Kashiyama SDE1220-011 Screw-Type Dry Vacuum Pump System

Overview

The Kashiyama SDE1220-011 is a fully integrated, oil-free screw-type vacuum pump system engineered for high-reliability roughing and medium-vacuum applications in research laboratories, semiconductor process tool support, analytical instrumentation (e.g., mass spectrometry, electron microscopy), and pilot-scale thin-film deposition systems. Unlike traditional oil-lubricated rotary vane pumps, this system employs a dual-stage architecture comprising a Kashiyama SDE200 dry screw pump (1.5 kVA) paired with a KMB1203 mechanical booster pump (4.5 kVA), enabling continuous operation from atmosphere down to ≤0.5 Pa without oil contamination or hydrocarbon backstreaming. Its all-dry design eliminates the need for oil changes, vapor traps, or frequent maintenance intervals—critical for GLP-compliant environments and processes requiring ultra-clean vacuum conditions. The system integrates a dedicated electrical control cabinet, vacuum piping manifold, acoustic enclosure (SR-19), and cooling water interface, delivering turnkey readiness for ISO Class 5–7 cleanroom installations.

Key Features

• Oil-free operation ensures zero hydrocarbon contamination—essential for surface science, residual gas analysis (RGA), and UHV pre-pumping stages
• Dual-pump configuration (SDE200 + KMB1203) provides stable pumping performance across 10⁵ to 10⁻¹ Pa range with high volumetric efficiency at low inlet pressures
• VG 100 inlet flange (ISO-KF compatible) and NW 40 exhaust flange enable seamless integration with standard vacuum chambers and foreline manifolds
• Integrated SR-19 noise suppression enclosure reduces operational sound pressure to ≤68 dB(A) at 1 m—meeting laboratory ambient noise requirements per ISO 7779
• Modular cooling interface supports regulated water flow (4–8 L/min, 10–25 °C) with temperature monitoring and flow interlock capability
• N₂ purge ports (0–80 SLM adjustable) allow inert gas sweeping of internal rotors during shutdown or venting—preventing oxidation and condensable residue buildup
• IP54-rated control cabinet houses PLC-based motor starters, thermal overload protection, phase-loss detection, and RS-485 Modbus RTU communication port

Sample Compatibility & Compliance

The SDE1220-011 is compatible with non-corrosive, non-condensable gases and low-vapor-pressure solvents typical in physical vapor deposition (PVD), sputtering, and thermal evaporation processes. It is not rated for halogenated, acidic, or highly reactive process gases (e.g., Cl₂, NF₃, SiH₄) without optional corrosion-resistant coatings or external scrubbers. The system conforms to JIS B 8341-1 (vacuum pump safety and performance), meets CE Machinery Directive 2006/42/EC, and complies with IEC 61000-6-2 (immunity) and IEC 61000-6-4 (emissions). All electrical components are UL Recognized (E350477), and the cabinet design satisfies NFPA 79 requirements for industrial machinery. Documentation includes full Declaration of Conformity, factory calibration records, and FAT (Factory Acceptance Test) report traceable to JCSS-accredited standards.

Software & Data Management

While the base SDE1220-011 operates via hardwired local controls, optional integration with Kashiyama’s VP-Link™ SCADA interface enables remote monitoring of pump status (rotor temperature, motor current, cooling flow, N₂ pressure), real-time vacuum curve logging, and event-triggered data export (CSV/Excel). Audit trails comply with FDA 21 CFR Part 11 when deployed with validated user access control and electronic signature modules. Data retention supports ≥30 days of continuous operation logs at 1-second resolution. Integration with LabArchives ELN or DeltaV DCS is supported via OPC UA (v1.04) or Modbus TCP gateways—facilitating automated vacuum sequence validation in GMP manufacturing environments.

Applications

• Roughing pump for diffusion pumps, turbomolecular pumps, and cryopumps in analytical instrumentation suites
• Primary vacuum source for magnetron sputtering, e-beam evaporation, and ion plating systems
• Process support in R&D-scale atomic layer deposition (ALD) and plasma-enhanced CVD reactors
• Continuous evacuation of gloveboxes and inert-atmosphere sample transfer chambers
• High-throughput vacuum drying ovens and freeze-dryers requiring stable sub-Pa base pressure
• Backing pump for helium leak detectors (e.g., Inficon UL1000, Pfeiffer ASM340)

FAQ

What is the recommended maintenance schedule for the SDE1220-011?

Scheduled maintenance includes quarterly inspection of cooling water filters, annual verification of N₂ purge line integrity, and biennial rotor alignment check using Kashiyama’s certified service kit (P/N MA-SDE200-ALG). No oil changes or seal replacements are required within first 12,000 operating hours.
Can the system be operated continuously at full load?

Yes—the SDE1220-011 is rated for continuous duty (IEC 60034-1 S1) under ambient temperatures ≤40 °C and cooling water supply meeting specified flow and temperature parameters.
Is remote start/stop functionality available without optional SCADA?

A dry-contact remote enable/disable terminal (24 V DC, isolated) is provided on the main cabinet terminal block—compatible with building management systems (BMS) or PLCs without software licensing.
Does the system include vibration isolation mounts?

Standard delivery includes four pre-tensioned elastomeric anti-vibration mounts (natural frequency ≤8 Hz), pre-installed on the cabinet baseplate per ISO 10816-3 vibration severity guidelines.
What documentation is supplied with shipment?

Each unit ships with bilingual (English/Japanese) operation manual, wiring diagram set, CE DoC, JIS compliance certificate, FAT report, and traceable calibration certificates for pressure and flow sensors.