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Anhui Bestec Equipment Technology Co., Ltd.

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BrandBEQ
OriginAnhui, China
ModelBTF-1400C-S
Maximum Temperature1400 °C
Temperature Control Accuracy±1 °C
Rated Power4 kW
Heating Rate≤10 °C/min below 1200 °C, ≤5 °C/min from 1200–1300 °C
Heating ElementSilicon Carbide (SiC) Rods
Control SystemFuzzy PID with Auto-Tuning, 30-Stage Programmable Controller, Over-Temperature & Thermocouple Failure Protection
Tube Inner DiameterΦ60 mm
Chamber Lining MaterialHigh-Purity Alumina (Al₂O₃) with US-Imported High-Temperature Alumina Coating
CoolingDual-Layer Air-Cooled Housing
Structural DesignFlanged Support Bracket for Load Distribution
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-II-S-H-60
Max Temperature1200 °C
Operating Temperature Range≤1100 °C (continuous)
Control Accuracy±1 °C
Heating Rate (to max temp)≤10 °C/min
Power Rating2.5 kW
VoltageAC 220 V, 50/60 Hz
Heating Zone Length2 × 100 mm
Uniform Temperature Zone Length80 mm
Tube DiameterΦ60 mm (quartz)
Chamber Dimensions (L×W×H)550×450×1100 mm
Net Weight60 kg
Thermocouple TypeK-type
Control SystemFuzzy PID with auto-tuning, 30-segment programmable ramp-soak profile
Safety FeaturesOver-temperature & thermocouple break alarms
Rotation Capability0–180° manual tilt (vertical/horizontal positioning)
Gas Flow ControlManual float meter (16–160 mL/min)
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-PV
Maximum Temperature1200 °C
Temperature Control Accuracy±1 °C
Heating Rate (to Max Temp)50 °C/min
Heating MethodResistance Wire Heating
Control SystemFuzzy PID + Auto-Tuning Algorithm
Programmable Stages30-Step Intelligent Ramp/Soak Profile
Pressure Capability0–1.5 MPa (0–15 kgf/cm²)
Tube Dimensions (OD × L)50/60/80/100 mm × 1000 mm (selectable)
Tube MaterialSpecialized Explosion-Resistant Quartz with Reinforced Protective Sleeve
Safety FeaturesAdjustable Pressure Relief Valve on Exhaust Flange, Over-Temperature & Thermocouple Break Alarms
Structural DesignHorizontal Split-Type (Top-Opening) Configuration
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BrandBEQ
OriginAnhui, China
Manufacturer TypeAuthorized Distributor
Product OriginDomestic (China)
ModelMicro PECVD
Heating MethodHot-Wall
Base Vacuum5 × 10⁻¹ Pa
Operating Pressure Range1.01325 × 10⁵ Pa to 1.33 × 10⁻² Pa
RF Power Output0–150 W
RF Interface50 Ω, N-type female
Power Stability≤5 W
Harmonic Content≤−50 dBc
Max. Heating Temperature1200 °C (Continuous Use ≤1100 °C)
Effective Chamber DimensionsΦ25 mm / Φ50 mm (Customizable Tube Diameter)
Chamber MaterialAlumina + High-Temperature Ceramic Fiber
Thermocouple TypeK-type
Temperature Control Accuracy±1 °C
Control Mode30-Stage Programmable PID with Auto-Tuning
Heating Zone Length230 mm
Heating ElementResistance Wire
Power SupplySingle-phase, 220 V, 50/60 Hz
Total System Power1 kW
Pumping Speed10 m³/h
Ultimate Vacuum (with Pump)5 × 10⁻¹ Pa
Vacuum Gauge Range−0.1 to 0.15 MPa (0.01 MPa/div)
Mass Flow ControllersTriple-channel, Stainless Steel Dual-Ferrule Fittings
Standard N₂ Flow Ranges200 / 500 / 1000 sccm (Customizable)
MFC Accuracy±1.5% FS
Linearity±1% FS
Repeatability±0.2% FS
Response Time (Gas)1–4 s
(Electrical)10 s
Working Pressure Drop0.1–0.5 MPa
Max. Inlet Pressure3 MPa
CoolingForced Air
Ambient Temp. Range5–45 °C
Relative Humidity≤85% RH
