Empowering Scientific Discovery

Zhengzhou Chengyue Scientific Instruments Co., Ltd.

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BrandCYKY
OriginHenan, China
Manufacturer TypeDirect Manufacturer
ModelCY-CVD1200-50
Heating MethodResistive Tube Furnace (Dual Independent Zones)
Maximum Operating Temperature1100 °C
Vacuum Level≤1.0 × 10⁻³ Pa (with Molecular Pumping System)
Tube DimensionsØ50 mm × 1000 mm (quartz), optional diameters up to Ø100 mm
Heating Zone Configuration2 × 200 mm independent zones
Temperature Uniformity±5 °C over 100 mm zone length
Temperature Control50-segment programmable PID
Gas Channels3 (N₂, H₂, Ar configurable)
Mass Flow Accuracy±2.0% FS
Gas Inlet/Outlet Interface1/4″ VCR + KF16/KF25/KF40 vacuum flanges
Pressure Measurement Range10⁵ Pa to 1 × 10⁻⁵ Pa (composite gauge)
Power SupplyAC 220 V, 50/60 Hz
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BrandCYKY
OriginHenan, China
Manufacturer TypeDirect Manufacturer
ModelCY-PECVD100-1200
RF Power Supply13.56 MHz ±0.005%, 0–300 W output, max reflected power 100 W, reflected power <3 W at full power, stability ±0.1%
Tube MaterialHigh-purity quartz
Tube OD100 mm
Furnace Length440 mm
Heating ZoneDual-zone (2 × 200 mm)
Max Continuous Operating Temperature1100 °C
Temperature Control Accuracy±1 °C
Temperature Program30-segment programmable PID via LCD touchscreen
Vacuum Seal304 stainless steel flange
Base Pressure0.1 Pa (via dual-stage rotary vane pump, 1.1 L/s)
Working Pressure Range–0.15 MPa to +0.15 MPa
Gas Channels6 independent MFC-controlled lines (H₂, CH₄, C₂H₄, N₂, NH₃, Ar)
MFC RangesA–C: 0–200 SCCM
D–F0–500 SCCM
MFC Accuracy±1.5% F.S.
Gas Mixing Tank Volume1 L
Vacuum InterfaceKF16
Gas Fitting1/4" VCR-style compression fittings
CoolingMotorized sliding furnace rail for rapid thermal quenching
Power InputAC 220 V, 50 Hz
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