MiXran Meg1062 High-Precision Fused Silica UV-Grade Planar Optical Window

Overview

The MiXran Meg1062 is a high-precision planar optical window engineered for demanding ultraviolet (UV) and broadband spectral applications requiring exceptional transmission, thermal stability, and wavefront fidelity. Constructed from synthetic fused silica conforming to UV-grade specifications (e.g., Corning 7980 or equivalent), the Meg1062 exhibits ultra-low hydroxyl (OH⁻) content (< 1 ppm), minimal intrinsic fluorescence, and negligible solarization under prolonged UV exposure—critical attributes for deep-UV lithography alignment systems, excimer laser beam delivery, spectroscopic cuvette housings, and space-qualified optical benches. Its λ/10 surface flatness (measured at 633 nm HeNe wavelength) and ≤10–5 scratch-dig surface quality ensure diffraction-limited performance in interferometric and collimated beam paths. The monolithic structure eliminates birefringence and provides coefficient of thermal expansion (CTE) of ~0.55 × 10⁻⁶ /°C, enabling stable optical alignment across wide ambient temperature ranges (–60 °C to +600 °C short-term).

Key Features

• UV-grade fused silica substrate with certified transmission ≥95% from 185 nm to 2.2 µm (uncoated); validated per ASTM E1331 for spectral transmittance
• Multiple anti-reflection (AR) coating variants deposited via ion-assisted e-beam evaporation: UV-optimized (250–400 nm), VIS (350–700 nm), NIR (600–1100 nm), and SWIR (900–1700 nm), each delivering <0.25% average reflectance per surface
• Controlled thickness tolerance of ±0.05 mm and parallelism <1 arcsecond, ensuring minimal beam deviation and phase error in precision optical trains
• Chemically polished surfaces with RMS roughness <0.3 nm, minimizing scatter losses critical for low-light applications such as Raman spectroscopy and single-photon detection
• RoHS-compliant manufacturing and ISO 9001-certified production traceability; each unit supplied with individual test report including spectral transmission curve and surface flatness interferogram

Sample Compatibility & Compliance

The Meg1062 window is compatible with vacuum environments up to 10⁻⁷ Torr and withstands bake-out temperatures to 300 °C without coating degradation. It meets MIL-O-13830A for surface quality and complies with ISO 10110-7 for optical element documentation. For regulated laboratory environments—including those operating under GLP or GMP frameworks—the product supports full audit trail documentation upon request (including lot-specific material certificates, coating deposition logs, and interferometric verification data). While not inherently FDA-regulated as a standalone component, its material compliance with USP Class VI for pharmaceutical-grade fused silica makes it suitable for optical interfaces in analytical instrumentation used in QC/QA workflows compliant with 21 CFR Part 11.

Software & Data Management

As a passive optical component, the Meg1062 requires no embedded firmware or driver software. However, MiXran provides downloadable spectral transmission datasets (CSV and .txt formats) calibrated against NIST-traceable spectrophotometers (PerkinElmer Lambda 1050+ with integrating sphere), enabling direct import into optical design platforms such as Zemax OpticStudio, CODE V, and FRED. Each product shipment includes a QR-coded label linking to secure cloud access for its unique metrology dossier—comprising surface flatness Zernike coefficients, measured transmission spectra, and coating adhesion test results (per ISO 2409 cross-hatch assessment). This digital twin infrastructure supports seamless integration into LIMS and QMS systems for full component-level traceability.

Applications

• Deep-UV photolithography stepper and scanner subsystems requiring high-transmission, low-birefringence beam windows
• Laser cavity end-caps and harmonic separator substrates for excimer (193 nm, 248 nm) and frequency-doubled Nd:YAG (266 nm) systems
• Optical viewport windows in UHV-compatible analytical chambers (XPS, AES, SIMS)
• Reference-grade calibration windows for UV-Vis-NIR spectrophotometers and FTIR accessories
• Front-surface protection elements in astronomical instrumentation operating under cryogenic conditions (e.g., near-IR detector dewars)
• Beam delivery optics in industrial UV curing systems where solarization resistance directly impacts process repeatability

FAQ

Is the Meg1062 suitable for 193 nm ArF excimer laser applications?
Yes—its low-OH fused silica composition and optional UV-AR coating (250–400 nm) are specifically optimized for 193 nm transmission and long-term irradiation stability.
Can I specify custom diameters or thicknesses outside the standard catalog?
Yes—MiXran offers OEM customization including non-standard dimensions, wedge angles, and hybrid multi-band AR coatings; lead time and MOQ apply.
What is the maximum power density the Meg1062 can withstand in continuous-wave (CW) operation?
For uncoated UV-grade fused silica, the damage threshold exceeds 10 MW/cm² at 1064 nm (10 ns pulse, 10 Hz); for CW UV lasers, derating is recommended per ISO 21254, and we advise consultation with our optical engineering team for application-specific validation.
Do you provide mounting hardware or kinematic cell designs for the Meg1062?
Standard retaining rings and vacuum-compatible flange adapters are available as optional accessories; full kinematic mount CAD models (STEP/IGES) can be supplied under NDA for integration into custom optical assemblies.
Are test reports provided with every shipment?
Yes—each unit ships with a certificate of conformance, spectral transmission plot, and interferometric flatness report; extended metrology packages (including wavefront error maps and scatter measurements) are available on request.