Noise Level≤50 dB(A)
Vacuum InterfaceKF25 (Inlet & Exhaust)
Vacuum ConnectionBellows + Manual Gate Valve
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BrandBEQ
OriginAnhui, China
Manufacturer TypeAuthorized Distributor
Target MarketDomestic (China)
Target ApplicationsSEM Sample Preparation
Sputtering Target Diameter58 mm
Sample Stage Diameter40 mm (accommodates up to six standard sample cups)
Chamber DimensionsØ100 mm × 130 mm (height)
Vacuum SystemDirect-coupled two-stage rotary vane pump (RVD-2), pumping speed: 2 L/s, ultimate pressure: 5 × 10⁻² Pa
Vacuum GaugePirani gauge
Process Gas OptionsAir or high-purity argon (dedicated Ar inlet with fine-flow micro-regulation valve)
Operating Pressure RangeAdjustable from ~1–20 Pa via precision bleed valve
Safety InterlockAutomatic cutoff at 20 Pa chamber pressure
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-DSL
Instrument TypeHorizontal Tube Furnace
Max Temperature1100 °C (with alloy steel pressure tube)
Operating Temperature Range≤1050 °C (alloy steel tube)
Pressure Rating4 MPa at ≤800 °C
Control Accuracy±1 °C
Heating Zone Length440 mm
Uniform Temperature Zone Length200 mm
Tube DimensionsΦ50 × 500 mm
Movable Range700 mm
Rated Power3 kW
SupplyAC 220 V, 50/60 Hz
Heating ElementImported Kanthal resistance wire
Control MethodFuzzy PID with auto-tuning, 30-segment programmable ramp-soak profile
Safety FeaturesOver-temperature and thermocouple break alarm
CoolingInternal water-cooled armored flange
SealingBEQ patented clamp-type flange
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BrandBEQ
OriginAnhui, China
ModelBTF-900C-SS
Maximum Temperature900 °C
Temperature Control Accuracy±1 °C
Rated Power280 W
Heating Rate (to Max Temp)10 °C/min
Heating MethodResistance Wire Heating
Control SystemFuzzy PID + Auto-Tuning
Programmable Stages30-segment Intelligent Ramp/Soak
Safety FeaturesOver-Temperature & Thermocouple Break Alarms
Tube Inner DiameterΦ25 mm
Hot Zone Length90 mm
Furnace Liner MaterialHigh-Purity Alumina Fiber
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BrandBEQ
OriginAnhui, China
ModelBTF-1100C-IIIA
Maximum Temperature1100°C
Temperature Control Accuracy±1°C
Maximum Power12 kW
Heating Rate (to Max Temp)10°C/min
Heating MethodResistance Wire Heating
Control SystemTouchscreen Console with Fuzzy PID Control, Auto-Tuning Function, 30-Stage Programmable Ramp/Soak Profiles, Over-Temperature & Thermocouple Failure Alarms
Tube Inner DiameterΦ280 mm
Vacuum & Atmosphere CompatibilityEquipped with Water-Cooled Hinged Flanges and KF25/KF16 Auxiliary Ports for Vacuum Pump Integration
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-S
Maximum Temperature1200 °C
Temperature Control Accuracy±1 °C
Rated Power1.5 kW
Heating Rate (to Max Temp)10 °C/min
Heating ElementMolybdenum-doped Fe-Cr-Al Alloy Resistance Wire
Control SystemFull-Automatic PID with Self-Tuning, Over-Temperature & Thermocouple Break Alarms
Tube Inner DiameterΦ25 mm (1")
ComplianceCE Certified
Heating Zone Configuration8-zone radial heating assembly
Programmable Ramp/Soak30-segment heating and cooling profile
Vacuum/Gas Atmosphere CapabilityYes
Tube Material CompatibilityHigh-purity quartz (standard), optional alumina or stainless steel
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BrandBEQ
OriginAnhui, China
ModelBTF-1400C-III
Max Temperature1400 °C
