KASHIYAMA SDE60N20 Oil-Free Dry Vacuum Pump System

Overview

The KASHIYAMA SDE60N20 is a high-capacity, oil-free dry vacuum pump system engineered for demanding industrial and advanced laboratory applications requiring clean, hydrocarbon-free vacuum environments. Unlike conventional oil-sealed rotary vane or screw pumps, the SDE60N20 employs a fluorinated-oil-lubricated dry compression mechanism—ensuring zero backstreaming of hydrocarbons and eliminating contamination risks in ultra-high-purity processes. Its core architecture integrates the SDE200 main pump unit with the MSB6004 booster stage, enabling stable operation at ultimate pressures down to 0.5 Pa while delivering a nominal pumping speed of 100,000 L/min at both 50 Hz and 60 Hz supply frequencies. Designed and manufactured in Japan under Kashiyama’s stringent quality control protocols, the system complies with JIS B 8341-1 (vacuum pump performance testing) and meets mechanical safety requirements per IEC 60204-1. It is routinely deployed in semiconductor fabrication tool evacuation, vacuum metallurgy chambers, electron microscopy sample preparation systems, and large-scale thin-film deposition lines where process integrity, long-term reliability, and compliance with ISO Class 5 (Class 100) cleanroom-compatible vacuum generation are mandatory.

Key Features

• Oil-free dry operation with fluorinated synthetic lubricant—eliminates hydrocarbon contamination and enables safe handling of reactive, corrosive, or condensable process gases
• Modular dual-stage configuration: SDE200 primary pump + MSB6004 booster—optimized for rapid pump-down of large-volume chambers (≥10 m³) and stable low-pressure maintenance
• NW200 inlet flange and NW40 outlet flange conforming to ISO-KF standards—facilitates direct integration into existing high-vacuum piping networks
• Integrated cooling water circuit with pressure-regulated flow (4–8 L/min at 0.3–0.5 MPa gauge) and temperature monitoring (10–25 °C operational range)
• Dual electrical interfaces: HARTING Han® 100A module (9-pin male, part no. 09 14 002 2651) for power and motor control; DB-25 connector (Japan Aviation Electronics PF-N type) for analog/digital I/O and interlock signaling
• Onboard nitrogen purge port (RC 3/8″ with coupling) supporting inert gas sealing during corrosive gas evacuation—compliant with SEMI F47-0212 recommendations for vacuum system corrosion mitigation

Sample Compatibility & Compliance

The SDE60N20 is suitable for continuous-duty evacuation of non-explosive, non-toxic, and non-oxygen-rich gas loads—including air, nitrogen, argon, and process byproducts from PVD/CVD reactors, plasma etch tools, and vacuum drying ovens. It is not rated for solvent vapors, halogenated compounds, or unfiltered particulates without upstream trapping. The system adheres to electromagnetic compatibility (EMC) requirements per CISPR 11 Group 2, Class A, and carries CE marking for machinery safety (2006/42/EC). While not intrinsically safe, it may be integrated into Class 1, Division 2 hazardous locations when installed with appropriate barrier-rated enclosures and purge systems per NEC Article 500. Documentation includes full traceability of material certifications (e.g., ASTM A351 CF8M for wetted components) and factory-assembled leak test reports (helium mass spectrometry, ≤1×10⁻⁸ Pa·m³/s).

Software & Data Management

The SDE60N20 operates as a standalone hardware platform without embedded firmware-based SCADA or proprietary software. All operational parameters—including motor current draw (monitored per channel at ≤1 A max), cooling water flow/pressure status, and interlock states—are accessible via hardwired analog outputs (0–10 V / 4–20 mA) and discrete digital signals routed through the DB-25 interface. Integration with third-party PLCs (e.g., Siemens S7-1500, Rockwell ControlLogix) or vacuum system controllers (e.g., MKS 974B, Pfeiffer HiCube) is achieved using standard Modbus RTU or Profibus DP-V1 protocols via optional communication modules. Audit trails and event logging must be implemented externally per FDA 21 CFR Part 11 requirements if used in regulated GMP/GLP environments.

Applications

• High-throughput vacuum chamber evacuation in semiconductor front-end manufacturing (lithography track systems, implanters, metrology tools)
• Continuous roughing and backing for turbomolecular and cryogenic pumps in analytical instrumentation (e.g., residual gas analyzers, surface science UHV chambers)
• Vacuum degassing of molten metals and alloys in precision casting facilities
• Large-volume freeze-drying systems (≥500 L shelf capacity) requiring stable sub-1 Pa base pressure and minimal oil vapor contribution
• Research-scale fusion plasma diagnostics and magnetohydrodynamic (MHD) simulation vessels

FAQ

Is the SDE60N20 certified for use in cleanrooms?
Yes—the pump housing and internal surfaces are constructed from electropolished stainless steel (AISI 316L), and its oil-free operation ensures compliance with ISO 14644-1 Class 5 particle emission limits when installed with proper vibration isolation and exhaust filtration.
Does it require periodic oil changes?
No—fluorinated oil (DP: 0.7 L, MB: 0.6 L) is sealed for life under normal operating conditions; replacement is only necessary after major service events or exposure to incompatible process gases.
Can it handle water vapor or condensable vapors?
Only with upstream cold traps or adsorption dryers; prolonged exposure to saturated steam or solvents will degrade fluoropolymer vanes and compromise ultimate pressure performance.
What is the recommended maintenance interval?
Kashiyama specifies 12,000 hours of continuous operation between major overhauls; routine checks include cooling water filter inspection, nitrogen purge line integrity verification, and motor bearing vibration analysis per ISO 10816-3.
Is technical documentation available in English?
Yes—full operation manuals, dimensional drawings (including mounting bolt patterns and centerline elevations), and spare parts catalogs are provided in English upon order confirmation.