KASHIYAMA SDE1220 Oil-Free Dry Vacuum Pump

Overview

The KASHIYAMA SDE1220 is a high-performance, oil-free dry vacuum pump engineered for demanding laboratory and pilot-scale applications requiring clean, hydrocarbon-free vacuum generation. Based on Kashiyama’s proprietary dry rotary vane architecture, the SDE1220 eliminates reliance on conventional mineral or synthetic oils—replacing them with chemically inert fluorinated lubricant sealed within the compression chamber. This design ensures zero oil carryover into vacuum lines or process chambers, making it suitable for ultra-high-purity environments such as semiconductor R&D, thin-film deposition, electron microscopy sample preparation, and analytical instrumentation interfacing (e.g., mass spectrometry inlets, thermal desorption units). Its ultimate pressure of 0.5 Pa (3.75 × 10⁻³ Torr) and nominal pumping speed of 1200 m³/h (20,000 L/min at 50 Hz) enable rapid evacuation of medium-to-large volume chambers (up to ~1.5 m³) while maintaining stable base pressure under continuous operation. The pump operates on standard industrial three-phase power (200–220 V, 50/60 Hz), with integrated thermal management via regulated cooling water circulation (4–8 L/min at 10–25 °C inlet temperature).

Key Features

• Oil-free dry operation using sealed fluorinated lubricant—no oil mist, no condensable vapor, no maintenance-related oil changes
• Robust cast-iron housing with precision-machined rotor and vanes for long-term dimensional stability and minimal wear
• Integrated acceleration control: achieves full operational speed in ≤35 seconds; free-run deceleration minimizes mechanical stress during shutdown
• Dual-flanged configuration: NW50 inlet and NW25 outlet comply with ISO-KF standards for modular vacuum system integration
• Active nitrogen purge port (0.1–0.7 MPa gauge, up to 80 SLM) enables positive-seal protection against corrosive or condensable process gases
• Real-time thermal regulation via differential-pressure-sensitive cooling water circuit (min. ΔP = 0.2 MPa; max. supply pressure = 0.5 MPa gauge)
• Compliant with IEC 60034 motor safety standards; leakage current <30 mA; built-in overcurrent and thermal overload protection

Sample Compatibility & Compliance

The SDE1220 is compatible with non-reactive, non-particulate gas loads typical in physical vapor deposition (PVD), vacuum drying, freeze-drying support stages, and vacuum ovens. It is not intended for pumping solvent vapors, reactive halogens, or abrasive particulates without upstream trapping. As an imported Class I vacuum device, it conforms to JIS B 8341-1 (vacuum pump performance testing) and meets CE marking requirements for electromagnetic compatibility (EN 61000-6-3/6-4) and low-voltage directive (2014/35/EU). Its oil-free architecture supports compliance with ISO 8573-1 Class 0 air purity certification when used as a backing pump for turbomolecular systems. For GLP/GMP-regulated laboratories, the pump’s stable performance profile and absence of consumable lubricants simplify audit documentation and reduce variability in vacuum-critical protocols.

Software & Data Management

While the SDE1220 operates as a standalone unit without embedded digital controls, its electrical and thermal interfaces are designed for seamless integration into centralized vacuum system monitoring platforms. Analog 4–20 mA outputs (optional upon request) can relay motor current, bearing temperature, and cooling water flow status to SCADA or LabVantage-compatible controllers. All operational parameters—including voltage stability (±10% tolerance), cooling water differential pressure, and nitrogen purge pressure—are defined per manufacturer specifications to ensure traceable, repeatable system behavior. When deployed in FDA-regulated environments, the pump’s deterministic mechanical response and lack of software-defined logic eliminate concerns related to 21 CFR Part 11 electronic record integrity—making it inherently suitable for legacy-compliant infrastructure.

Applications

• Backing pump for turbomolecular and cryogenic high-vacuum systems in surface science labs
• Vacuum chamber evacuation for plasma etching and sputtering equipment in microfabrication facilities
• Primary vacuum source for glovebox antechambers and inert-atmosphere material synthesis reactors
• Support vacuum generation for electron probe microanalyzers (EPMA) and focused ion beam (FIB) workstations
• Process vacuum in pharmaceutical lyophilization development and stability testing rigs
• Clean vacuum for calibration of capacitance manometers and residual gas analyzers (RGAs)

FAQ

What is the recommended cooling water specification for continuous operation?
Cooling water must be deionized or softened, with inlet temperature maintained between 10–25 °C and a minimum pressure differential of 0.2 MPa between inlet and outlet. Flow rate must be sustained at 4–8 L/min.
Can the SDE1220 handle intermittent exposure to water vapor?
Yes—when operated with continuous nitrogen purge (≥0.3 MPa gauge, ≥20 SLM), the pump tolerates transient water vapor loads common in vacuum drying cycles, provided inlet pressure remains above 3 kPa for no longer than 30 minutes.
Is this pump suitable as a direct replacement for oil-sealed rotary vane pumps?
It serves as a functional equivalent in terms of pumping speed and ultimate pressure, but requires verification of flange alignment, cooling infrastructure, and electrical service capacity (7.7 kVA, 3-phase). No oil drain or mist separator retrofitting is needed.
What maintenance intervals are specified under normal laboratory use?
Fluorinated oil volume (1.2 L) is sealed for life; scheduled maintenance includes annual inspection of cooling water fittings, nitrogen purge filters, and motor insulation resistance—no routine vane replacement is required within first 12,000 operating hours.
Does the SDE1220 comply with noise emission limits for ISO 14001-certified facilities?
At 1 m distance, sound pressure level is ≤72 dB(A) under full-load conditions—within typical laboratory ambient limits and compatible with ISO 14001 environmental management system requirements.