Temperature Uniformity±1 °C
Max Power13 kW
Heating Rate≤10 °C/min up to 1200 °C
Heating ElementSilicon Carbide (SiC) Rods
Control SystemFuzzy PID with auto-tuning, 30-segment programmable controller, over-temperature & thermocouple-failure alarm
Tube DimensionsΦ60 mm × 1200 mm or Φ80 mm × 1200 mm
Chamber MaterialHigh-purity Al₂O₃ ceramic tube with US-sourced high-temperature alumina coating
CoolingDual-layer water-cooled outer shell with forced-air interlayer cooling
ComplianceDesigned for ISO/IEC 17025-compliant lab environments
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BrandBEQ
OriginAnhui, China
Manufacturer TypeAuthorized Distributor
Origin CategoryDomestic (China)
ModelBTF-1200C-R
Instrument TypeHorizontal Rotating Tube Furnace
Max Temperature1200°C
Continuous Operating Temperature≤1100°C
Temperature Control Accuracy±1°C
Max Power3 kW
Heating Rate (to Max Temp)≤10°C/min
Heating MethodResistance Wire (Fe-Cr-Al Alloy)
Heating Zone Length440 mm
Uniform Temperature Zone Length200 mm
Tube Rotation Speed3–13 rpm (adjustable)
Tilt Angle Range0–40° (adjustable)
Tube DimensionsDual-Diameter Quartz Tube — Ø60×420 mm (ends), Ø100×360 mm (center), Total Length: 1200 mm
Vacuum Level (with Mechanical Pump)0.5 Pa
Ultimate Vacuum (DRV10 Pump, Cold/Empty)5×10⁻¹ Pa
Pressure Gauge Range−0.1 to 0.15 MPa
Control SystemFuzzy PID + Self-Tuning, 30-Stage Programmable Controller
Safety FeaturesOver-Temperature Alarm, Thermocouple Break Detection
Power SupplyAC 208–240 V, Single Phase, 50/60 Hz
Main Drive Motor Power0.04 kW
Linear Actuator Power0.04 kW
Overall Dimensions (Furnace Only)910×383×510 mm
With Tube Assembly1300×600×1230 mm
Packaging (Wooden Crate)1150×530×810 mm
Net Weight90 kg
Gross Weight150 kg
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-III-HP-132
TypeHorizontal Tube Furnace
Max Temperature1200 °C
Temperature Control Accuracy±1 °C
Max Power14.5 kW
Heating Rate (to Max Temp)≤5–10 °C/min
Heating MethodResistance Wire Heating
Control SystemFuzzy PID + Self-Tuning Regulation
Programmable Stages30-segment Intelligent Ramp/Soak
Safety FeaturesOver-Temperature & Thermocouple Break Alarms
Pressure Range0–10 MPa
Tube ID Options1–20 inch (customizable)
CoolingForced Air Cooling
Display15.7-inch Touchscreen HMI
Footprint2.66 m²
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BrandBEQ
OriginAnhui, China
ModelBTF-1700C
Maximum Temperature1700 °C
Temperature Control Accuracy±1 °C
Rated Power5.2 kW
Heating Rate≤10 °C/min below 1200 °C, ≤5 °C/min from 1200–1500 °C, ≤2 °C/min above 1500 °C
Heating ElementSilicon Molybdenum (MoSi₂) Rods
Control SystemFuzzy PID with auto-tuning, 30-segment programmable controller, over-temperature and thermocouple failure alarm
Tube DimensionsΦ60 mm × 1000 mm (ID × effective length)
Chamber LiningHigh-purity alumina (Al₂O₃) tube with proprietary high-emissivity ceramic coating (imported from USA)
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BrandBEQ
OriginAnhui, China
ModelBOF-800C-16D
Instrument TypeBox Furnace
Max Temperature1400°C
Temperature Control Accuracy±2°C
Max Power20 kW
Heating Rate (to max temp)1–30°C/min (recommended 10°C/min)
Heating MethodResistance Wire Heating
Control SystemFuzzy PID + Auto-Tuning, 30-Stage Programmable Logic Controller with Over-Temperature and Thermocouple Break Alarms
Tube DiameterΦ50 mm
