Pfeiffer Vacuum HiPace 300 Turbo Molecular Pump

Overview

The Pfeiffer Vacuum HiPace 300 is a high-performance, oil-free turbo molecular pump engineered for demanding ultra-high vacuum (UHV) and extreme high vacuum (XHV) applications. Based on proven rotor dynamics and precision-machined titanium-alloy bladed stages, the HiPace 300 operates on the principle of momentum transfer—accelerating gas molecules from the inlet toward the exhaust via high-speed rotation (60,000 rpm ± 2%). Its optimized stage geometry delivers exceptional pumping speed across a broad molecular weight spectrum: 260 L/s for nitrogen, 255 L/s for argon and helium, and 220 L/s for hydrogen. With an ultimate pressure capability of < 5 × 10⁻¹⁰ mbar and compression ratios exceeding 10¹¹ for heavy gases (Ar, N₂), the HiPace 300 is suitable for applications requiring both rapid pump-down and long-term base-pressure stability—particularly where hydrocarbon contamination, vibration sensitivity, or chemical compatibility preclude the use of oil-sealed backing pumps.

Key Features

• Compact, modular design enabling installation in any orientation—including inverted or horizontal mounting—without performance degradation.
• Robust rotor architecture with ceramic ball bearings (standard) or optional full magnetic levitation (HiPace Plus variants), supporting >100,000 hours of continuous operation under GLP-compliant conditions.
• IP54-rated enclosure ensures reliable operation in industrial environments subject to dust ingress and light splashing.
• Compliance with SEMI S2 safety guidelines and UL/CSA 61010-1 standards for laboratory and semiconductor tool integration.
• Integrated sensor suite monitors rotational speed, bearing temperature, motor current, and vibration signature in real time; data is relayed to compatible controllers (TC 400, TC 110, TCP 350) for predictive maintenance and fault logging.
• Flexible thermal management: selectable air-cooling (for low-heat-load systems) or water-cooling (for sustained high-throughput operation or confined enclosures).
• Dual-platform compatibility: available with ISO-KF 100, CF 100 flange (female), or ISO-F 100 configurations to match chamber interface standards across R&D, analytical instrumentation, and production tools.

Sample Compatibility & Compliance

The HiPace 300 exhibits uniform pumping efficiency across permanent gases (N₂, O₂, Ar, He, H₂) and common process vapors (H₂O, CO, CO₂), making it compatible with surface science systems, residual gas analyzers (RGAs), electron microscopy columns, and mass spectrometer ion sources. Its all-metal, UHV-bakeable construction (up to 150 °C) supports rigorous cleaning protocols. The pump meets ISO 27888:2022 requirements for vacuum system safety integrity and conforms to ASTM E1974–22 for vacuum integrity verification in analytical instrumentation. When integrated into FDA-regulated workflows (e.g., pharmaceutical residual solvent analysis), its controller firmware supports audit-trail-enabled operation per 21 CFR Part 11 when paired with TCP 350 and certified SCADA interfaces.

Software & Data Management

Pfeiffer’s proprietary Vacuum Controller Software (VCS) enables full remote configuration, real-time telemetry, and event-driven alarm handling via Ethernet or RS-485. All operational parameters—including cumulative runtime, thermal history, and transient overload events—are timestamped and stored with cryptographic hashing to satisfy GLP/GMP data integrity requirements. The TC 400 and TCP 350 controllers provide programmable ramp profiles, interlock logic (e.g., backing pump status synchronization), and analog/digital I/O for seamless integration into PLC-based vacuum sequencing systems. Firmware updates are delivered through Pfeiffer’s secure TÜV-certified update portal, ensuring traceability and version control.

Applications

• Scanning Electron Microscopy (SEM) and Focused Ion Beam (FIB) systems requiring stable <10⁻⁹ mbar operating pressures and minimal electromagnetic interference.
• Time-of-Flight Mass Spectrometry (TOF-MS) and Orbitrap platforms where high H₂/He pumping speed minimizes peak broadening and improves signal-to-noise ratio.
• Surface analysis tools including XPS, AES, and LEED, where hydrocarbon-free pumping prevents sample contamination during monolayer characterization.
• Semiconductor metrology chambers (e.g., ellipsometers, reflectometers) operating under Class 10 cleanroom conditions with strict outgassing limits (per ASTM F1821).
• Research-scale atomic physics setups involving laser cooling traps and Bose-Einstein condensate generation, where ultra-low partial pressures of reactive species are critical.

FAQ

What backing pump is recommended for the HiPace 300?
A two-stage rotary vane pump (e.g., Pfeiffer DuoLine series) or dry scroll pump (e.g., HiScroll series) rated for ≤ 20 hPa inlet pressure is required; minimum foreline conductance must exceed 15 L/s for optimal compression performance.
Can the HiPace 300 be operated continuously at full speed?
Yes—its thermal design and bearing system support indefinite continuous operation at nominal speed when ambient temperature remains ≤ 40 °C and cooling capacity meets datasheet specifications.
Is the HiPace 300 compatible with corrosive process gases?
Standard units are rated for inert and mildly reactive gases; for Cl₂, NF₃, or plasma effluents, the HiPace 300 P (dust- and particle-resistant variant) with enhanced sealing and corrosion-inhibiting surface treatments is recommended.
Does the pump require periodic oil changes or lubrication?
No—the HiPace 300 is fully oil-free; ceramic bearings are pre-lubricated for lifetime service and require no user maintenance.
How is pump health monitored during automated processes?
Via embedded CAN bus communication, the controller logs vibration spectra, phase imbalance, and thermal gradients; deviations beyond configurable thresholds trigger automatic shutdown and generate diagnostic reports compliant with ISO 13374-1 condition monitoring standards.