Empowering Scientific Discovery

Core Equipment Co., Ltd.

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BrandMidas
OriginSwitzerland
Manufacturer TypeAuthorized Distributor
Product OriginImported
ModelVPE (HF Vapor Phase Etcher)
Price RangeUSD 68,000 – 136,000
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BrandPVD
OriginUnited Kingdom
Manufacturer StatusAuthorized Distributor
Import StatusImported
ModelQ-One
Product TypeLow-Energy High-Current Ion Implanter
Application DomainIC Ion Implantation
Implantation Energy25 kV Liquid Metal Ion Source (LMIS)
Implantation Dose ControlDeterministic Single-Ion Delivery
Wafer Size Support6-inch
Available Ion Species>40 elements selectable via LMIS and mass-filtered column
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BrandSemetrol
OriginUSA
ModelSemetrol DLTS
Temperature Range25 K – 700 K
CoolingClosed-Cycle Liquid Helium Refrigerator
Capacitance Measurement Frequency1 MHz
Capacitance Sensitivity1 fF
Voltage Range±100 V (Boonton), ±10 V (DAQ)
Voltage Resolution0.3 mV (DAQ, <20 V), 1 mV (<20 V), 10 mV (>20 V)
Pulse Width Range5 μs – >0.1 s (DAQ), 15 ms – >0.1 s (Boonton)
Pulse Amplitudeup to 200 V (Boonton), up to 20 V (DAQ)
Slew Rate<20 V/ms (Boonton), 20 V/μs (DAQ)
Current Limit5 mA
Sampling Ratedown to 1 μs
Record Length>10,000 points
Time Resolution50 ns
Capacitance Resolution<50 aF
Automatic ZeroingYes
Auto-RangingYes
Response Time~25 μs
Compensation Range256 pF
Test Signal Levels15, 30, 50, 100 mV
FilteringAuto-detection and sinusoidal noise suppression
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BrandMIDAS
OriginSouth Korea
ModelMDA-400M
Exposure SourceUshio 350W UV Lamp (or optional 365 nm LED, 10,000 h lifetime)
Resolution1 µm (vacuum/hard contact), 2 µm (soft contact), 5 µm (20 µm gap proximity)
Beam Size4.25 × 4.25 inch
Uniformity≤3% (over 4-inch field)
Intensity>30 mW/cm² @ 365 nm
Exposure Time0.1–999.9 s
Alignment Accuracy±0.5 µm
Stage TravelX/Y ±10 mm, θ ±5°, Z ±10 mm
Approach Step Resolution1 µm
MicroscopyDual CCD zoom microscope (80×–480×), 17″ LCD monitor
Substrate Compatibility2″, 3″, 4″ wafers
Mask Size4″ and 5″
Vacuum Requirement< −200 mbar (integrated oil-free pump)
CDA>5 kg/cm²
N₂>3 kg/cm²
Power220 V, 15 A, single-phase
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BrandEMU
OriginUK
Manufacturer TypeAuthorized Distributor
Import StatusImported
ModelSPPE
Throughput400 WPH
Wafer Diameters Supported75 mm / 100 mm, 125 mm / 150 mm, and 150 mm / 200 mm
ESD ProtectionFull Integrated ESD-Safe Architecture
CompatibilitySi, SiC, GaN, and Other Semiconductor Substrates
Control SystemEmbedded PC with Touchscreen HMI
Interface OptionsSECS/GEM Compliant
Cassette HandlingAuto-mapping with Dual-Slot & Cross-Loading Detection
SafetyReal-time Wafer Presence & Edge Detection Sensors
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BrandEMU
OriginUnited Kingdom
Manufacturer TypeAuthorized Distributor
Origin CategoryImported
ModelBatch Aligner and Elevator
Wafer Diameters Supported75 mm, 100 mm, 125 mm, 150 mm, 200 mm
Alignment ReferenceFlat or Notch
Lifting MechanismDual Non-Vacuum Comb Lifters
IlluminationConfigurable LED (Standard: Red or White)
Substrate CompatibilitySi, SiC, GaN, and Other Compound Semiconductors
InterfaceTouchscreen HMI with Angle Selection for Edge Alignment
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BrandEMU
OriginUnited Kingdom
Manufacturer TypeAuthorized Distributor
Origin CategoryImported
ModelSelective Wafer Elevator
Wafer Diameters Supported75 mm, 100 mm, 125 mm, 150 mm, 200 mm
Operation ModeManual Actuation with Indexed Slot Selection (e.g., slots 1, 6, 11, 16, 21)
Construction MaterialsCleanroom-Compatible Organic Polymers and Non-Shedding Structural Components
ComplianceDesigned for ISO Class 1–5 Cleanroom Environments
Substrate CompatibilitySilicon (Si), Silicon Carbide (SiC), Gallium Nitride (GaN), Sapphire, SOI
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BrandPVD
OriginUSA
Distributor TypeAuthorized Distributor
Origin CategoryImported
ModelStandard Particles
PriceUpon Request
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BrandMidas
OriginGermany
ModelSPIN150X
Max. Rotation Speed12000 rpm
Speed Accuracy±1 rpm
Max. Acceleration30000 rpm/s
Substrate Diameterup to 160 mm (6")
Chamber Diameter202 mm
Controller Memory50 programs × 99 steps each
