PVA TePla
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| Brand | PVA TePla |
|---|---|
| Origin | USA |
| Model | 80 Plus |
| Plasma Source Options | RF (13.56 MHz) or Microwave (2.45 GHz) |
| Chamber Configuration | Electrode-equipped (RF) or Electrode-less (Microwave) |
| Operation Modes | Manual and Automated Integration Capable |
| Compliance | Designed for Semiconductor Cleanroom Environments (Class 100 / ISO Class 5 compatible) |
| Integration | Standalone or Inline Production Line Compatible |
| Software Interface | Intuitive GUI with Parameter Logging and Recipe Management |
| Brand | PVA TePla |
|---|---|
| Origin | Germany |
| Model | GIGA 690 |
| Instrument Type | Imported Microwave Plasma Cleaner |
| Category | Plasma Surface Treater for Sample Preparation |
| Brand | PVA TePla |
|---|---|
| Origin | Germany |
| Model | GIGA 80 Plus |
| Technology | Dual-mode (Microwave + RF) Plasma |
| Chamber Type | Single-chamber, frame-based batch processing |
| Max. Frame Size | 100 × 300 mm |
| Application Focus | Semiconductor packaging pre-bonding, molding, and underfill processes |
| Compliance | Designed for ISO Class 5–7 cleanroom integration |
| Control Architecture | Fully automated PLC-based operation with recipe management |
| Brand | PVA TePla |
|---|---|
| Origin | Germany |
| Model | IoN Wave 10 |
| Type | Benchtop Microwave-Driven Gas Plasma System |
| Application Scope | Laboratory & Pilot-Scale Plasma Cleaning, Surface Activation, Descum, Wafer Decontamination, and Package Delidding |
| Compliance | CE Marked, Designed for ISO 14644-1 Class 5 Cleanroom-Compatible Operation |
| Brand | PVA TePla |
|---|---|
| Origin | Germany |
| Model Series | PS 400, PS 400 IL, PS 400 H2 |
| Configuration | Microwave-excited plasma source |
| Gas Compatibility | O₂, Ar, N₂, H₂ (PS 400 H2 includes integrated hydrogen generator) |
| Chamber Volume | Standard 400 cm³ (customizable) |
| Operating Pressure Range | 0.1–10 mbar |
| RF/Microwave Frequency | 2.45 GHz |
| Power Input | 600 W (adjustable) |
| Compliance | CE, RoHS, ISO 9001-certified manufacturing |
| Brand | PVA TePla |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | SAM Premium |
| Pricing | Available Upon Request |