AITOLY MFC Series Thermal Mass Flow Controller
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC |
| Flow Measurement Principle | Thermal Mass Flow |
| Type | Thermal Mass Flow Controller |
| Compliance | Designed for industrial and laboratory process control environments |
| Manufacturer Status | OEM/ODM-capable manufacturer with proprietary sensor and proportional valve technology |
| Regulatory Context | Supports GLP/GMP-aligned operation via traceable calibration records and stable zero-point repeatability |
Overview
The AITOLY MFC Series Thermal Mass Flow Controller is an engineered solution for precise, real-time measurement and closed-loop control of gas mass flow rates in low-to-medium flow applications. Based on constant-temperature anemometry (CTA), the device utilizes a thermally sensitive bridge circuit embedded in the flow path: one sensor element is heated while the other remains at ambient temperature. As gas flows across the heated element, convective heat transfer alters the resistance balance, generating a signal linearly proportional to mass flow rate—eliminating dependence on pressure or temperature fluctuations common in volumetric methods. This principle enables direct mass flow readout in standard cubic centimeters per minute (sccm) or standard liters per minute (slm), without requiring external compensation. The controller integrates a high-stability thermal sensor array and a fast-response proportional control valve, allowing dynamic setpoint tracking with minimal overshoot and settling time under 100 ms. Its architecture supports continuous operation in clean, dry, non-corrosive gases—including N₂, O₂, Ar, He, CO₂, and synthetic air—within ambient temperature ranges of 5–45 °C and line pressures up to 1 MPa (gauge).
Key Features
- Proprietary thermal sensor design with <1% full-scale (FS) accuracy and ±0.5% FS repeatability over 12 months
- Integrated proportional control valve with <50 ms response time and <0.2% FS hysteresis
- Digital interface options: RS-485 (Modbus RTU), 0–5 V / 0–10 V analog input/output, and optional Ethernet/IP support
- Zero-point stability maintained via auto-zero function triggered during system idle periods
- Front-panel keypad and OLED display for local configuration, real-time flow monitoring, and alarm status indication
- Robust aluminum alloy housing rated IP65 for protection against dust and water ingress in industrial enclosures
- Factory-calibrated with NIST-traceable documentation; calibration certificates available per unit
Sample Compatibility & Compliance
The AITOLY MFC Series is validated for use with non-aggressive, particle-free gases commonly employed in semiconductor process tools, analytical instrumentation (e.g., GC carrier gas control), environmental test chambers, fuel cell research, and laboratory-scale reactor feed systems. It is not suitable for vapors, aerosols, or corrosive gases such as Cl₂, NH₃, or H₂S without custom wetted material upgrades (e.g., Hastelloy C-276 or electropolished 316L SS). While not certified to IEC 61508 or SIL standards out-of-the-box, its design adheres to functional safety fundamentals—including redundant sensor diagnostics and watchdog timer supervision—and may be integrated into SIL2-rated systems when deployed with appropriate system-level validation. Calibration protocols align with ISO/IEC 17025 requirements, and firmware supports audit trail logging compatible with FDA 21 CFR Part 11 compliance when used with validated host software.
Software & Data Management
AITOLY provides the MFC Control Suite—a Windows-based configuration and monitoring application supporting multi-device daisy-chaining via RS-485. The suite enables remote setpoint ramping, data logging at user-defined intervals (down to 10 Hz), CSV export with timestamped metadata, and alarm threshold configuration (e.g., flow deviation >±3% FS for >5 s). All configuration changes are recorded with operator ID, timestamp, and parameter delta. For enterprise integration, DLL and .NET SDKs are supplied for embedding control logic into LabVIEW, Python (PySerial/Modbus), or SCADA platforms. Firmware updates are performed via secure signed binaries, preserving configuration integrity across revisions.
Applications
- Precise carrier and purge gas regulation in gas chromatography (GC) and Fourier-transform infrared (FTIR) spectrometers
- Stoichiometric gas blending in plasma-enhanced chemical vapor deposition (PECVD) and atomic layer deposition (ALD) tools
- Controlled atmosphere generation for accelerated corrosion testing and humidity calibration chambers
- Mass flow feedback in electrochemical gas sensors and breath analysis prototypes
- Feedstock dosing in microreactor systems for catalytic reaction kinetics studies
- Leak testing support via differential flow comparison in dual-MFC configurations
FAQ
What gases are supported by default?
Standard models are calibrated for nitrogen (N₂); conversion factors for up to 12 additional gases (O₂, Ar, He, CO₂, CH₄, etc.) are embedded in firmware and selectable via software.
Is field recalibration possible?
Yes—zero calibration can be performed locally using the front-panel menu; span calibration requires connection to a reference standard and the MFC Control Suite.
Does the device support bidirectional flow measurement?
No—standard MFC units are unidirectional; bidirectional variants (MFC-BD) are available upon request with modified sensor geometry and firmware.
What is the minimum measurable flow rate?
Depends on full-scale range selected; down to 2 sccm FS with resolution of 0.01 sccm on 10 sccm-range units.
Can multiple MFCs be synchronized for ratio control?
Yes—via Modbus broadcast commands or master-slave analog linking, enabling fixed-ratio or cascaded flow control architectures.
