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| Brand | Fischer |
|---|---|
| Origin | Germany |
| Model | DE90 |
| Measurement Principle | Piezoresistive Ceramic Sensor Technology |
| Output Signal | 4–20 mA (2-wire), optional 0–10 V |
| Accuracy | ±0.1 % FS |
| Long-Term Stability | <0.1 % FS/year |
| Operating Temperature Range | –20 to +70 °C |
| Enclosure Rating | IP65 |
| Media Compatibility | Air and neutral gases |
| Max. Overpressure | 5× full scale |
| Supply Voltage | 12–36 V DC |
| Response Time | <100 ms |
| Certifications | CE, RoHS, optionally ATEX II 3G Ex nA IIC T4 Ga (for DE43 variant), compliant with DIN EN 61326-1 (EMC), DIN EN 61000-6-2/6-4 |
| Brand | INFICON |
|---|---|
| Origin | Germany |
| Model | IC6 Thin Film Deposition Controller |
| Measurement Principle | Quartz Crystal Microbalance (QCM) with ModeLock Frequency Detection |
| Resolution | 0.00433 Å/s @ 100 ms sampling |
| Frequency Stability | ±0.0035 Hz |
| Max Simultaneous Sources | 6 |
| Layer Capacity | 50 processes × 200 layers = 10,000 total layers |
| Sensor Inputs | Up to 8 QCM sensors (averaged or independent) |
| Display | Color TFT LCD |
| I/O | 28 digital inputs, 24 relay outputs, 14 TTL outputs, 6 standard DACs + 6 optional DACs |
| Logic Engine | 100 programmable logic statements |
| Data Storage | Internal logging, screenshot capture, recipe storage |
| Communication | RS-232/485, optional Ethernet |
| Compliance | RoHS-compliant |
| Software Support | IC6 Configuration Editor (LabVIEW®-based, Windows®) |
| Brand | Elveflow |
|---|---|
| Origin | France |
| Model | MPS |
| Accuracy | ±0.2 % FS |
| Pressure Ranges | 70–7,000 mbar (5 selectable full-scale options) |
| Internal Volume | 7 µL |
| Response Time (Stabilization) | 20 ms |
| Media Compatibility | Liquids and Gases |
| Connection | Compatible with 3/32" ID tubing or 10-32 threaded fitting for 1/16" OD tubing |
| Type | Gauge Pressure Sensor (relative to ambient atmospheric pressure) |
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