Tongzhou Weipu SCs Single-Channel Semiconductor Chiller for Wafer Backgrinding Equipment
| Brand | Tongzhou Weipu |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | SCs (Semiconductor Chiller – Single Channel) |
| Pricing | Available Upon Request |
| Temperature Stability | ±0.1 °C |
| Control Algorithm | PID-Based Digital Temperature Regulation |
| Compliance | SEMI F47, SEMI S2, and SEMI E10 Certified |
| Channel Configuration | Single-Channel Dedicated Cooling Unit |
| Application | Primary Spindle Cooling for Wafer Backgrinding (Thin Grinding) and Dicing Systems |
Overview
The Tongzhou Weipu SCs Single-Channel Semiconductor Chiller is an engineered thermal management system designed exclusively for precision temperature control in front-end and back-end semiconductor fabrication processes. It serves as a dedicated coolant source for critical motion components—particularly high-speed spindles in wafer backgrinding (thin grinding) and dicing equipment—where thermal drift directly impacts dimensional accuracy, surface finish, and tool life. Operating on a closed-loop recirculating principle, the SCs chiller utilizes deionized water or low-conductivity coolant to maintain consistent thermal load dissipation under variable process duty cycles. Its core architecture integrates a hermetically sealed centrifugal pump, corrosion-resistant stainless-steel fluid path, and a high-efficiency plate heat exchanger optimized for low ΔT operation. The unit complies with SEMI F47 (voltage sag immunity), SEMI S2 (safety), and SEMI E10 (equipment reliability) standards—ensuring seamless integration into Class 1–100 cleanroom environments and compatibility with ISO 14644-1 certified facilities.
Key Features
- PID-based digital temperature control with real-time feedback loop, achieving ±0.1 °C steady-state stability over continuous 72-hour operation
- Low-noise acoustic design (<58 dB(A) at 1 m), meeting stringent cleanroom noise requirements per ISO 14698-1
- Energy-efficient variable-speed pump drive, reducing power consumption by up to 35% during partial-load conditions
- Corrosion-inhibited fluid circuit constructed from 316L stainless steel and EPDM-free wetted materials compliant with SEMI F57
- Integrated dry-run protection, flow monitoring, and high/low temperature interlocks aligned with SEMI E142 functional safety guidelines
- Compact footprint (W450 × D600 × H900 mm) and modular mounting interface for retrofit installation on existing backgrinding platforms
Sample Compatibility & Compliance
The SCs chiller is validated for use with 200 mm and 300 mm wafer processing tools requiring stable spindle cooling between 15 °C and 25 °C nominal setpoints. It supports coolant flow rates of 8–15 L/min at ≤3.5 bar pressure drop, compatible with standard DIN 11851 and VDMA 24577 quick-connect interfaces. All electrical, mechanical, and fluid interface specifications conform to SEMI standards for semiconductor manufacturing equipment, including electromagnetic compatibility (SEMI F26), chemical resistance (SEMI F12), and material outgassing (SEMI F19). The unit undergoes full FAT (Factory Acceptance Testing) per SEMI E132 protocol, with documented traceability to NIST-traceable temperature and flow calibration standards.
Software & Data Management
Equipped with an embedded ARM Cortex-M7 controller, the SCs chiller provides RS-485 Modbus RTU and optional Ethernet/IP communication for integration into factory-wide MES and SCADA systems. Local HMI includes a 5.7″ resistive touchscreen with multilingual UI (English, Japanese, Korean, Simplified Chinese), configurable alarm logging, and audit-trail-enabled parameter change history. Data export supports CSV format via USB 2.0 host port. For regulated environments, optional firmware upgrade enables 21 CFR Part 11-compliant electronic signatures, role-based access control, and time-stamped event logs required for GMP/GLP audits.
Applications
- Primary spindle cooling for wafer backgrinding machines (e.g., DISCO DGP8760, Tokyo Seimitsu PG series)
- Thermal stabilization of diamond grinding wheels during ultra-thin wafer processing (<50 µm)
- Coolant supply for dual-spindle dicing saws requiring independent temperature zones
- Support infrastructure for CMP endpoint detection systems sensitive to thermal lensing effects
- Integration into automated material handling lines where chiller uptime must exceed 99.5% MTBF per SEMI E10 Annex A
FAQ
What is the maximum allowable coolant conductivity for SCs chiller operation?
The system is rated for deionized water with conductivity ≤1.0 µS/cm; higher conductivity fluids require optional corrosion-resistant fluid path upgrade.
Does the SCs chiller support remote diagnostics via industrial Ethernet?
Yes—Modbus TCP and EtherNet/IP drivers are available as factory-installed options with full register mapping documentation.
Is the temperature sensor calibrated to NIST-traceable standards?
All units ship with factory calibration certificates traceable to NIST SRM 1750a (precision thermistor standard), with recalibration interval recommended every 12 months.
Can the SCs be integrated into a redundant cooling architecture?
While the SCs is a single-channel unit, its control architecture supports master-slave cascading with up to three units for N+1 redundancy configurations.
What maintenance intervals are specified for long-term reliability?
Preventive maintenance is scheduled at 6-month intervals, covering filter replacement, coolant analysis, and verification of PID loop response time per SEMI E132 Clause 7.3.
