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| Brand | Chotest |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | NS200 |
| Price | USD 84,000 (FOB) |
| Measurement Principle | Capacitive (LVDC) |
| XY Stage Travel | 150 mm × 150 mm |
| Maximum Scan Length | 55 mm |
| Step Height Repeatability | ±0.005 nm (5 Å) |
| Max Sample Size | 200 mm (8-inch wafer) |
| Sensor Resolution | 0.01 Å (sub-angstrom) at 13 µm range |
| Force Control | Adjustable from 1 µN to 10 mN |
| Vertical Range | 13 µm (standard), optional up to 1050 µm |
| Optical Navigation | 5 MP color camera (orthogonal or oblique view) |
| SPC Module | Yes |
| Environmental Requirements | 16–25 °C, ≤40% RH (non-condensing), vibration <6.35 µm/s (1–100 Hz) |
| Brand | Chotest |
|---|---|
| Origin | Guangdong, China |
| Model | NS391 |
| Measurement Principle | Capacitive (LVDC Sensor) |
| Measurement Area | 150 mm × 150 mm |
| Scan Length | 55 mm |
| Step Height Repeatability | 5 Å |
| Maximum Sample Size | 200 mm (8-inch wafer) |
| Sensor Resolution | ≤0.01 Å (at 13 µm range) |
| Force Control | Adjustable constant contact force, ultra-low inertia electromagnetic actuation |
| Structural Design | Single-arch龙门 (monolithic龙门) frame with vibration isolation |
| Optical Navigation | 5 MP color camera, coaxial & oblique viewing options |
| Software Modules | SPC analysis, multi-region auto-scan, 3D surface reconstruction, stress calculation, roughness/waviness parameter extraction (Ra, Rq, Rv, Rp, Rz, etc.) |
| Brand | Chotest |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | NS200 |
| Price | USD 84,000 (FOB Shenzhen) |
| Measurement Principle | Linear Variable Differential Capacitance (LVDC) |
| Probe Tip Radius | 2 µm |
| Scan Length | 55 mm |
| Step Height Repeatability | 0.5 Å (at 330 µm range) |
| Vertical Resolution | Sub-Ångström |
| Force Range | 1–50 mg (adjustable, closed-loop micro-electromagnetic control) |
| XY Stage | Motorized, 150 mm × 150 mm |
| Rotation Stage | 360° motorized |
| Z-Axis Lift | Motorized |
| Optical Navigation | 5 MP color camera, FOV 2200 × 1700 µm |
| Max Sample Thickness | 50 mm |
| Wafer Compatibility | 150 mm (6″) and 200 mm (8″) |
| Operating Environment | 16–25 °C, ΔT < 2 °C/h, RH 30–40 % (non-condensing), Vibration ≤ 6.35 µm/s (1–100 Hz), Acoustic Noise ≤ 80 dB, Airflow ≤ 0.508 m/s downward |
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