Programmable Outputs2 dry-contact relays
Dimensions (W×D×H)275 × 240 × 450 mm
Housing MaterialNatural Polypropylene (NPP) or PTFE options
Sample Compatibility5 mm to 160 mm round wafers or 4" × 4" square substrates
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BrandEMU
OriginUnited Kingdom
ModelSMIF Batch ID Reader
Wafer Size200 mm
Integration InterfaceGEM300 / SEMI E84
Cycle Time< 3 minutes
System ArchitectureIntegrated KUKA robotic handler + SMIF load port + IDWR200SMIF reader module
Application ScopeAutomated wafer lot tracking, SMIF pod-to-pod transfer, front-end fab traceability
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BrandMidas
OriginSouth Korea
Manufacturer StatusAuthorized Distributor
Origin CategoryImported
ModelMDA-400LJ
PricingUpon Request
Mask Size Max5-inch
Substrate Size Max4-inch circular wafers
Beam ShapeCircular
Beam Diameter125 mm
Light SourceUV LED
Wavelength365 nm
Beam Uniformity< ±3 %
Peak Irradiance at 365 nm25 mW/cm²
Alignment MethodManual
Alignment Accuracy±1 µm
Exposure ModesSoft Contact, Hard Contact, Proximity (Vacuum-assisted)
Resolution1 µm (with 1 µm photoresist thickness under vacuum contact)
Weight150 kg
Dimensions (W×D×H)995 × 800 × 850 mm
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BrandMidas
OriginSwitzerland
TypeElectrostatic Chuck (E-chuck)
ApplicationWafer-level and Die-level Fixturing in Wet Etching & MEMS Processing
ComplianceDesigned for ISO Class 5–7 cleanroom environments
Control InterfaceAnalog voltage input (0–10 V) or digital RS-485
Holding Force RangeAdjustable up to 0.1–0.8 N/cm² depending on die size and surface condition
Substrate CompatibilitySi, SiO₂, SiN, SOI, GaAs, quartz, and patterned MEMS wafers
Operating TemperatureAmbient to 80 °C
Vacuum RequirementOptional backside helium cooling interface (compatible with standard wafer chucks)
MaterialAl₂O₃ ceramic base with embedded bipolar or monopolar electrode architecture
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BrandKorea Vacuum
OriginSouth Korea
ModelPECVD/RIE
Heating MethodHot-Wall
Application DomainSemiconductor Fabrication
Gas Channels8 (4 for PECVD, 4 for RIE)
Deposited FilmsSiOₓ, SiNₓ
Base Pressure1×10⁻⁷ Torr
Operating Pressure Range (PECVD)1×10⁻³ Torr
Operating Pressure Range (RIE)0.02–500 mTorr
Maximum Substrate Size8-inch (200 mm)
RF Source Power600 W, 13.56 MHz
RF Bias Power300 W, 13.56 MHz
Platen TemperatureUp to 400 °C
Pumping System200 L/sec corrosion-resistant turbomolecular pump (Pfeiffer TPH261PC) + BOC Edwards RV12 roughing pump
Gas DistributionShowerhead-type for both PECVD and RIE
Substrate HandlingManual loading with pneumatic top-hinged lid
Vacuum GaugesBaratron capacitance manometer (RIE), BOC Edwards wide-range gauge (PECVD & RIE)
MFC Count4 (PECVD), 3 (RIE)
CoolingWater-cooled platen and electrodes
Control InterfaceLabVIEW-based PC control with automated pressure regulation and process sequencing
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BrandMidas
OriginSwitzerland
ModelIR-M (Infrared Microscope)
Optical Magnification Options2.5×, 5×, 10×
Wafer Compatibility100 mm (4″), 150 mm (6″), 200 mm (8″)
Spatial Resolution≤3 µm (at 5× objective, transmission mode)
Detection SensitivityDefects ≥3 µm resolvable in Si wafers under IR transmission
Illumination ModesTop-side visible illumination (reflected mode) + Through-wafer infrared illumination (transmission mode)
Imaging SensorIR-sensitive CMOS camera with USB 3.0 interface
StageManual or motorized XY stage (Ø ≤200 mm wafer support)
Application DomainSilicon IC & MEMS wafer-level defect inspection, SOI layer visualization, buried structure analysis
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BrandEMU
OriginUK
Manufacturer TypeAuthorized Distributor
Product CategoryImported Equipment
ModelIDWR
Price RangeUSD 14,000 – 72,000 (FOB)
Compatible Wafer Diameters75 mm, 100 mm, 125 mm, 150 mm, 200 mm
Throughput25 wafers per batch in ≤ 120 seconds (including cassette mapping, batch alignment, and full-surface ID reading)
Imaging SystemCognex In-Sight 1741 Smart Camera
Read TargetsLaser-etched marks and Data Matrix codes on wafer frontside and backside
Interface ProtocolsRS-232, Ethernet, SECS/GEM compliant
User InterfaceIntegrated industrial touchscreen with recipe management and maintenance diagnostics
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