AITOLY MFC Series Thermal Mass Flow Controller
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor (OEM/ODM Support Available) |
| Product Type | Thermal Mass Flow Controller |
| Flow Sensing Principle | Constant-Temperature Anemometry (CTA) |
| Control Actuation | Proportional Solenoid Valve |
| Operating Gas Range | Air, N₂, O₂, CO₂, Ar, He, H₂ (with gas-specific calibration) |
| Accuracy | ±1% FS (typical, per ISO 14034) |
| Repeatability | ±0.2% FS |
| Response Time | <1 s (t₉₀) |
| Full-Scale Flow Ranges | 0–5 sccm to 0–1000 slm (model-dependent) |
| Output Signal | 0–5 VDC / 0–10 VDC / 4–20 mA (isolated) |
| Communication Interface | RS-485 (Modbus RTU), optional analog/digital I/O |
| Power Supply | 24 VDC ±10% |
| Enclosure Rating | IP65 |
| Compliance | CE, RoHS, ISO 9001-certified manufacturing |
Overview
The AITOLY MFC Series Thermal Mass Flow Controller is an engineered solution for precise, real-time measurement and closed-loop control of gas mass flow in laboratory, analytical, semiconductor, and industrial process applications. Utilizing constant-temperature anemometry (CTA), the device directly measures mass flow rate—without dependence on pressure or temperature fluctuations—by detecting heat transfer between a heated sensor element and the flowing gas stream. This principle enables high reproducibility and inherent compensation for gas composition changes when calibrated for specific gases (e.g., N₂, O₂, Ar, CO₂, He, H₂). Designed for integration into OEM systems and automated test benches, the MFC series delivers stable performance across dynamic flow conditions, with typical accuracy of ±1% of full scale and repeatability better than ±0.2% FS under controlled environmental conditions.
Key Features
- Thermal sensing architecture based on platinum RTD sensor elements with proprietary thermal compensation algorithms
- Integrated proportional solenoid control valve enabling fast, linear actuation with <1 s t₉₀ response time
- Multi-gas capability supported via factory-installed calibration curves and user-selectable gas tables
- Isolated analog outputs (0–5 VDC, 0–10 VDC, or 4–20 mA) compliant with industrial PLC and DAQ system interfaces
- RS-485 serial interface supporting Modbus RTU protocol for remote setpoint adjustment, status monitoring, and diagnostic logging
- Rugged aluminum housing rated IP65 for operation in dust- and splash-prone environments
- No moving parts in the flow path—minimizing maintenance and eliminating mechanical wear
- Compliant with ISO 14034 for flowmeter verification methodology and traceable to national metrology standards
Sample Compatibility & Compliance
The AITOLY MFC is validated for use with non-corrosive, non-condensing gases including air, nitrogen, oxygen, carbon dioxide, argon, helium, and hydrogen. Each unit undergoes individual calibration using gravimetric or sonic nozzle reference standards in accordance with ISO/IEC 17025-accredited procedures. Gas-specific calibration data is embedded in firmware and accessible via communication interface. The controller meets CE marking requirements under the EU Electromagnetic Compatibility Directive 2014/30/EU and Low Voltage Directive 2014/35/EU. RoHS 2011/65/EU compliance ensures restriction of hazardous substances in materials and manufacturing. Production facilities are certified to ISO 9001:2015, supporting audit readiness for GLP and GMP environments where documentation traceability and change control are required.
Software & Data Management
Configuration and operational diagnostics are managed via AITOLY’s Windows-based MFC ConfigTool, which supports firmware updates, gas table selection, zero/span adjustment, and alarm threshold setting. All configuration parameters—including gas type, full-scale range, output scaling, and communication settings—are stored in non-volatile memory. For integration into larger SCADA or MES platforms, the Modbus RTU implementation includes register mapping for real-time flow reading, valve position feedback, temperature compensation status, and fault codes (e.g., over-range, sensor open-circuit, valve stall). Audit trails and configuration logs can be exported for FDA 21 CFR Part 11–aligned validation protocols where electronic record integrity is mandated.
Applications
- Gas delivery control in plasma etching and CVD systems for semiconductor fabrication
- Carrier and purge gas regulation in gas chromatography (GC) and mass spectrometry (MS) sample introduction modules
- Precise fuel-air ratio management in micro-combustion research rigs and catalytic reactor studies
- Leak testing and decay analysis in vacuum chamber qualification (ASTM E493)
- Environmental simulation chambers requiring programmable gas blending (e.g., CO₂ enrichment, O₂ depletion)
- OEM integration into medical gas analyzers, breath simulators, and respiratory therapy devices
FAQ
What gases can this MFC measure and control?
The AITOLY MFC supports air, N₂, O₂, CO₂, Ar, He, and H₂—each with dedicated factory calibration. Custom gas calibrations are available upon request.
Is field recalibration possible?
Yes—zero calibration can be performed in-situ using dry, particle-free gas at atmospheric pressure; span calibration requires traceable reference equipment and is recommended annually or after critical maintenance.
Does it support digital communication for automation systems?
Yes—standard RS-485 Modbus RTU interface enables seamless integration with PLCs, PACs, and LabVIEW-based control architectures.
How is temperature and pressure variation compensated?
Internal temperature sensors and algorithmic compensation correct for ambient drift; pressure effects are minimized by design but additional pressure transducer input is supported in advanced firmware versions for absolute mass flow correction.
What is the minimum detectable flow rate for the smallest model?
The 0–5 sccm model achieves a resolution of 0.01 sccm with signal-to-noise ratio >60 dB, suitable for microfluidic and MEMS-scale gas handling applications.
