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| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Target Market | Domestic (China) |
| Target Applications | SEM Sample Preparation |
| Sputtering Target Diameter | 58 mm |
| Sample Stage Diameter | 40 mm (accommodates up to six standard sample cups) |
| Chamber Dimensions | Ø100 mm × 130 mm (height) |
| Vacuum System | Direct-coupled two-stage rotary vane pump (RVD-2), pumping speed: 2 L/s, ultimate pressure: 5 × 10⁻² Pa |
| Vacuum Gauge | Pirani gauge |
| Process Gas Options | Air or high-purity argon (dedicated Ar inlet with fine-flow micro-regulation valve) |
| Operating Pressure Range | Adjustable from ~1–20 Pa via precision bleed valve |
| Safety Interlock | Automatic cutoff at 20 Pa chamber pressure |
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