Thin Film Growth Equipment
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| Brand | Zhonghuan Furnace |
|---|---|
| Origin | Tianjin, China |
| Model | CVD-12II6SH-3Z (Dual-Zone) / CVD-12III9SH-3Z (Triple-Zone) |
| Max Temperature | 1200 °C |
| Heating Zone Length | 610 mm / 940 mm |
| Uniform Temperature Zone | 400 mm / 700 mm |
| Quartz Tube ID/OD | Φ80 mm / Φ100 mm |
| Rated Power | 4.8 kW / 7.2 kW |
| Voltage | 220 V / 380 V (3-phase) |
| Sliding Stroke | 485 mm / 650 mm |
| Sliding Mode | Manual or Motorized (Temperature-Programmed Auto-Translation) |
| Temperature Control | 50-Stage Programmable PID Controller, ±1 °C Accuracy |
| Gas Channels | Up to 3 Mass Flow Controlled Lines (0–500 sccm, N₂-calibrated, ±1% F.S.) |
| Vacuum System Options | Medium Vacuum (1×10⁻¹–1×10⁻³ Pa) or High Vacuum (1×10⁻³–1×10⁻¹ Pa |
| Sealing | Dual-Knurled KF Flanges with Multi-Ring Dynamic Seal Architecture |
| Cooling | Integrated Forced-Air Quenching System for Rapid Post-Process Thermal Extraction |