ComplianceDesigned for ASTM E2550, ISO 11358, and ICH Q1A(R2) thermal stability assessment protocols
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-III-210
Maximum Temperature1200 °C
Temperature Control Accuracy±1 °C
Total Power Rating15 kW (6-point temperature control)
Heating Rate to Max Temp≤10 °C/min
Heating MethodResistive Wire Heating
Control System10-inch capacitive touch LCD panel with fuzzy PID algorithm, auto-tuning capability, 30-segment programmable ramp-soak profile, over-temperature and thermocouple break alarms
Tube Inner DiameterΦ210 mm
Zone ConfigurationThree independently controlled horizontal zones (300 mm + 300 mm + 300 mm)
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-II-UAR-SL
Max Temperature1200 °C
Temperature Control Accuracy±1 °C
Max Power7.2 kW
Heating Rate (to Max Temp)≤10 °C/min
Heating MethodResistance Wire
Control SystemFuzzy PID + Self-Tuning Regulation, 30-Stage Programmable Logic Controller
Safety FeaturesOver-Temperature & Thermocouple Break Alarms
Rotation MechanismGeared Motor with Bidirectional Speed Control
Atomization System60 kHz Digital Ultrasonic Nebulizer with Adjustable Output
Insulation MaterialVacuum-Formed Alumina Fiber
Thermocouple TypeK-Type
Structural FrameAnodized Aerospace Aluminum with Chrome-Plated Dual Linear Rails
Vacuum FlangeMulti-Port Longitudinal Design
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BrandBEQ
OriginAnhui, China
ModelBTF-1600C-II
Maximum Temperature1600 °C
Temperature Uniformity±1 °C
Total Power Rating11 kW
Heating Rate≤10 °C/min up to 1200 °C
Heating ElementSilicon Molybdenum (MoSi₂) Rods
Control SystemFuzzy PID with auto-tuning, 30-segment programmable temperature profile, over-temperature and thermocouple failure alarm
Tube DimensionsΦ60 mm × 1200 mm or Φ80 mm × 1200 mm
Chamber LiningHigh-purity Al₂O₃ ceramic tube with US-sourced high-emissivity alumina coating
CoolingDual-layer air-cooled shell structure
Structural SupportIntegrated flange support frame for load distribution
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-BHP
Instrument TypeTube Furnace
Max Operating Temperature1100°C (with alloy steel pressure tube)
Temperature Control Accuracy±1°C
Heating MethodImported Kanthal® resistance wire
Control SystemFuzzy PID algorithm with auto-tuning and 30-segment programmable logic
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-RTP-180
Maximum Temperature1200 °C
Temperature Control Accuracy±1 °C
Temperature Measurement Accuracy±0.2 °C
Temperature Uniformity±2 °C
Max Heating Rate30 °C/s
Cooling Rate1–300 °C/min (adjustable via furnace opening or tube removal)
Internal Chamber DimensionsΦ180 mm × 580 mm
Rated Power24 kW
Control SystemIntelligent Fuzzy Full-Closed-Loop PID with 7" LCD Touchscreen
Heating ElementHigh-Performance Resistance Wire
InsulationHigh-Density Alumina Fiber Vacuum-Formed Crucible with High-Reflectivity Ultra-High-Temperature Coating
Gas InterfaceDual KF25 vacuum port + Φ6 mm dual ferrule gas inlet
Cooling OptionsNatural convection, forced air, or N₂/compressed air (0.14–0.5 kg/cm²)
Electrical Supply380–400 V AC, 50–60 Hz, auto-adaptive
Weight~80 kg
Overall Dimensions920 mm (L) × 500 mm (W) × 560 mm (H)
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BrandBEQ
OriginAnhui, China
Equipment TypeHorizontal Tube Furnace
Maximum Temperature1600 °C
Temperature Control Accuracy±1 °C
Rated Power5.2 kW
