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| Brand | Rtec |
|---|---|
| Origin | Switzerland |
| Model | CP-6 |
| Dimensions (L×W×D) | 770 × 920 × 1860 mm |
| Platen Count | 1 |
| Platen Diameter | 400 mm |
| Platen Speed | 0–90 rpm |
| Integrated In-situ Sensors | Friction Torque, Acoustic Emission, Surface Temperature |
| Motion Control | Motorized X-Y Stage with Programmable Wafer Oscillation |
| In-line 3D Profilometry | Confocal + Interferometric + Bright/Dark Field Modes |
| Vertical Load Range | Programmable (Typical Range: 0–50 N, Configurable per Application) |
| Sample Compatibility | 50–300 mm wafers and substrates |
| Compliance | Designed for ASTM F2639, ISO/IEC 17025-aligned workflows, supports GLP/GMP data integrity requirements |
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