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| Brand | SOPTOP |
|---|---|
| Origin | Zhejiang, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Regional Classification | Domestic (China) |
| Model | AWL Series |
| Pricing | Upon Request |
| Primary Applications | Front-end & back-end wafer process monitoring, outgoing wafer quality control |
| Supported Wafer Diameters | 100 mm, 150 mm, 200 mm, 300 mm |
| Configurations | AWL046 (4″/6″), AWL068 (6″/8″), AWL812 (8″/12″) |
| Macro Inspection | 360° full-rotation stage with dual-side tilt (front-side max 70°, back-side 1 max 90°, back-side 2 max 160°) |
| Micro Inspection | Semi-apochromatic metallurgical objectives supporting brightfield, darkfield, DIC, and polarized light modes |
| Vacuum Chuck | Manual quick-release mechanism |
| Control System | Motorized precision stage with μm-level defect resolution |
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