0.15 MPa to +0.15 MPa
Gas Channels6 independent MFC-controlled lines (H₂, CH₄, C₂H₄, N₂, NH₃, Ar)
MFC RangesA–C: 0–200 SCCM
D–F0–500 SCCM
MFC Accuracy±1.5% F.S.
Gas Mixing Tank Volume1 L
Vacuum InterfaceKF16
Gas Fitting1/4" VCR-style compression fittings
CoolingMotorized sliding furnace rail for rapid thermal quenching
Power InputAC 220 V, 50 Hz
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BrandCYKY
OriginHenan, China
Manufacturer TypeDirect Manufacturer
ModelCY-MSV325-II
Instrument CategoryDC Magnetron Sputtering System
Application FieldMicroelectronics
Substrate Diameter100 mm
Maximum Substrate Temperature500 °C
Base Pressure≤1.0 × 10⁻⁵ Pa
Power SupplyDual 500 W DC
Target ConfigurationTwo Independent 1" or 2" Magnetron Sources
Vacuum ChamberØ325 mm × 500 mm, SUS304 Stainless Steel
Sample StageØ150 mm, Heated (up to 600 °C, ±1 °C stability), Rotatable (0–20 rpm)
Gas ControlStandard 1-channel MFC (Ar, 200 SCCM), Optional up to 4-channel MFC
Vacuum PumpingTurbo-molecular pump system (600 L/s nominal speed), Integrated solenoid-valve gas ballast for venting without pump shutdown
Optional In-situ MonitoringQuartz Crystal Thickness Monitor (0.10 Å resolution)
Dimensions (W×D×H)540 × 540 × 1000 mm
Weight145 kg
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