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i-Lab UHN5-1EL High-Purity Nitrogen Generator for Excimer & Femtosecond Laser Systems

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Brand i-Lab
Origin Shanghai, China
Manufacturer Type Direct Manufacturer
Region of Origin Domestic (China)
Model UHN5-1EL
Instrument Type Nitrogen Generator
Nitrogen Generation Principle Pressure Swing Adsorption (PSA) with Carbon Molecular Sieve (CMS)
Output Flow Rate 5 L/min
Output Pressure Range 0–7 bar
Nitrogen Purity ≥99.999% (O₂ < 3 ppm, Dew Point ≤ −60 °C)
Flow Stability ±1%
Pressure Fluctuation < 0.3%
Noise Level < 60 dB(A)
Certifications ISO 9001, CE

Overview

The i-Lab UHN5-1EL is a purpose-engineered high-purity nitrogen generator designed exclusively for excimer and femtosecond laser systems. It employs pressure swing adsorption (PSA) technology using high-selectivity carbon molecular sieve (CMS) modules—sourced from internationally certified suppliers—to separate nitrogen from compressed ambient air. Unlike generic nitrogen generators, the UHN5-1EL integrates application-specific gas conditioning architecture optimized for ultrafast and UV laser environments where trace oxygen, moisture, hydrocarbons, or particulate contamination directly degrade optical transmission efficiency, cavity Q-factor, and electrode lifetime. Its core function is to deliver continuous, on-demand nitrogen at ≥99.999% purity (≤3 ppm O₂, dew point ≤ −60 °C), with flow stability of ±1% and pressure regulation accuracy within 0.3% full-scale deviation—parameters validated under sustained 24/7 operation at rated 5 L/min output.

Key Features

  • Application-Tailored PSA Architecture: Dual-stage CMS beds with synchronized cycling logic minimize nitrogen breakthrough during regeneration, ensuring uninterrupted high-purity output without buffer tank dependency.
  • Triple-Stage Deep Purification: Integrated pre-filtration (coalescing + activated carbon), catalytic deoxygenation, and cryogenic-grade desiccant polishing reduce residual O₂ to <3 ppm and water vapor to <0.1 ppm (−60 °C dew point), meeting ISO 8573-1 Class 1.1.1 for compressed gases.
  • SFP (Split Flow Purification) Technology: A proprietary flow-splitting manifold directs a controlled fraction of product gas through a dedicated purification loop, accelerating system stabilization post-startup and extending CMS service life by up to 40% versus conventional PSA designs.
  • Ultra-Low Acoustic Emission: Acoustically isolated compressor housing, vibration-damped mounting, and laminar-flow muffler design achieve <60 dB(A) at 1 m—compliant with ISO 7779 and suitable for shared laboratory or clinical imaging suites.
  • Intelligent Control System: Full-color 7-inch capacitive touchscreen interface with embedded ARM Cortex-A9 processor supports real-time monitoring of inlet pressure, outlet flow, CMS bed status, dew point, and O₂ sensor diagnostics.

Sample Compatibility & Compliance

The UHN5-1EL is compatible with all commercially available excimer lasers (e.g., Coherent ExciStar, Lambda Physik LPX series) and Ti:sapphire/fiber-based femtosecond oscillator-amplifier systems requiring inert purge gas for laser cavity purging, beam path isolation, and optics chamber protection. It conforms to ISO 9001:2015 quality management requirements and bears CE marking per EU Machinery Directive 2006/42/EC and Electromagnetic Compatibility Directive 2014/30/EU. Gas output meets ASTM D6159–22 specifications for high-purity nitrogen used in analytical instrumentation and laser applications. Optional validation packages support IQ/OQ documentation per GMP Annex 15 and FDA 21 CFR Part 11-compliant audit trails when integrated with i-Lab’s cloud-enabled data logger.

Software & Data Management

Firmware v3.2 includes embedded Modbus TCP and MQTT protocols for seamless integration into LabVantage, Thermo Fisher SampleManager, or custom SCADA environments. All operational parameters—including cumulative runtime, CMS cycle count, alarm history, and calibration timestamps—are stored locally (16 GB eMMC) with automatic daily backup to encrypted microSD. Remote access via TLS 1.2-secured web portal enables real-time diagnostics, firmware updates, and configurable threshold alerts (email/SMS). Audit logs retain user actions, parameter changes, and system events for ≥12 months—fully traceable for GLP/GMP-regulated laboratories.

Applications

  • Continuous cavity purging for ArF (193 nm), KrF (248 nm), and F₂ (157 nm) excimer lasers to prevent halogen compound formation and mirror degradation.
  • Inert atmosphere maintenance in ultrafast amplifier vacuum chambers and pulse compressor enclosures to suppress nonlinear self-phase modulation.
  • Optical table and interferometer enclosure blanketing to eliminate thermal index fluctuations induced by humidity gradients.
  • Gas supply for laser-induced breakdown spectroscopy (LIBS) ablation cells and time-resolved fluorescence setups requiring sub-ppm O₂ environments.
  • Backup or primary nitrogen source for cleanroom-compatible laser micromachining platforms operating under ISO Class 5 conditions.

FAQ

What is the recommended inlet air quality for optimal UHN5-1EL performance?
Compressed air must meet ISO 8573-1 Class 2.2.2 (oil-free, ≤0.1 µm particles, dew point ≤ −40 °C) — achieved via refrigerated dryer + coalescing filter upstream of the generator.
Can the UHN5-1EL be integrated into an existing lab-wide gas distribution network?
Yes; it features standard 1/4″ NPT male inlet/outlet ports and optional stainless-steel 316L tubing kits compliant with SEMI F57 for semiconductor-grade installations.
How often does the CMS require replacement under continuous operation?
Rated CMS service life is ≥20,000 hours at 5 L/min; SFP technology extends this by reducing thermal and oxidative stress—verified via accelerated aging tests per ISO 10101-2.
Does the system support automated shutdown during laser idle periods?
Yes; programmable sleep mode reduces power consumption by 72% and initiates rapid restart (<90 s to spec) upon external TTL or Ethernet trigger signal.
Is third-party calibration certification available for regulatory submissions?
i-Lab provides UKAS-accredited calibration certificates (traceable to NIST) for O₂ and dew point sensors, valid for 12 months—delivered with full uncertainty budgets and measurement procedure documentation.

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