Sanotac SF1005E FFKM/PTFE/Ceramic High-Pressure Fluoropolymer Metering Pump
| Brand | Sanotac |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Direct Manufacturer |
| Model | SF1005E |
| Flow Range | 0.01–100.00 mL/min |
| Increment | 0.01 mL/min |
| Flow Accuracy | ±0.5% |
| Flow Repeatability | ≤0.1% |
| Max Pressure | 5 MPa |
| Pressure Pulsation | ≤0.05 MPa |
| Wetted Materials | FFKM, PTFE, Specialty Ceramic |
| Communication | RS-232, USB (standard), RS-485/422 (optional), Modbus RTU/ASCII, Profibus, Profinet |
| Control Interface | 0–5 V, 4–20 mA analog inputs |
| Dimensions | 370 × 240 × 152 mm |
| Power Supply | 85–264 VAC, 50 Hz |
Overview
The Sanotac SF1005E is a high-precision, metal-free fluoropolymer metering pump engineered for ultra-pure, high-pressure fluid delivery in critical electronic chemical processing environments. Designed using Couette-flow displacement principles and dual parallel plunger architecture with floating plunger compensation, the SF1005E delivers stable, pulse-minimized volumetric flow under sustained pressure up to 5 MPa (725 psi). Its fully non-metallic fluid path—comprising perfluoroelastomer (FFKM) seals, virgin polytetrafluoroethylene (PTFE) components, and chemically inert specialty ceramics—eliminates metallic ion leaching, particle generation, and catalytic degradation pathways common in semiconductor-grade wet process chemistry, photoresist formulation, and advanced etchant delivery systems.
Key Features
- Metal-free wetted path compliant with SEMI F57 and ASTM D7279 standards for electronic chemical purity
- Dual parallel plunger design with cam-profile compensation and real-time electronic pulsation suppression, achieving ≤0.05 MPa pressure ripple at full load
- Adjustable pressure protection limits (upper/lower bounds) with automatic fault shutdown and event logging
- Multi-mode delivery control: volumetric (mL/min), gravimetric (g/min), and closed-loop mass-loss integration via optional balance interface (customizable to METTLER TOLEDO, Sartorius, or A&D load cell specifications)
- Configurable flow programs: constant-rate mode and multi-segment gradient mode (up to 32 time-based steps)
- Onboard real-time visualization of synchronized pressure and flow curves, with timestamped data export to .xlsx format including audit trail metadata
- End-user accessible calibration matrix across nine discrete flow points (0.01, 0.1, 1, 10, 20, 40, 60, 80, 100 mL/min), enabling field recalibration without factory service
- Integrated plunger rod cleaning cycle triggered automatically after defined run durations or manual initiation, extending seal life and reducing maintenance intervals
- Scalable control architecture supporting 1:32 daisy-chained pump networks via RS-485 Modbus RTU or industrial Ethernet (Profinet/Profibus)
Sample Compatibility & Compliance
The SF1005E is validated for continuous handling of aggressive electronic chemicals including hydrofluoric acid (HF) solutions (≤49%), ammonium hydroxide (NH₄OH), sulfuric acid (H₂SO₄), hydrogen peroxide (H₂O₂), tetramethylammonium hydroxide (TMAH), and solvent-based photoresist strippers (e.g., NMP, PGMEA). All wetted materials meet USP Class VI biocompatibility requirements and are certified per ISO 10993-5 cytotoxicity testing. The pump’s mechanical design conforms to IEC 61000-6-2 (immunity) and IEC 61000-6-4 (emission) standards. Optional firmware modules support 21 CFR Part 11-compliant electronic signatures, ALCOA+ data integrity protocols, and GLP/GMP audit-ready operation logs with user-level access controls.
Software & Data Management
The SanoFlu Fluid Control Management System (v3.2+) provides native Windows/Linux-compatible configuration, monitoring, and diagnostics. It supports dual-channel real-time plotting (pressure vs. time, flow vs. time), programmable alarm thresholds, and automated report generation compliant with ISO/IEC 17025 documentation requirements. All operational parameters—including serial port settings, pressure guard bands, gradient profiles, and calibration coefficients—are stored in non-volatile memory with version-stamped backups. Data exports include embedded device ID, operator login, environmental timestamp (UTC), and checksum-verified binary headers to ensure forensic traceability during regulatory inspections.
Applications
- Precise dosing of HF-based etchants in wafer cleaning and surface preparation lines
- Gravimetric feed control in photoresist coater and developer systems
- High-pressure delivery of ultrapure solvents into microreactors and continuous flow synthesis platforms
- Integration into inline analytical systems requiring pulse-free flow for UV-Vis, ICP-MS, or IC detection
- Automated reagent addition in semiconductor CMP slurry preparation and dilution stations
- Research-scale delivery of corrosive electrolytes in battery electrolyte formulation and solid-state battery interface studies
FAQ
What materials are in direct contact with fluid?
FFKM (perfluoroelastomer) seals, virgin PTFE pump head liners and valve seats, and alumina-zirconia composite ceramic plungers and check valves.
Does the pump support FDA 21 CFR Part 11 compliance?
Yes—when configured with SanoFlu v3.2+ and enabled audit-trail logging, electronic signature, and role-based access control modules.
Can the SF1005E be integrated into a PLC-controlled production line?
Yes—it natively supports Modbus RTU over RS-485, Profibus DP, and Profinet IO, with configurable analog input (0–5 V / 4–20 mA) for external setpoint modulation.
Is flow calibration traceable to national standards?
Calibration is performed using NIST-traceable gravimetric measurement systems; users may import their own certified reference flow values into the calibration matrix.
What maintenance intervals are recommended for continuous 24/7 operation?
Plunger rod cleaning cycles every 200 hours; FFKM seal replacement every 6,000 operating hours or per visual inspection; full pump head refurbishment recommended at 12,000 hours.
