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| Brand | Atonarp |
|---|---|
| Origin | Japan |
| Model | AST3007 |
| Mass Range | 2–285 amu |
| Resolution | 0.8 ± 0.2 (FWHM) |
| Detection Limit | 0.1 ppm |
| Sampling Speed | High-speed dynamic acquisition |
| Sensitivity | Sub-ppb for key process gases |
| Vacuum System | Turbomolecular pump |
| Detector | Faraday Cup / Secondary Electron Multiplier (FC/SEM) |
| Operating Temperature | 15–35 °C |
| Power Consumption | 350 W |
| Dimensions (L×W×H) | 299 × 218 × 331 mm |
| Weight | 15 kg |
| Brand | Atonarp |
|---|---|
| Origin | Japan |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Aston™ Process Mass Spectrometer |
| Pricing | Available Upon Request |
| Brand | Atonarp |
|---|---|
| Origin | Japan |
| Model | Aston™ |
| Application Domain | In-line Process Mass Spectrometry for Semiconductor Vacuum System Integrity Monitoring |
| Compliance Context | Designed for ISO 9001-certified semiconductor fabs |
| Environmental Rating | IP65-rated enclosure |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | France |
| Model | ASM-2000 |
| Detection Principle | Helium Mass Spectrometry (Quadrupole) |
| Measurement Methods | Vacuum Mode & Sniffer Mode |
| Quantitative Sensitivity (Vacuum Mode) | 1×10⁻⁸ – 1×10⁻⁵ mbar·L/s |
| Qualitative Sensitivity (Sniffer Mode) | >1×10⁻⁵ mbar·L/s |
| Calibration | Automatic, traceable to NIST-certified standard leak |
| Operating Temperature | 15–25 °C |
| Relative Humidity | 30–80 % RH |
| Power Supply | 90–250 V AC, 50–60 Hz |
| Typical Power Consumption | 3,750 W |
| Compressed Air (ISO 8573-1 Class 1.3.1) | 4.5–10 bar(g) |
| Helium Supply Pressure | 0.5–8 bar(g) |
| Nitrogen Supply Pressure | 0.5–8 bar(g) |
| User Interface | 10" multi-touch full-HD color display |
| Software | GMP-compliant Windows 10 OS with 4-tier user access control, PDF report generation (test, calibration, audit trail), FDA 21 CFR Part 11 readiness |
| Connectivity | 1× LAN, 2× USB 3.0, 1× HDMI |
| Dimensions (L×W×H, incl. trolley) | 1,409 × 575 × 1,194 mm |
| Weight (incl. trolley) | 140 kg |
| Acoustic Noise Level | <53 dB(A) |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany (manufactured in Germany, distributed globally) |
| Model | ASM 340 |
| Detection Principle | Quadrupole Mass Spectrometry with Helium Carrier Gas |
| Minimum Detectable Leak Rate | ≤5 × 10⁻¹² mbar·L/s (helium) |
| Operating Mode | Positive-Pressure Sniffing & Vacuum-Coupled Testing |
| Pumping System | Integrated Turbomolecular Pump + Forepump |
| Mass Filter | 4-amu Resolution Quadrupole Analyzer |
| Response Time | <100 ms (typical) |
| Compliance | CE, RoHS, ISO 9001 Certified |
| Interface | RS-232, Ethernet, Analog Output (0–10 V) |
| Software Compatibility | Pfeiffer VacuGraph® PC Control Suite |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | France |
| Model | ASM 340WET |
| Detection Principle | Helium-Specific Quadrupole Mass Spectrometry |
| Operating Mode | Vacuum (Hard-Line) Mode |
| Pumping Configuration | Integrated with ACP 28 Dry Scroll Vacuum Pump |
| Compliance | CE, RoHS, ISO 9001 Certified |
| Interface | RS-232 / Ethernet (Optional), Analog Output (0–10 V) |
| Minimum Detectable Leak Rate | ≤5 × 10⁻¹² mbar·L/s (He) |
| Response Time | < 0.5 s (typical) |
| Mass Filter | Quadrupole with 4 amu resolution at 4 He peak |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | ASM 142 S |
| Detection Limit (He) | 1 × 10⁻⁸ Pa·m³/s |
| Measurement Range (He) | 1 × 10⁻⁷ to 1 mbar·L/s |
| Forepump | Oil-Sealed Rotary Vane Pump |
| Detectable Gas | ⁴He |
| Operating Temperature | 0–45 °C |
| Acoustic Noise Level | < 57 dB(A) |
| Dimensions (W × D × H) | 517 × 357 × 420 mm |
| Warm-up Time | 2 min |
| Detection Mode | Sniffer (Probe-Based) |
| Weight | 55 kg |
| Standard Probe | 5 m Flexible Hose with 9 cm Rigid Nozzle |
| Power Supply Options | 110–130 V AC (North America) or 200–240 V AC (Europe) |
| Interface | RS-232 / USB / Optional PLC Integration |
| Display Language Options | English, French, German, Chinese |
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