Heating Rate≤10 °C/min below 1200 °C, ≤5 °C/min from 1200–1500 °C, ≤2 °C/min above 1500 °C
Heating ElementSilicon Molybdenum (MoSi₂) Rods
Control SystemFuzzy PID with Auto-Tuning, 30-Stage Programmable Ramp/Soak Profile, Over-Temperature & Thermocouple Break Protection
Tube DimensionsΦ60 mm × 1000 mm or Φ80 mm × 1000 mm
Chamber LiningHigh-Purity Al₂O₃ Ceramic Tube with US-Imported High-Temperature Al₂O₃ Coating
CoolingDual-Layer Air-Cooled Steel Housing
Structural SupportAdjustable Flange Mounting Bracket
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-SLD
Max Temperature1200 °C (quartz tube), 1100 °C (alloy steel pressure tube)
Temperature Control Accuracy±1 °C
Max Power3 kW
Heating Rateup to 50 °C/s (during rapid insertion), 30 °C/s (100–1000 °C under standard ramp)
Heating ElementImported Kanthal A1 resistance wire
Control SystemFuzzy PID with auto-tuning + 30-segment programmable controller
ConfigurationHorizontal sliding rail design for rapid thermal cycling
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BrandBEQ
OriginAnhui, China
ModelBTF-1400C-II
Maximum Temperature1400 °C
Temperature Uniformity±1 °C
Total Power Rating10 kW
Heating Rate≤10 °C/min up to 1200 °C
Heating ElementSilicon Carbide (SiC) Rods
Control SystemFuzzy PID with Auto-Tuning, 30-Stage Programmable Controller, Over-Temperature & Thermocouple Break Protection
Tube DimensionsΦ60 mm × 1200 mm or Φ80 mm × 1200 mm
Furnace Chamber MaterialHigh-Purity Alumina (Al₂O₃) with US-Imported High-Temperature Alumina Coating
CoolingDual-Layer Shell with Forced-Air Cooling System
Structural SupportIntegrated Flange Mounting Bracket for Load Distribution
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BrandBEQ
OriginAnhui, China
Manufacturer TypeAuthorized Distributor
Country of OriginChina
ModelMF-1200C-L
Instrument TypeBox-Type Muffle Furnace
Max Temperature1200°C
Operating Temperature Range≤1100°C
Temperature Control Accuracy±1°C
Rated Power4 kW (Note: 6 kW listed in description refers to peak/derated capacity
Heating Rate (to max temp)5–20°C/min
Heating ElementKanthal A1 Resistance Wire
Chamber Dimensions250 × 300 × 250 mm (L×W×H)
Nominal Volume64 L
External Dimensions670 × 630 × 1010 mm
Net Weight143 kg
Gross Weight172 kg
VoltageAC 208–240 V, Single Phase, 50/60 Hz
ThermocoupleType K
Control System30-Stage Programmable PID with Auto-Tuning, Over-Temperature & Thermocouple Break Protection
InsulationMulti-Layer Alumina Fiber (Vacuum-Formed), High-Purity Al₂O₃ Liner
CoolingDual-Wall Air-Cooled Jacket with Integrated Air Channel
Safety CertificationCE-compliant
Optional CertificationsUL 61010 (TUV or CSA, fee-based)
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BrandBEQ
OriginAnhui, China
ModelBTF-1200C-RTP-CVD
Temperature Range100–1000 °C
Max Heating Rate50 °C/s
Max Operating Temperature1200 °C
Vacuum Base Pressure5.0×10⁻¹ Pa (cold, empty)
Heating Zone Length230 mm
Uniform Zone Length120 mm
Temperature Repeatability±3 °C
Control Accuracy±0.1 °C
Furnace TubeHigh-Purity Quartz, Φ90×400 mm, R45 end cap
Gas Flow ControllersDual-stainless-steel double-ferrule fittings, N₂-calibrated ranges 200/500 sccm, accuracy ±1.5%, repeatability ±0.2%, response time 1–4 s (gas), 10 s (electrical)
Vacuum PumpKF25 inlet/outlet, 165 L/min pumping speed, 1.1 L oil capacity
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