MiXran Meg1076 High-Precision Double-Sided Optical Flat

Overview

The MiXran Meg1076 High-Precision Double-Sided Optical Flat is a metrology-grade reference optic engineered for interferometric calibration, wavefront error assessment, and optical surface flatness verification in research laboratories, precision manufacturing facilities, and national metrology institutes. Fabricated using controlled thermal annealing and deterministic sub-aperture polishing processes, each Meg1076 unit delivers certified surface flatness of λ/10 at the helium–neon laser wavelength (633 nm), traceable to NIM (National Institute of Metrology, China) standards. Its double-sided parallelism—specified as <5 arcseconds for premium-grade units and <2 arcminutes for economy variants—is validated via Zygo Verifire™ or equivalent phase-shifting interferometers under ISO 10110-7 environmental conditions (20 ± 0.5 °C, <40% RH). Unlike single-surface flats, the Meg1076’s symmetric geometry minimizes thermal drift-induced wedge errors during extended interferometric sessions and supports bidirectional calibration protocols required in ISO/IEC 17025-accredited optical testing labs.

Key Features

• Traceable λ/10 surface flatness @ 633 nm (RMS), verified per ISO 10110-5 and MIL-PRF-13830B scratch-dig specifications
• Dual-grade parallelism options: ultra-precision (<5″) for high-resolution null testing; economical (<2′) for alignment and coarse verification
• Seven standardized diameters (25.4 mm to 304.8 mm) with thickness tolerances tightened to ±1 mm (≤101.6 mm) or ±2 mm (>101.6 mm)
• Low-expansion fused silica or optically homogenous BK7 substrate options, both meeting Schott K-SF5 or equivalent refractive index uniformity (Δn < 5 × 10⁻⁶)
• Optional broadband or laser-line anti-reflection coating (R<0.25% @ 633 nm), applied via ion-assisted e-beam deposition
• Serialized product labeling with unique batch ID, interferogram certificate number, and date of calibration

Sample Compatibility & Compliance

The Meg1076 is compatible with all standard interferometric platforms—including Zygo GPI, 4D AccuFiz, and Veeco NT9100—when mounted on kinematic or vacuum chucks. Its surface finish (typically 5 Å RMS roughness) ensures minimal scatter in monochromatic illumination environments. Each unit ships with a calibration certificate conforming to ISO/IEC 17025 requirements, including uncertainty budgets derived from repeatability studies (k = 2) and environmental sensitivity analysis. The flat satisfies critical clauses of ASTM E1338 (Standard Guide for Interferometric Measurement of Optical Surfaces) and supports GLP-compliant documentation workflows in regulated photonics R&D settings. RoHS 3 and REACH compliance are confirmed for all substrate and coating materials.

Software & Data Management

While the Meg1076 itself is a passive optical component, its calibration data integrates natively into industry-standard interferometry software suites. Certificate metadata—including Zernike coefficient sets (up to 36 terms), PV and RMS flatness values, and lateral shear maps—is provided in ASCII-compatible .txt and .csv formats. Optional XML-based calibration reports (per IEEE 1547.2) support automated ingestion into LIMS systems used in ISO 13485-certified medical optics production. All digital certificates include embedded digital signatures compliant with IEC 62443-3-3 for integrity verification in secure lab networks.

Applications

• Null testing of concave/convex spherical and aspheric mirrors using the three-flat method per ISO 10110-19
• Calibration of optical flats, gage blocks, and precision spacers in dimensional metrology labs
• Reference standard for evaluating surface figure errors in EUV lithography mask blanks
• Alignment fiducial in multi-axis laser interferometer systems (e.g., HP 5529A-based setups)
• Wavefront reference in adaptive optics test benches requiring stable, low-thermal-drift surfaces
• Validation substrate for optical coating uniformity mapping via spectral reflectance scanning

FAQ

Is the λ/10 flatness specification measured peak-to-valley or RMS?
All Meg1076 units are certified to λ/10 PV flatness per ISO 10110-5; RMS values are reported separately in the calibration certificate (typically ≤λ/20 RMS for fused silica variants).
Can I request custom diameter or thickness beyond the listed options?
Yes—MiXran offers OEM customization up to Ø350 mm and thicknesses up to 50 mm, subject to minimum order quantity and extended lead time (12–16 weeks).
Does the economy-grade parallelism (<2′) affect interferometric accuracy in routine alignment tasks?
No—parallelism <2′ introduces negligible error (<0.001 fringe shift) in visual nulling alignment or coarse collimation; it is not intended for quantitative figure error analysis.
Are calibration certificates valid for international accreditation (e.g., UKAS or DAkkS)?
Certificates are issued by a CNAS-accredited calibration lab (Certificate No. CNAS LXXXXX); direct UKAS/DAkkS recognition requires local re-verification per EN ISO/IEC 17025:2017 Clause 6.5.2.
What cleaning protocol is recommended to preserve surface integrity?
Use Class 100 cleanroom-grade acetone followed by spectroscopic-grade methanol, applied with lint-free polyester swabs (Texwipe TX609); avoid ultrasonic cleaning unless specified for fused silica variants.