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| Brand | EMU |
|---|---|
| Origin | UK |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | SPPE |
| Throughput | 400 WPH |
| Wafer Diameters Supported | 75 mm / 100 mm, 125 mm / 150 mm, and 150 mm / 200 mm |
| ESD Protection | Full Integrated ESD-Safe Architecture |
| Compatibility | Si, SiC, GaN, and Other Semiconductor Substrates |
| Control System | Embedded PC with Touchscreen HMI |
| Interface Options | SECS/GEM Compliant |
| Cassette Handling | Auto-mapping with Dual-Slot & Cross-Loading Detection |
| Safety | Real-time Wafer Presence & Edge Detection Sensors |
| Brand | EMU |
|---|---|
| Origin | United Kingdom |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Batch Aligner and Elevator |
| Wafer Diameters Supported | 75 mm, 100 mm, 125 mm, 150 mm, 200 mm |
| Alignment Reference | Flat or Notch |
| Lifting Mechanism | Dual Non-Vacuum Comb Lifters |
| Illumination | Configurable LED (Standard: Red or White) |
| Substrate Compatibility | Si, SiC, GaN, and Other Compound Semiconductors |
| Interface | Touchscreen HMI with Angle Selection for Edge Alignment |
| Brand | EMU |
|---|---|
| Origin | United Kingdom |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Selective Wafer Elevator |
| Wafer Diameters Supported | 75 mm, 100 mm, 125 mm, 150 mm, 200 mm |
| Operation Mode | Manual Actuation with Indexed Slot Selection (e.g., slots 1, 6, 11, 16, 21) |
| Construction Materials | Cleanroom-Compatible Organic Polymers and Non-Shedding Structural Components |
| Compliance | Designed for ISO Class 1–5 Cleanroom Environments |
| Substrate Compatibility | Silicon (Si), Silicon Carbide (SiC), Gallium Nitride (GaN), Sapphire, SOI |
| Brand | EMU |
|---|---|
| Origin | United Kingdom |
| Model | SMIF Batch ID Reader |
| Wafer Size | 200 mm |
| Integration Interface | GEM300 / SEMI E84 |
| Cycle Time | < 3 minutes |
| System Architecture | Integrated KUKA robotic handler + SMIF load port + IDWR200SMIF reader module |
| Application Scope | Automated wafer lot tracking, SMIF pod-to-pod transfer, front-end fab traceability |
| Brand | EMU |
|---|---|
| Origin | UK |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Equipment |
| Model | IDWR |
| Price Range | USD 14,000 – 72,000 (FOB) |
| Compatible Wafer Diameters | 75 mm, 100 mm, 125 mm, 150 mm, 200 mm |
| Throughput | 25 wafers per batch in ≤ 120 seconds (including cassette mapping, batch alignment, and full-surface ID reading) |
| Imaging System | Cognex In-Sight 1741 Smart Camera |
| Read Targets | Laser-etched marks and Data Matrix codes on wafer frontside and backside |
| Interface Protocols | RS-232, Ethernet, SECS/GEM compliant |
| User Interface | Integrated industrial touchscreen with recipe management and maintenance diagnostics |
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